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公开(公告)号:US10547286B2
公开(公告)日:2020-01-28
申请号:US15802627
申请日:2017-11-03
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jung Woo Sung , Sung Tae Kim , Won Kyu Jeung
IPC: H03H9/54 , H03H9/60 , H03H9/17 , H03H9/02 , H03H9/58 , H03H3/02 , H03H9/00 , H03H9/70 , H03H9/13
Abstract: A filter may include a plurality of bulk acoustic wave resonators including one or more series resonators and one or more shunt resonators formed by a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on a substrate, a cap accommodating the plurality of bulk acoustic wave resonators therein, and one or more switches provided on the cap.
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公开(公告)号:US09625484B2
公开(公告)日:2017-04-18
申请号:US14446269
申请日:2014-07-29
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Woon Kim , Jung Won Lee , Seung Joo Shin , Won Kyu Jeung
IPC: G01C19/00 , G01P3/44 , G01C15/08 , G01C19/56 , G01C19/5712
CPC classification number: G01P9/04 , G01C19/5712
Abstract: An angular velocity sensor comprises a mass body part including a first mass body and a second mass body, an internal frame supporting the first mass body and the second mass body, one or more first flexible parts connecting the first mass body or the second mass body to the internal frame, one or more second flexible parts connecting the first mass body or the second mass body to the internal frame, an external frame supporting the internal frame, at least one third flexible part connecting the internal frame to the external frame, and at least one fourth flexible part connecting the internal frame to the external frame. At least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body. At least one other of the second flexible parts is connected to an eccentric portion of the second mass body.
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公开(公告)号:US20160178373A1
公开(公告)日:2016-06-23
申请号:US14550838
申请日:2014-11-21
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Woon KIM , Jung Won Lee , Seung Joo Shin , Won Kyu Jeung
IPC: G01C19/5705
CPC classification number: G01C19/5705 , G01C19/16
Abstract: Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.
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公开(公告)号:US20150114111A1
公开(公告)日:2015-04-30
申请号:US14181869
申请日:2014-02-17
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Won Kyu Jeung , Chang Hyun Lim , Jung Won Lee , Jong Hyeong Song
CPC classification number: G01P1/02 , B81B7/0048 , B81C2203/0785 , G01P1/006 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/00014
Abstract: Disclosed herein is an MEMS sensor, including: a sensor unit; and a substrate connected to the sensor unit, in which the substrate may be provided with a flexible printed circuit board (FPCB) to correspond to an outer peripheral portion of the sensor unit.
Abstract translation: 这里公开了一种MEMS传感器,包括:传感器单元; 以及连接到传感器单元的基板,其中基板可以设置有与传感器单元的外周部分相对应的柔性印刷电路板(FPCB)。
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公开(公告)号:US20130327144A1
公开(公告)日:2013-12-12
申请号:US13903689
申请日:2013-05-28
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Woon Kim , Jae Sang Lee , Won Kyu Jeung
IPC: G01P15/02
CPC classification number: G01P15/02 , G01C19/5642 , G01P15/08 , G01P2015/084
Abstract: Disclosed herein is a sensor including a mass body; a fixing part provided so as to be spaced apart from the mass body; a first flexible part connecting the mass body and the fixing part to each other in a Y-axis; and a second flexible part connecting the mass body and the fixing part to each other in an X-axis, wherein the first flexible part has a width in an X-axis direction larger than a thickness in a Z-axis direction, and the second flexible part has a thickness in a Z-axis direction larger than a width in a Y-axis direction.
Abstract translation: 这里公开了一种传感器,其包括质量体; 设置成与所述质量体间隔开的固定部; 将质量体和固定部在Y轴上彼此连接的第一柔性部; 以及第二柔性部,其将所述质量体和所述固定部在X轴方向上彼此连接,其中,所述第一柔性部的X轴方向的宽度大于Z轴方向的厚度,所述第二柔性部 柔性部的Z轴方向的厚度大于Y轴方向的宽度。
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公开(公告)号:US20130319114A1
公开(公告)日:2013-12-05
申请号:US13903782
申请日:2013-05-28
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Woon Kim , Jung Won Lee , Seung Joo Shin , Won Kyu Jeung
IPC: G01C19/16
CPC classification number: G01C19/5705 , G01C19/16
Abstract: Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.
