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    DUAL TRENCH DEEP TRENCH BASED UNRELEASED MEMS RESONATORS
    5.
    发明申请
    DUAL TRENCH DEEP TRENCH BASED UNRELEASED MEMS RESONATORS 审中-公开

    公开(公告)号：US20170170805A1

    公开(公告)日：2017-06-15

    申请号：US15285223

    申请日：2016-10-04

    申请人： Wentao Wang ,  Dana Weinstein

    发明人： Wentao Wang ,  Dana Weinstein

    IPC分类号： H03H9/17 ,  H03H3/02 ,  H01G4/06

    CPC分类号： H03H9/17 ,  H01G4/06 ,  H03H3/02 ,  H03H9/2405 ,  H03H2003/027 ,  H03H2009/155

    摘要： A deep trench (DT) MEMS resonator includes a periodic array of unit cells, each of which includes a single DT formed in a semiconductor substrate and filled with a material whose acoustic impedance is different than that of the substrate. The filled DT is used as both an electrical capacitor and a mechanical structure at the same time, making it an elegant design that reduces footprint and fabrication complexity. Adding a second DT to each unit cell in a DT MEMS resonator forms a dual-trench DT (DTDT) MEMS resonator. In a DTDT unit cell, the first DT is filled with a conductor to sense, conduct, and/or generate an acoustic wave. The second DT in the DTDT unit cell is filled with an insulator. The width, filling, etc. of the second DT in the DTDT unit cell can be selected to tune the acoustic passband of the DTDT unit cell.

    Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
    8.
    发明授权
    Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs 有权
    使用双压电晶片的单晶压电MEMS器件中的可变电容器和开关结构

    公开(公告)号：US09466430B2

    公开(公告)日：2016-10-11

    申请号：US14071025

    申请日：2013-11-04

    申请人： RF Micro Devices, Inc.

    发明人： Kushal Bhattacharjee

    IPC分类号： H01L41/09 ,  H03H9/125 ,  H03H9/15 ,  H01G5/18 ,  H03H9/02 ,  H03H9/46 ,  H03H9/24 ,  B81B3/00

    CPC分类号： H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

    摘要： A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with a first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrode is in contact with a second bimorph layer of the piezoelectric layer.

    摘要翻译： 微电气机械系统（MEMS）装置包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 第一电极可以设置在面向基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与第一表面相对的压电层的第二表面上，使得第二电极与压电层的第二双晶片层接触。