摘要:
A resonator device includes: a base; a resonator element that includes a resonator substrate and an electrode; a conductive layer that is disposed on the base; a metal bump that is disposed between the conductive layer and the resonator element, and that electrically couples the conductive layer and the electrode while bonding the conductive layer and the resonator element; and at least one of a first low elastic modulus layer that is interposed between the base and the conductive layer, that overlaps the metal bump in a plan view of the base, and that has an elastic modulus smaller than that of the metal bump, and a second low elastic modulus layer that is interposed between the resonator substrate and the electrode, that overlaps the metal bump in the plan view of the base, and that has an elastic modulus smaller than that of the metal bump.
摘要:
A MEMS microphone includes a base structure and a piezoelectric resonator body having a first end and a second end. The first end is fixedly supported by the base structure and the second end is free such that the piezoelectric resonator is cantilevered from the base structure. The MEMS microphone further includes a first electrode operably connected to the piezoelectric resonator body and a second electrode operably connected to the piezoelectric resonator body. A controller includes at least one circuit operably connected to the first and second electrodes and configured to drive the piezoelectric resonator body at a shear resonance frequency of the piezoelectric resonator body and to detect a difference in the shear resonance frequency from a baseline resonance frequency resulting from a sound pressure.
摘要:
A crystal resonator includes: a crystal resonator plate; a first sealing member that covers a first excitation electrode of the crystal resonator plate; and a second sealing member that covers a second excitation electrode of the crystal resonator plate and includes a first external electrode terminal and a second external electrode terminal to be bonded to a circuit board using a flowable conductive bonding material. The second sealing member includes a second through hole and a third through hole that pass through between a first main surface and a second main surface on which the first external electrode terminal and the second external electrode terminal are formed. The second through hole and the third through hole include: respective through electrodes for conduction between electrodes formed on the first main surface and the second main surface; and respective through parts.
摘要:
One embodiment of the present invention sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with oxide. By growing oxide within the slots, the amount of oxide growth on the outside surfaces of the MEMS resonator may be reduced. Furthermore, by situating the slots in the areas of large flexural stresses, the contribution of the embedded oxide to the overall TCF of the MEMS resonator is increased, and the total amount of oxide needed to decrease the overall TCF of the MEMS resonator to a particular target value is reduced. As a result, the TCF of the MEMS resonator may be reduced in a manner that is more effective relative to prior art approaches.
摘要:
One embodiment of the present invention sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with oxide. By growing oxide within the slots, the amount of oxide growth on the outside surfaces of the MEMS resonator may be reduced. Furthermore, by situating the slots in the areas of large flexural stresses, the contribution of the embedded oxide to the overall TCF of the MEMS resonator is increased, and the total amount of oxide needed to decrease the overall TCF of the MEMS resonator to a particular target value is reduced. As a result, the TCF of the MEMS resonator may be reduced in a manner that is more effective relative to prior art approaches.
摘要:
A torsional mode electromechanical transducer comprises a piezoelectric ceramic piece oppositely poled along opposite side surfaces and a pair of electrodes attached to the respective principal surfaces of the ceramic piece. A mechanical resonator having appropriate planar surfaces may be attached to one or both of the electrodes with the ceramic piece. A pair of such piezoelectric ceramic pieces may be fixed together with a common electrode interposed and with the directions of residual polarization of the respective ceramic pieces disposed antiparallel.
摘要:
The exact thickness of the bond between the transducer and the delay line is established by the placing of metallic shims in the bonding material; therefore allowing control of the electrical impedance.
摘要:
This disclosure is concerned with converting electromagneticwaves to elastic waves (and vice-versa) in successive regions near an end of a magneto-elastic medium wherein electromagnetic energy tunneling is first forced, spin-wave conversion is then achieved, and finally spin wave-elastic wave conversion is effected such that the elastic waves are propagated in the medium (and vice-versa).
摘要:
A microwave integrated circuit operating as an acoustic delay line comprises a substrate, at least an input strip line conductive pattern and an output strip line conductive pattern deposited on said substrate, at least one electroacoustic transducer between said lines and said substrate located so that the acoustic waves propagate within the substrate along a preferred axis.
摘要:
A sonic delay line wherein electric impulses are converted to acoustic impulses passed through glass and reconverted to electrical impulses, wherein the acoustic impedance of the transducer is matched to that of glass utilizing an alloy of approximately equal parts of bismuth and indium, by weight.