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公开(公告)号：US11662204B2
公开(公告)日：2023-05-30
申请号：US17155418
申请日：2021-01-22
IPC分类号： H03H9/21 , G01C19/5628
CPC分类号： G01C19/5628 , H03H9/21
摘要： A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.
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公开(公告)号：US11307033B2
公开(公告)日：2022-04-19
申请号：US16827809
申请日：2020-03-24
IPC分类号： G01C19/5705
摘要： Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0
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公开(公告)号：US11293755B2
公开(公告)日：2022-04-05
申请号：US17005466
申请日：2020-08-28
IPC分类号： G01C19/5642
摘要： A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1
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公开(公告)号：US11287260B2
公开(公告)日：2022-03-29
申请号：US17005400
申请日：2020-08-28
IPC分类号： G01C19/5663 , G01C19/5656
摘要： A vibrator device includes: a vibrator element that includes a vibrator substrate including a vibrating arm, and an electrode arranged in the vibrator substrate; a base; a support substrate that includes a base mount fixed to the base, an element support that supports the vibrator element, and a beam that connects between the base mount and the element support, and supports the vibrator element relative to the base; a wiring pattern that is arranged in the support substrate, and is electrically connected to the vibrator element; and a buffer member that is arranged on the wiring pattern of the support substrate, and whose hardness is lower than that of the support substrate. Also the buffer member is arranged on a face of the support substrate, that opposes the vibrator element, and overlaps the vibrating arm in a plan view of the support substrate.
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5.发明授权公开(公告)号：US09362483B2
公开(公告)日：2016-06-07
申请号：US14687401
申请日：2015-04-15
发明人： Seiichiro Ogura , Takayuki Kikuchi
IPC分类号： G01C19/56 , H01L41/253 , G01C19/5607 , H01L41/09 , H01L41/047 , H01L41/107 , H03H9/21
CPC分类号： H01L41/253 , G01C19/5607 , H01L41/0475 , H01L41/09 , H01L41/107 , H03H9/21 , Y10T29/42
摘要： A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part. Further, adjustment vibrating arms extended from respective ends of connecting parts respectively extended from both ends in an X-axis direction of the base part in parallel to the drive vibrating arms are provided. At the end sides of the respective adjustment vibrating arms, spindle parts as wider parts are provided. On principal surfaces of the respective adjustment vibrating arms, adjustment electrodes as membranes for adjustment of leakage output of the vibration gyro device are provided.
摘要翻译： 振动陀螺装置具有分别从基部的Y轴方向的两端延伸的基部和一对驱动振动臂和一对检测振动臂。 此外，设置了从驱动振动臂平行的基部的X轴方向的两端分别延伸的连接部的各端部延伸的调节振动臂。 在相应的调节振动臂的端侧设有主轴部件作为较宽的部件。 在各个调节振动臂的主表面上，设置有作为用于调节振动陀螺仪装置的泄漏输出的膜的调节电极。
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公开(公告)号：US11916538B2
公开(公告)日：2024-02-27
申请号：US17152128
申请日：2021-01-19
CPC分类号： H03H9/19 , H03H9/0509 , H03H9/1021
摘要： A vibrator device includes a vibrating body having obverse and reverse principal surfaces and a side surface connecting the obverse and reverse principal surfaces to each other, a package configured to house the vibrating body, and a bonding material configured to fix the vibrating body to the package, wherein the vibrating body has a coupling part including a recess recessed from the side surface toward a center of the principal surfaces, and a protrusion protruding from a side surface of the recess, the protrusion is one of breaking-off parts with which a plurality of the vibrating bodies is broken off from a wafer to which the plurality of the vibrating bodies is coupled, and the bonding material has contact with a side surface of the protrusion in the recess.
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公开(公告)号：US11595026B2
公开(公告)日：2023-02-28
申请号：US17243632
申请日：2021-04-29
IPC分类号： G01C19/5607 , G01C19/5621 , H03H9/21 , H03H3/02 , H03H9/05 , H03H3/04 , H03H9/10
摘要： A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.
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公开(公告)号：US10295346B2
公开(公告)日：2019-05-21
申请号：US14886681
申请日：2015-10-19
发明人： Seiichiro Ogura , Ryuta Nishizawa
IPC分类号： G01C19/5705
摘要： A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.
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公开(公告)号：US09013093B2
公开(公告)日：2015-04-21
申请号：US13905581
申请日：2013-05-30
IPC分类号： H01L41/053 , G01C19/5607
CPC分类号： H01L41/053 , G01C19/5607
摘要： A vibrating reed includes a vibrating body (a base portion, a vibrating arm, and a detection arm) and a support portion that supports the vibrating body via a plate-like coupling portion. In both principal surfaces of the coupling portion, grooves (a first groove and a second groove) are disposed. The first groove arranged in one of the principal surfaces of the coupling portion and the second groove arranged in the other principal surface are arranged at positions different from each other in plan view.
摘要翻译： 振动片包括振动体（基部，振动臂和检测臂）以及经由板状连结部支撑振动体的支撑部。 在耦合部分的两个主表面中，设置有槽（第一槽和第二槽）。 布置在联接部分的主表面中的一个主表面上的第一凹槽和布置在另一个主表面中的第二凹槽布置在平面图中彼此不同的位置。
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10.发明授权公开(公告)号：US11888464B2
公开(公告)日：2024-01-30
申请号：US18081084
申请日：2022-12-14
IPC分类号： H03H9/21 , H03H3/02 , H03H9/05 , G01C19/5607 , H03H3/04 , H03H9/10 , G01C19/5621 , G01C19/5628 , G01C19/5663 , G01C19/5656
CPC分类号： H03H9/21 , G01C19/5607 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01C19/5663 , H03H3/02 , H03H3/04 , H03H9/0533 , H03H9/0547 , H03H9/0595 , H03H9/1014 , H03H2003/026 , H03H2003/0492
摘要： A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.
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