公开(公告)号：US12209888B2

公开(公告)日：2025-01-28

申请号：US18097149

申请日：2023-01-13

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Lu-Pu Liao ,  Yu-Sheng Lin ,  Liang-Ying Liu ,  Chin-Fu Kuo

IPC: G01D5/24

Abstract: A reading device for capacitive sensing element comprises a differential capacitive sensing element, a modulator, a charge-voltage conversion circuit, a phase adjustment circuit, a demodulator and a low-pass filter. The modulator outputs a modulation signal to the common node of the capacitive sensing element and modulates the output signal of the capacitive sensing element. The two input terminals of the charge-to-voltage conversion circuit are connected to two non-common nodes of the capacitive sensing element. The charge-to-voltage converter read the output charge of the capacitive sensing element and convert it into a voltage signal. The modulator generates a demodulation signal through the phase adjustment circuit. The demodulator receives the demodulation signal from the phase adjustment circuit and demodulates the output of the charge-to-voltage conversion circuit. The low-pass filter is connected to the output of the demodulator for filtering the demodulated voltage signal to output the read signal.

公开(公告)号：US12025588B2

公开(公告)日：2024-07-02

申请号：US17539686

申请日：2021-12-01

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chung-Yuan Su ,  Chin-Fu Kuo ,  Liang-Ying Liu ,  Chao-Ta Huang

IPC: G01C19/56 ,  G01C25/00 ,  G01N29/24 ,  G01N29/30

CPC classification number: G01N29/30 ,  G01C19/56 ,  G01C25/00 ,  G01N29/24

Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.

公开(公告)号：US11815369B2

公开(公告)日：2023-11-14

申请号：US17863341

申请日：2022-07-12

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Lu-Po Liao ,  Chin-Fu Kuo ,  Liang-Ying Liu ,  Yu-Sheng Lin

IPC: G01D5/24 ,  G01R27/26 ,  G01D18/00 ,  G01R35/00

CPC classification number: G01D5/24 ,  G01R27/2605 ,  G01D18/00 ,  G01R35/005

Abstract: The differential capacitor device includes a differential capacitor sensing component, a calibration capacitor assembly and two output terminals. The differential capacitive sensing element has a common point terminal, a first non-common point terminal and a second non-common point terminal, and the common point terminal is configured to receive an input voltage. The calibration capacitor assembly has a first calibration capacitor and a second calibration capacitor, one terminal of the calibration capacitor assembly is coupled to the first non-common point terminal and the second non-common point terminal, and the other terminal of the calibration capacitor assembly is configured to receive a first calibration voltage and a second calibration voltage. The two output terminals are respectively coupled to the first non-common point terminal and the second non-common point terminal to output a first signal and a second signal.