公开(公告)号：US12207557B2

公开(公告)日：2025-01-21

申请号：US17865052

申请日：2022-07-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiyori Sakata ,  Ryuta Nishizawa ,  Shigeru Shiraishi ,  Keiichi Yamaguchi ,  Takuro Kobayashi

IPC: H10N30/082

Abstract: A method for manufacturing a vibrator device includes a first dry etching step of dry-etching a quartz crystal substrate having a first surface and a second surface from the side facing the first surface to form first grooves and part of the outer shapes of a first vibrating arm and a second vibrating arm, a second dry etching step of dry-etching the quartz crystal substrate from the side facing the second surface to form second grooves and part of the outer shapes of the first vibrating arm and the second vibrating arm, and thereafter, a wet etching step of wet-etching the side surfaces of the first vibrating arm and the second vibrating arm.

公开(公告)号：US12199583B2

公开(公告)日：2025-01-14

申请号：US17679280

申请日：2022-02-24

Applicant: Seiko Epson Corporation

Inventor： Hiyori Sakata ,  Takuro Kobayashi ,  Ryuta Nishizawa ,  Shigeru Shiraishi ,  Keiichi Yamaguchi

IPC: H04R31/00 ,  H03H3/013

Abstract: A method for manufacturing a vibration element includes: a first dry etching step of dry etching the quartz crystal substrate from a first surface and forming first grooves and contours of a first vibrating arm and a second vibrating arm on the first surface; and a second dry etching step of dry etching the quartz crystal substrate from a second surface side and forming second grooves and contours of the first vibrating arm and the second vibrating arm on the second surface, in which Wa/Aa

公开(公告)号：US20240333243A1

公开(公告)日：2024-10-03

申请号：US18618488

申请日：2024-03-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Yusuke Yamamoto ,  Keiichi Yamaguchi ,  Ryuta Nishizawa

IPC: H03H3/02 ,  H03H9/10 ,  H03H9/13 ,  H03H9/19

CPC classification number: H03H3/02 ,  H03H9/1021 ,  H03H9/132 ,  H03H9/19 ,  H03H2003/022

Abstract: A method of manufacturing a resonator element including a substrate having a thin-wall part and a thick-wall part, and an electrode part having an excitation electrode arranged in an excitation electrode placement area of the thin-wall part, a pad electrode arranged in a pad electrode placement area of the thick-wall part, and an extraction electrode which is configured to couple the excitation electrode and the pad electrode to each other, and which is arranged in an extraction electrode placement area of the substrate, includes a metal layer formation step of forming a metal layer on the substrate, a protective film formation step of forming a protective film in an area overlapping at least a part of the extraction electrode placement area in a plan view on the metal layer, and a metal layer etching step of etching the metal layer arranged in the excitation electrode placement area via the protective film to thereby reduce a wall thickness of the metal layer.

公开(公告)号：US12088277B2

公开(公告)日：2024-09-10

申请号：US17322948

申请日：2021-05-18

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Atsushi Matsuo ,  Keiichi Yamaguchi ,  Taku Matsunaga

IPC: H03H9/19 ,  G01K7/32 ,  H03B5/32

CPC classification number: H03H9/19 ,  G01K7/32 ,  H03B5/32

Abstract: A vibration device includes a quartz substrate including a first vibration section, a second vibration section, and a third vibration section, a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate, a pair of second excitation electrodes so formed as to sandwich the second vibration section in the thickness direction of the quartz substrate, and a pair of third excitation electrodes so formed as to sandwich the third vibration section in the thickness direction of the quartz substrate. At least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces. At least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces. The second inclining surface inclines with respect to the first inclining surface.

公开(公告)号：US11940275B2

公开(公告)日：2024-03-26

申请号：US17718418

申请日：2022-04-12

Applicant: Seiko Epson Corporation

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Ryuta Nishizawa

IPC: G01C19/5642 ,  B60R16/023 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5656 ,  G01P15/18

CPC classification number: G01C19/5642 ,  B60R16/023 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5656 ,  G01P15/18

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US11555702B2

公开(公告)日：2023-01-17

申请号：US16744328

申请日：2020-01-16

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta Nishizawa ,  Keiichi Yamaguchi ,  Keiji Nakagawa

IPC: G01C19/5621 ,  B81C1/00

Abstract: A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

公开(公告)号：US11181371B2

公开(公告)日：2021-11-23

申请号：US16813807

申请日：2020-03-10

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Shiro Murakami ,  Keiichi Yamaguchi

IPC: G01C19/5733

Abstract: A vibrator device includes a base, a relay substrate supported by the base, and a vibrating element supported by the relay substrate, the relay substrate includes a base mount that is directly or indirectly fixed to the base, a vibrating element mount on which the vibrating element is mounted, and a beam that couples the base mount and the vibrating element mount, and parts of the vibrating element mount that are coupled to the vibrating element are positioned on both sides of the base mount while interposing the base mount therebetween in a plan view.

公开(公告)号：US11085765B2

公开(公告)日：2021-08-10

申请号：US16367785

申请日：2019-03-28

Applicant: Seiko Epson Corporation

Inventor： Shogo Sasaki ,  Masashi Shimura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Ryuta Nishizawa ,  Seiichiro Ogura

IPC: G01C19/5663 ,  B23K26/38 ,  G01C19/5656

Abstract: A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.

公开(公告)号：US20210231438A1

公开(公告)日：2021-07-29

申请号：US17155418

申请日：2021-01-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Ryuta Nishizawa

IPC: G01C19/5628 ,  H03H9/21

Abstract: A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.

公开(公告)号：US09874484B2

公开(公告)日：2018-01-23

申请号：US14665293

申请日：2015-03-23

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Keiji Nakagawa ,  Keiichi Yamaguchi ,  Atsushi Matsuo ,  Fumio Ichikawa

IPC: H01L41/107 ,  G01L1/16 ,  G01L1/10 ,  H01L41/09

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.