公开(公告)号：US20190195630A1

公开(公告)日：2019-06-27

申请号：US16232112

申请日：2018-12-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Masashi SHIMURA ,  Atsushi MATSUO ,  Shinya AOKI ,  Shiro MURAKAMI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  H01L41/09 ,  G01C19/5607 ,  H01L41/047 ,  H03H9/15 ,  H03B5/32

CPC classification number: G01C19/5642 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/09 ,  H03B5/32 ,  H03H9/15

Abstract: A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.

公开(公告)号：US20170234725A1

公开(公告)日：2017-08-17

申请号：US15426614

申请日：2017-02-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumio ICHIKAWA

IPC: G01H11/00 ,  G01C19/5642

CPC classification number: G01H11/00 ,  G01C19/5621 ,  G01C19/5642 ,  G01C19/5656 ,  G01H1/00

Abstract: A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

公开(公告)号：US09528830B2

公开(公告)日：2016-12-27

申请号：US14334216

申请日：2014-07-17

Applicant: Ramot at Tel-Aviv University Ltd.

Inventor： Yuval Gerson ,  Viacheslav Krylov ,  Yotam Bar-On

IPC: G01C19/5642 ,  G01C19/574

CPC classification number: G01C19/5642 ,  G01C19/574

Abstract: A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.

Abstract translation: 提出了一种旋转感测装置。 该装置包括：证明质量装置，其包括沿着第一轴线彼此间隔开的至少一对检验质量块; 悬架组件，其包括具有可在其基本上直线和弯曲状态之间变形的主轴的柔性悬挂梁，所述悬架组件将所述证明块联接到锚固组件，同时允许所述证明块的驱动模式振荡运动至少沿第二轴线 基本上垂直于梁的主轴线; 以及致动机构，其被配置和可操作以使所述证明质量块沿着所述第二轴线的相反方向的驱动模式振荡运动，从而在所述装置旋转期间产生所述证明质量块的感测模式振荡运动，该运动模式围绕至少一个旋转 垂直于所述第二轴的轴，所述感测模式运动指示旋转速率。

公开(公告)号：US09519004B2

公开(公告)日：2016-12-13

申请号：US15037518

申请日：2014-10-21

Applicant: SAGEM DEFENSE SECURITE

Inventor： Alain Jeanroy

IPC: G01P15/00 ,  G01P15/097 ,  G01P15/08 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/18 ,  G01P15/14 ,  G01C19/5733 ,  G01C19/5642 ,  G01C19/56 ,  G01P15/125

CPC classification number: G01P15/097 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0857

Abstract: A sensor comprising: a stand; a first body movable along a sensing axis; two pairs of second bodies arranged symmetrically relative to the first body and along the sensing axis; transducers for detecting a position of the first body relative to the stand, for setting the second bodies into vibration along a vibration axis, and for detecting respective vibration frequencies of the second bodies; and surface electrostatic coupling means connecting each second body to the first body in such a manner that a movement of the first body relative to the stand along the sensing axis gives rise respectively to an increase and to a decrease in the electrostatic coupling for one and the other of the pairs of second bodies. Methods of controlling such a sensor.

Abstract translation: 一种传感器，包括：支架; 沿着感测轴可移动的第一主体; 两对第二主体相对于第一主体并沿传感轴对称地布置; 用于检测第一主体相对于支架的位置的换能器，用于将第二主体沿着振动轴线设置成振动，并且用于检测第二主体的各个振动频率; 以及表面静电耦合装置，其将每个第二主体连接到第一主体，使得第一主体相对于支架沿传感轴的运动分别产生一个和第二主体的静电耦合的增加和减小 其他两对第二体。 控制这种传感器的方法。

公开(公告)号：US09329041B2

公开(公告)日：2016-05-03

申请号：US13765993

申请日：2013-02-13

Applicant: DENSO CORPORATION

Inventor： Takashi Katsumata

IPC: G01C19/00 ,  G01C19/5642 ,  G01C19/574

CPC classification number: G01C19/5642 ,  G01C19/574

Abstract: An angular velocity sensor includes a vibrator located along x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator along z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device to the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator. The vibrator includes a linkage region to link with the linkage beam device, and the linkage region becomes a wave node when the vibrator vibrates along the z direction.

Abstract translation: 角速度传感器包括沿x方向和y方向指定的振动器，其彼此正交; 沿垂直于x-y平面的z方向远离振动器分离的衬底; 锚固装置，其从所述基板延伸到所述振动器所在的x-y平面; 联动梁装置，其将锚定装置连接到振动器，所述联动梁能够围绕y方向扭转; 励磁部，其使振动体沿着z方向振动; 以及检测部，其基于沿着振动器的x方向的位移来检测角速度。 振动器包括与连杆装置连接的联动区域，当振动器沿z方向振动时，连动区域成为波节点。

公开(公告)号：US09329040B2

公开(公告)日：2016-05-03

申请号：US13608480

申请日：2012-09-10

Applicant: Fumio Ichikawa

Inventor： Fumio Ichikawa

IPC: G01C19/00 ,  G01C19/5628 ,  G01C19/5642

CPC classification number: G01C19/5628 ,  G01C19/5642 ,  Y10T29/42

Abstract: A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.

