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1808 条记录 (耗时 0.021 秒)

    Microelectromechanical sensing apparatus with calibration function
    1.
    发明授权
    Microelectromechanical sensing apparatus with calibration function 有权

    公开(公告)号：US12025588B2

    公开(公告)日：2024-07-02

    申请号：US17539686

    申请日：2021-12-01

    申请人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    发明人： Chung-Yuan Su ,  Chin-Fu Kuo ,  Liang-Ying Liu ,  Chao-Ta Huang

    IPC分类号： G01C19/56 ,  G01C25/00 ,  G01N29/24 ,  G01N29/30

    CPC分类号： G01N29/30 ,  G01C19/56 ,  G01C25/00 ,  G01N29/24

    摘要： A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.

    Inertial Measurement Device
    2.
    发明公开
    Inertial Measurement Device 审中-公开

    公开(公告)号：US20240093994A1

    公开(公告)日：2024-03-21

    申请号：US18467306

    申请日：2023-09-14

    申请人： SEIKO EPSON CORPORATION

    发明人： Yoshiyuki MATSUURA

    IPC分类号： G01C19/56 ,  G01P1/00 ,  G01P15/125 ,  G01P15/18

    CPC分类号： G01C19/56 ,  G01P1/00 ,  G01P15/125 ,  G01P15/18

    摘要： An inertial measurement device includes: a first case and a second case; a board that is disposed in a space formed by the first case and the second case, that includes a first surface and a second surface, and in which a first inertial sensor is disposed at the first surface; a first filling material configured to fill between the first surface of the board and the first case and between the first inertial sensor and the first case; and a second filling material configured to fill between the second surface of the board and the second case.

    Inertial sensor and method of inertial sensing with tuneable mode coupling strength
    3.
    发明授权
    Inertial sensor and method of inertial sensing with tuneable mode coupling strength 有权

    公开(公告)号：US11913808B2

    公开(公告)日：2024-02-27

    申请号：US17276683

    申请日：2019-09-16

    申请人： Cambridge Enterprise Limited

    发明人： Xin Zhou ,  Chun Zhao ,  Ashwin A. Seshia

    IPC分类号： G01P15/097 ,  G01C19/56 ,  G01C19/5726 ,  G01C19/5755 ,  G01C25/00 ,  G01P15/125 ,  G01P21/00 ,  G05D19/02 ,  G01P15/08

    CPC分类号： G01C25/005 ,  G01P15/097 ,  G01P21/00 ,  G01C19/56 ,  G01C19/5726 ,  G01C19/5755 ,  G01P2015/0814 ,  G01P15/125 ,  G05D19/02

    摘要： There is provided an inertial sensor comprising a frame, a resonator assembly fixed to the frame comprising a first and second resonator coupled to one another by a mechanical coupling and a drive means coupled to the resonator assembly for driving the first and second resonators to vibrate. The resonator assembly is configured such that energy is transferred between the first and second resonators through the mechanical coupling. An amount of energy transferred through the mechanical coupling is dependent on the value of an input measurand acting on one of the first and second resonators. The inertial sensor also comprises a pumping means coupled to the resonator assembly for applying a pumping signal to the resonator assembly, the pumping means controlled by electrical circuitry, and a sensor assembly configured to detect the amplitude of oscillation of the first resonator at a first resonant frequency and the amplitude of oscillation of the second resonator at a second resonant frequency. The electrical circuitry is configured to control the pumping means to apply a pumping signal that has a frequency substantially equal to a difference between the first resonant frequency and the second resonant frequency. When the input measurand has the first value, the signal from the pumping means adjusts an amplitude ratio of the amplitudes of oscillation of the first and second resonator detected by the sensor assembly so that the amplitude ratio is within a predetermined amplitude ratio range over an expected range of input measurand values. An output of the inertial sensor is based on the amplitude ratio.

    Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrode
    5.
    发明授权
    Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrode 有权

    公开(公告)号：US11566898B2

    公开(公告)日：2023-01-31

    申请号：US17463689

    申请日：2021-09-01

    申请人： Georgia Tech Research Corporation

    发明人： Haoran Wen ,  Farrokh Ayazi

    IPC分类号： G01C19/5684 ,  G01C19/56 ,  G01C19/5698 ,  G01C19/5719 ,  H03H9/02 ,  G01C19/5677

    摘要： A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

    Vibration sensor and sensor module
    8.
    发明授权
    Vibration sensor and sensor module 有权

    公开(公告)号：US11255736B2

    公开(公告)日：2022-02-22

    申请号：US16286708

    申请日：2019-02-27

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Yongfang Li

    IPC分类号： G01L1/16 ,  G01C19/56

    摘要： A vibration sensor according to an embodiment includes a laminated body. The laminated body includes a support layer a first end of which is fixed; a piezoelectric layer on the support layer; an insulating layer disposed between the support layer and the piezoelectric layer; a common electrode disposed on a first principal surface of the piezoelectric layer; a first sensing electrode disposed in a first area on a second principal surface of the piezoelectric layer on the side opposite to the first principal surface; and a drive electrode disposed in a second area different from the first area on the second principal surface of the piezoelectric layer. The first area is located near the first end of the support layer.

    Gyro measurement while drilling system and method therefor
    9.
    发明授权
    Gyro measurement while drilling system and method therefor 有权

    公开(公告)号：US11220899B2

    公开(公告)日：2022-01-11

    申请号：US17137696

    申请日：2020-12-30

    申请人： INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES

    发明人： Xu Xue ,  Yang Dong ,  Xiaoxiao Zhang ,  Changchun Yang

    IPC分类号： E21B47/024 ,  G01C19/56 ,  G01P15/08 ,  G01P15/18 ,  E21B47/12

    摘要： A gyro measurement while drilling system, which includes a strapdown inertial unit, a filtering and level conversion module, a data acquisition and data communication module, a driving mechanism, a driving control module and a navigation computer. A gyro measurement while drilling method, which is used in the measurement while drilling system and includes one or a combination of the following methods: a full parameter variable compensation method, an initial alignment algorithm and a continuous measurement while drilling method. The system and method of the present disclosure can meet the most demanding application scenarios in the field of petroleum drilling measurement, i.e., measurement while drilling (MWD), and are compatible with other scenarios, such as wireline measurement, gyro steerable measurement and other application fields; the system and method also solve the problems of environmental adaptability, bias repeatability and bias error of a gyroscope in a high-temperature and vibration environment, and solve the technical problems of an inertial instrument in a deep steerable drilling application scenario from the perspective of systems.