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    MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
    2.
    发明公开
    MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD 审中-公开

    公开(公告)号：US20240154598A1

    公开(公告)日：2024-05-09

    申请号：US18550628

    申请日：2022-03-10

    申请人： HUAWEI TECHNOLOGIES CO., LTD.

    发明人： Guoqiang WU ,  Wen CHEN ,  Jinzhao HAN ,  Zhihong FENG

    IPC分类号： H03H9/02 ,  H03H3/007 ,  H03H9/10 ,  H03H9/24

    CPC分类号： H03H9/02433 ,  H03H3/0072 ,  H03H9/1057 ,  H03H9/2463 ,  H03B5/32

    摘要： The present disclosure relates to a micro electro mechanical system (MEMS) resonator. An example MEMS resonator includes a substrate, a barrier layer, a conducting layer, a dielectric isolation layer, a harmonic oscillator, a first electrical isolation structure, and a first conducting structure. The substrate and the barrier layer are combined to form a cavity, and a junction between the substrate and the barrier layer includes the conducting layer. The dielectric isolation layer is included between the conducting layer and the barrier layer. The harmonic oscillator is connected to the conducting layer and is suspended in the cavity. The conducting layer is connected to a first conducting structure that is outside the barrier layer, and a first electrical isolation structure is included between the first conducting structure and the barrier layer. The barrier layer and the dielectric isolation layer are configured to isolate the first electrical isolation structure from the cavity.

    MEMS RESONATOR AND MANUFACTURING METHOD
    3.
    发明公开
    MEMS RESONATOR AND MANUFACTURING METHOD 审中-公开

    公开(公告)号：US20230231538A1

    公开(公告)日：2023-07-20

    申请号：US18002391

    申请日：2021-07-01

    申请人： KYOCERA Tikitin Oy

    发明人： Aarne OJA

    IPC分类号： H03H9/24 ,  H03H3/007 ,  H03H9/02

    CPC分类号： H03H9/2452 ,  H03H3/0072 ,  H03H9/02393

    摘要： A MEMS (microelectromechanical system) resonator includes a first layer of single-crystalline silicon, a second layer of single-crystalline silicon, and a piezoelectric layer in between said first layer of single-crystalline silicon and the second layer of single-crystalline silicon. A manufacturing method of the MEMS resonator includes at least one of the interfaces between the single-crystalline silicon layers and the piezoelectric layer be made by wafer bonding.

    BULK MODE MICROELECTROMECHANICAL RESONATOR DEVICES AND METHODS
    6.
    发明申请
    BULK MODE MICROELECTROMECHANICAL RESONATOR DEVICES AND METHODS 审中-公开

    公开(公告)号：US20180219529A1

    公开(公告)日：2018-08-02

    申请号：US15872265

    申请日：2018-01-16

    申请人： MEMS-VISION INTERNATIONAL INC.

    发明人： MOHANNAD ELSAYED ,  MOURAD EL-GAMAL ,  FREDERIC NABKI ,  PAUL-VAHE CICEK

    IPC分类号： H03H9/205 ,  B81B3/00 ,  H03H9/17

    CPC分类号： H03H9/205 ,  B81B3/0086 ,  B81B2201/0271 ,  B81B2207/07 ,  H03H3/0072 ,  H03H3/0075 ,  H03H9/171 ,  H03H9/2436 ,  H03H2009/155 ,  H03H2009/241

    摘要： Micromachined microelectromechanical systems (MEMS) based resonators offer integration with other MEMS devices and electronics. Whilst piezoelectric film bulk acoustic resonators (FBAR) generally exhibit high electromechanical transduction efficiencies and low signal transmission losses they also suffer from low quality factors and limited resonance frequencies. In contrast electrostatic FBARs can yield high quality factors and resonance frequencies but suffer from increased fabrication complexity. lower electromechanical transduction efficiency and significant signal transmission loss. Accordingly, it would be beneficial to overcome these limitations by reducing fabrication complexity via a single metal electrode layer topping the resonator structure and supporting relatively low complexity/low resolution commercial MEMS fabrication processes by removing the fabrication requirement for narrow transduction gaps. Beneficially, embodiments of the invention provide MEMS circuits with electrostatic tuning and provide resonator designs combining the advantages of piezoelectric actuation and bulk-mode resonators.

    SIGNAL PROCESSING APPARATUS AND METHOD FOR TRANSMITTING AND RECEIVING COHERENT PARALLEL OPTICAL SIGNALS
    8.
    发明申请
    SIGNAL PROCESSING APPARATUS AND METHOD FOR TRANSMITTING AND RECEIVING COHERENT PARALLEL OPTICAL SIGNALS 审中-公开

    公开(公告)号：US20180083599A1

    公开(公告)日：2018-03-22

    申请号：US15703704

    申请日：2017-09-13

    申请人： Ecole Polytechnique Federale de Lausanne (EPFL)

    发明人： Tobias KIPPENBERG ,  Christian KOOS ,  Pablo MARIN-PALOMO ,  Kemal Juned NASSIR

    IPC分类号： H03H9/24 ,  H03H9/50 ,  H03H9/46 ,  H03H3/007 ,  H03H9/02

    CPC分类号： H03H9/2431 ,  H03H3/0072 ,  H03H9/02244 ,  H03H9/462 ,  H03H9/505 ,  H03H2009/02496 ,  H04B10/506 ,  H04B10/508 ,  H04B10/614 ,  H04B10/63 ,  H04J14/02 ,  H04J14/06

    摘要： A signal processing apparatus, being configured for transmitting and receiving coherent parallel optical signals, comprises a transmitter apparatus including a first single soliton micro-resonator device and a modulator device, wherein the first single soliton micro-resonator device is adapted for creating a single soliton providing a first frequency comb, wherein the first frequency comb provides a plurality of equidistant optical carriers with a frequency spacing corresponding to a free spectral range of the first single soliton micro-resonator device, and the modulator device is adapted for modulating the optical carriers according to data to be transmitted, and a receiver apparatus including a coherent receiver device with a plurality of coherent receivers and a local oscillator device providing a plurality of reference optical signals, wherein the coherent receiver device and the local oscillator device are arranged for coherently detecting the transmitted modulated optical carriers, wherein the signal processing apparatus further includes at least one second single soliton micro-resonator device having a free spectral range being equal or approximated to the free spectral range of the first single soliton micro-resonator device and being adapted for creating at least one single soliton providing at least one second frequency comb, wherein the at least one second frequency comb provides at least one of additional optical carriers and the reference optical signals. Furthermore, a signal processing method, including transmitting and receiving coherent parallel optical signals via a communication channel is described.