公开(公告)号：US20240345125A1

公开(公告)日：2024-10-17

申请号：US18753886

申请日：2024-06-25

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger

IPC: G01P1/00 ,  G01P15/00 ,  G01P15/125 ,  H03F3/45

CPC classification number: G01P1/006 ,  G01P15/00 ,  G01P15/125 ,  H03F3/45 ,  H03F2200/48 ,  H03F2203/45156 ,  H03F2203/45546

Abstract: Applying positive and negative feedback voltages to an electromechanical sensor of a microphone utilizing a voltage-to-voltage converter to facilitate an improvement in sensitivity and reduction in distortion of the microphone is presented herein. A microphone comprises an electromechanical sensor comprising a capacitive sense element comprising a first sense node and a second sense node; and a voltage-to-voltage converter comprising an input, a first output, and a second output. The voltage-to-voltage converter forms, via a first capacitive coupling to the second sense node, a negative feedback loop between the first output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter. The first sense node is electrically coupled to the input of the voltage-to-voltage converter, and the voltage-to-voltage converter forms, via a second capacitive coupling to the first sense node, a positive feedback loop between the second output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter.

公开(公告)号：US20240061012A1

公开(公告)日：2024-02-22

申请号：US17820127

申请日：2022-08-16

Applicant: Honeywell International Inc.

Inventor： Paul W. Dwyer ,  Stephen F. Becka

IPC: G01P15/13 ,  G01P15/08 ,  G01P1/00 ,  G01P1/02

CPC classification number: G01P15/132 ,  G01P15/0802 ,  G01P1/006 ,  G01P1/023

Abstract: An example transducer includes an upper magnetic circuit assembly including an upper excitation ring, a lower magnetic circuit assembly including a lower excitation ring, and a proof mass assembly positioned between the upper and lower magnetic circuit assemblies. A coefficient of thermal expansion (CTE) of the proof mass assembly is lower than a CTE of each of the upper and lower excitation rings. The transduces also includes an outer support structure coupled to an outer surface of each of the upper and lower excitation rings, and the outer support structure includes at least one cutout configured to reduce a circumferential stiffness of the outer support structure.

公开(公告)号：US20240061006A1

公开(公告)日：2024-02-22

申请号：US18500867

申请日：2023-11-02

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger ,  Pradeep Shettigar

IPC: G01P1/00 ,  G01P15/00 ,  H03F3/45 ,  G01P15/125

CPC classification number: G01P1/006 ,  G01P15/00 ,  H03F3/45 ,  G01P15/125 ,  H03F2200/48 ,  H03F2203/45156 ,  H03F2203/45546

Abstract: Reducing a spring softening effect on a capacitive sense element of an electromechanical sensor is presented herein. A system, such as a microphone or an accelerometer, comprises an electromechanical sensor and a voltage-to-voltage converter component. The electromechanical sensor comprises a capacitive sense element and a bias voltage component that applies a bias voltage to a sense electrode of the capacitive sense element. The voltage-to-voltage converter component couples a positive feedback voltage to the sense electrode to maintain a constant charge at the sense electrode to facilitate a reduction of charge flow in the electromechanical sensor representing a spring softening effect on the capacitive sense element. In an example, the spring softening effect on the sense element alters a resonant frequency of the sense element and a gain of the sense element. In another example, the charge flow corresponds to a parasitic capacitance that is electrically coupled to the sense electrode.

公开(公告)号：US11874291B2

公开(公告)日：2024-01-16

申请号：US17661039

申请日：2022-04-27

Applicant: Robert Bosch GmbH

Inventor： Amin Jemili ,  Jochen Reinmuth ,  Dusan Radovic ,  Rolf Scheben ,  Steffen Becker

IPC: G01P1/00 ,  G01P15/08

CPC classification number: G01P1/006 ,  G01P15/08 ,  G01P2015/0862

Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.

公开(公告)号：US20230417790A1

公开(公告)日：2023-12-28

申请号：US18462922

申请日：2023-09-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumikazu Otani ,  Taketo Chino

IPC: G01P1/00 ,  G01P15/18 ,  G01P3/00

CPC classification number: G01P1/006 ,  G01P15/18 ,  G01P3/00

Abstract: An inertial measurement unit includes an angular velocity sensor and an acceleration sensor that output inertial information, a storage portion that stores a plurality of correction parameters related to a range of values of the inertial information, a parameter control portion that selects a selection correction parameter from the plurality of correction parameters, and a correction calculation portion that corrects the inertial information using the selection correction parameter.

