Method for manufacturing piezoelectric device

    公开(公告)号:US10707406B2

    公开(公告)日:2020-07-07

    申请号:US15473661

    申请日:2017-03-30

    发明人: Korekiyo Ito

    摘要: In a method of manufacturing a piezoelectric device, during an isolation formation step, a supporting substrate has a piezoelectric thin film formed on its front with a compressive stress film present on its back. The compressive stress film compresses the surface on a piezoelectric single crystal substrate side of the supporting substrate, and the piezoelectric thin film compresses the back of the supporting substrate, which is opposite to the surface on the piezoelectric single crystal substrate side. Thus, the compressive stress produced by the compressive stress film and that produced by the piezoelectric thin film are balanced in the supporting substrate, which causes the supporting substrate to be free of warpage and remain flat. A driving force that induces isolation in the isolation formation step is gasification of the implanted ionized element rather than the compressive stress to the isolation plane produced by the piezoelectric thin film.

    Acoustic wave device and method of manufacturing the same

    公开(公告)号:US10483941B2

    公开(公告)日:2019-11-19

    申请号:US15388188

    申请日:2016-12-22

    发明人: Yohei Shimizu

    IPC分类号: H03H9/02 H03H9/64 H01L41/253

    摘要: An acoustic wave device includes: a piezoelectric substrate; an IDT that is formed on the piezoelectric substrate and includes a pair of comb-shaped electrodes facing each other, each of the pair of comb-shaped electrodes including an grating electrode that excites an acoustic wave and a bus bar to which the grating electrode is connected; and reforming regions that are located only inside the piezoelectric substrate and arranged at intervals under the IDT, and in which a material of the piezoelectric substrate is reformed.

    TWO-DIMENSIONAL DISTRIBUTED MODE ACTUATOR
    9.
    发明申请

    公开(公告)号:US20190200139A1

    公开(公告)日:2019-06-27

    申请号:US15853289

    申请日:2017-12-22

    申请人: NVF Tech Ltd.

    摘要: Methods, systems, and apparatus for using a two-dimensional distributed mode actuator. One of the systems includes a transducer adapted to create a force to cause vibration of a load to generate sound waves, the transducer having a first width along a first axis; a transfer portion connected to the transducer along a first side parallel to the first axis, and having a second width along the first axis that is less than the first width; and a stub connected to the transfer portion along a second side of the transfer portion that is parallel to the first axis and an opposite side from the first side connected to the transducer, having a third width that is greater than the second width, and having a surface adapted to connect to the load to transfer the force received from the transducer through the transfer portion to the load.