Abstract translation: 传感器元件具有通过通电而驱动振动的驱动振动臂，调节振动臂与驱动振动臂的驱动振动一起振动，检测电极响应于施加到驱动振动臂的物理量而输出电荷，设置在调节振动上的第一电极 臂，电连接到检测电极，并且输出电荷与调节振动臂的振动;以及一对第二电极，设置在调节振动臂上，电连接到一对检测电极，并输出具有相反极性的电荷 与第一电极的调节振动臂的振动。

公开(公告)号：US20160033275A1

公开(公告)日：2016-02-04

申请号：US14875379

申请日：2015-10-05

Applicant: Maxim Integrated Products, Inc.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/42 ,  G01C19/5642 ,  G01C19/5719 ,  G01C19/5747

Abstract: The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

公开(公告)号：US20160010994A1

公开(公告)日：2016-01-14

申请号：US14325674

申请日：2014-07-08

Applicant: Honeywell International Inc.

Inventor： John F. Ackerman

IPC: G01C19/5776

CPC classification number: G01C19/5776 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5642 ,  G01C19/5649 ,  G01C19/5719

Abstract: A motor drive loop circuit for a micro-electro-mechanical system (MEMS) gyroscope is provided. The motor drive loop circuit includes a motor configured to drive a proof mass in the MEMS gyroscope and a minus-90-degree phase-shift twin-tee notch filter. The motor is configured to cause the proof mass to oscillate at a primary-proof-mass mode. The a minus-90-degree phase-shift twin-tee notch filter is configured to: provide a minus 90 degree phase at a motor resonance frequency equal to the primary-proof-mass mode; suppress resonance at undesired mechanical modes of the motor during a startup of the motor; and provide gain at the motor resonance frequency.

Abstract translation: 提供了一种用于微机电系统（MEMS）陀螺仪的电动机驱动回路电路。 马达驱动回路电路包括配置成驱动MEMS陀螺仪中的检测质量的马达和负90度相移双锥形陷波滤波器。 电机被配置为使检测质量块在主防爆质量模式下振荡。 负90度相移双T形陷波滤波器被配置为：在等于初级质量模式的电动机共振频率处提供零下90度相位; 在电动机起动期间抑制马达的不期望的机械模式的共振; 并提供电机谐振频率的增益。

公开(公告)号：US20140283602A1

公开(公告)日：2014-09-25

申请号：US14359785

申请日：2012-11-16

Applicant: Panasonic Corporation

Inventor： Kensaku Yamamoto

IPC: G01C19/5642

CPC classification number: G01C19/5642 ,  G01C19/5621 ,  G01C19/5747 ,  H01L41/0805 ,  H01L41/0933

Abstract: A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first and second vertical beams, respectively; and four arms each connected at a first end to the horizontal beam and having a weight formed on a second end. The first vertical beam has a first slit formed nearer the first fixed part with respect to its center, a second slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. The second vertical beam has a third slit formed nearer the first fixed part with respect to its center, a fourth slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits.

Abstract translation: 检测元件具有：第一和第二固定部分; 第一和第二垂直梁分别在第一和第二端连接到第一和第二固定部分; 分别在第一和第二端连接到第一和第二垂直梁的中心的水平光束; 并且四个臂各自在第一端连接到水平梁并且具有形成在第二端上的重物。 第一垂直梁具有相对于其中心形成在第一固定部分附近的第一狭缝，相对于其中心形成在第二固定部分附近的第二狭缝和这些狭缝之间的联接部分。 第二垂直梁具有相对于其中心形成在第一固定部分附近的第三狭缝，相对于其中心形成为更靠近第二固定部分的第四狭缝以及这些狭缝之间的联接部分。

公开(公告)号：US20130327144A1

公开(公告)日：2013-12-12

申请号：US13903689

申请日：2013-05-28

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Jae Sang Lee ,  Won Kyu Jeung

IPC: G01P15/02

CPC classification number: G01P15/02 ,  G01C19/5642 ,  G01P15/08 ,  G01P2015/084

Abstract: Disclosed herein is a sensor including a mass body; a fixing part provided so as to be spaced apart from the mass body; a first flexible part connecting the mass body and the fixing part to each other in a Y-axis; and a second flexible part connecting the mass body and the fixing part to each other in an X-axis, wherein the first flexible part has a width in an X-axis direction larger than a thickness in a Z-axis direction, and the second flexible part has a thickness in a Z-axis direction larger than a width in a Y-axis direction.

Abstract translation: 这里公开了一种传感器，其包括质量体; 设置成与所述质量体间隔开的固定部; 将质量体和固定部在Y轴上彼此连接的第一柔性部; 以及第二柔性部，其将所述质量体和所述固定部在X轴方向上彼此连接，其中，所述第一柔性部的X轴方向的宽度大于Z轴方向的厚度，所述第二柔性部 柔性部的Z轴方向的厚度大于Y轴方向的宽度。