Abstract translation: 这里公开了一种角速度传感器。 根据本发明实施例的角速度传感器被配置为包括质量体,设置在质量体的外侧以与质量体隔开的第一框架,连接质量体的第一柔性部件 主体在X轴方向上连接到第一框架,第二柔性部件沿着Y轴方向连接质量体与第一框架,第二框架设置在第一框架的外侧,以与第一框架间隔开 所述第一框架,在X轴方向上连接所述第一框架和所述第二框架的第三柔性部件以及将所述第一框架与所述第二框架沿Y轴方向连接的第四柔性部件。
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公开(公告)号:US10812040B2
公开(公告)日:2020-10-20
申请号:US16356223
申请日:2019-03-18
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Yoon Sok Park , Won Kyu Jeung , Tah Joon Park , Dae Hun Jeong , Sang Uk Son
Abstract: An acoustic wave filter device includes resonance portions, first and second metal pads. The resonance portions each includes a lower electrode disposed on a substrate, a piezoelectric layer disposed on at least a portion of the lower electrode, and an upper electrode disposed on at least a portion of the piezoelectric layer. The first metal pads are connected to one of the upper electrode and the lower electrode of a corresponding resonance portion among the resonance portions. The second metal pads are disposed outwardly of an active region and connected to the other one of the upper electrode and the lower electrode of adjacent resonant portions among the resonance portions. A ring portion is disposed outwardly of the active region in which the lower electrode, the piezoelectric layer, and the upper electrode overlap is disposed only on a portion of any one of the first and second metal pads.
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公开(公告)号:US10547282B2
公开(公告)日:2020-01-28
申请号:US15704162
申请日:2017-09-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jung Woo Sung , Yoon Sok Park , Won Kyu Jeung
IPC: H03H9/10 , B81B7/00 , B81C1/00 , H01L21/768 , H03H9/05
Abstract: A filter includes a multilayer structure comprising films and forming bulk acoustic wave resonators, a cap accommodating the bulk acoustic wave resonators and bonded to the multilayer structure, a bonding agent disposed in a bonded area between the multilayer structure and the cap and comprising a bonding layer, and a shielding layer disposed on an inner surface of the cap and comprising a same material as at least a portion of the bonding layer.
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公开(公告)号:US20150211884A1
公开(公告)日:2015-07-30
申请号:US14610949
申请日:2015-01-30
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Woon KIM , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
CPC classification number: G01C25/00 , B32B37/0076 , B32B37/02 , B32B37/12 , B32B37/18 , B32B38/10 , B32B2457/00 , C23F1/02 , G01C19/5755 , G01C19/5769 , G01P15/08 , G01P15/0802 , G01P15/135 , G01P2015/084 , Y10T156/1064
Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.
Abstract translation: 这里公开了惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100被构造成包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的柱130 110,以支撑膜110,底盖150的边缘153设置有第一腔155,粘合剂140被引入到其中,其中粘合剂140将边缘153粘合到柱的底表面, 由此底盖150的边缘153设置有第一腔155以将粘合剂140引入第一腔155中,从而防止粘合剂140渗透到柱130中。
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公开(公告)号:US10862457B2
公开(公告)日:2020-12-08
申请号:US16294048
申请日:2019-03-06
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Yoon Sok Park , Hyun Jun Kim , Sung Tae Kim , Won Kyu Jeung
Abstract: A filter includes: a series part disposed between a signal input terminal and a signal output terminal, and including at least one first bulk-acoustic resonator; an inductor portion including a first inductor disposed between ends of the series part and a second inductor having a first end connected to a connection node of the series part and the first inductor; and a shunt part disposed between a second end of the second inductor and a ground, and including at least one second bulk-acoustic resonator, wherein a resonant frequency of the at least one second bulk-acoustic resonator is higher than a resonant frequency of the at least one first bulk-acoustic resonator.
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