公开(公告)号：US11835538B2

公开(公告)日：2023-12-05

申请号：US17894077

申请日：2022-08-23

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger ,  Pradeep Shettigar

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/00 ,  H03F3/45

CPC classification number: G01P1/006 ,  G01P15/00 ,  G01P15/125 ,  H03F3/45 ,  H03F2200/48 ,  H03F2203/45156 ,  H03F2203/45546

Abstract: Reducing a sensitivity of an electromechanical sensor is presented herein. The electromechanical sensor comprises a sensitivity with respect to a variation of a mechanical-to-electrical gain of a sense element of the electromechanical sensor; and a voltage-to-voltage converter component that minimizes the sensitivity by coupling, via a defined feedback capacitance, a positive feedback voltage to a sense electrode of the sense element—the sense element electrically coupled to an input of the voltage-to-voltage converter component. In one example, the voltage-to-voltage converter component minimizes the sensitivity by maintaining, via the defined feedback capacitance, a constant charge at the sense electrode. In another example, the electromechanical sensor comprises a capacitive sense element comprising a first node comprising the sense electrode. Further, a bias voltage component can apply a bias voltage to a second node of the electromechanical sensor. In yet another example, the electromechanical sensor comprises a piezoelectric sense element.

公开(公告)号：US11789032B2

公开(公告)日：2023-10-17

申请号：US17511997

申请日：2021-10-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumikazu Otani ,  Taketo Chino

IPC: G01P1/00 ,  G01P3/00 ,  G01P15/18

CPC classification number: G01P1/006 ,  G01P3/00 ,  G01P15/18

Abstract: An inertial measurement unit includes an angular velocity sensor and an acceleration sensor that output inertial information, a storage portion that stores a plurality of correction parameters related to a range of values of the inertial information, a parameter control portion that selects a selection correction parameter from the plurality of correction parameters, and a correction calculation portion that corrects the inertial information using the selection correction parameter.

公开(公告)号：US20190242925A1

公开(公告)日：2019-08-08

申请号：US16261752

申请日：2019-01-30

Applicant: Atlantic Inertial Systems, Limited

Inventor： Alan Malvern

IPC: G01P15/125 ,  G01P15/13 ,  G01P1/00

CPC classification number: G01P15/125 ,  B81B5/00 ,  G01P1/006 ,  G01P15/131 ,  G01P2015/0814

Abstract: A method for controlling closed loop operation of a capacitive accelerometer comprises applying first in-phase and anti-phase PWM drive signals, respectively, to a first pair of fixed capacitive electrodes and applying second in-phase and anti-phase PWM drive signals, respectively, to a second pair of fixed capacitive electrodes. A displacement of a proof mass relative to fixed capacitive electrodes is sensed by measuring a pickoff signal from the proof mass and adjusting the mark-space ratio of the first and/or second PWM drive signals to provide a restoring force on the proof mass that balances an applied acceleration and maintains the proof mass at a null position. The first and second PWM drive signals applied to the first and second pairs of fixed capacitive electrodes are offset in time from one another by an offset period.

公开(公告)号：US20170212144A1

公开(公告)日：2017-07-27

申请号：US15007752

申请日：2016-01-27

Applicant: Robert W. Adams ,  Carl M. Edwards ,  Sebastian Csutak ,  Felix Wellmann ,  Otto Fanini

Inventor： Robert W. Adams ,  Carl M. Edwards ,  Sebastian Csutak ,  Felix Wellmann ,  Otto Fanini

IPC: G01P15/03 ,  G01V7/00 ,  G01P1/00

CPC classification number: G01P15/03 ,  G01H9/00 ,  G01P1/006 ,  G01P15/093 ,  G01P21/00 ,  G01V7/00 ,  G01V2210/1429

Abstract: An apparatus for measuring acceleration includes: a reference cavity having a first fixed reflecting surface and a second fixed reflecting surface; a sense cavity having a fixed reflecting surface and a non-fixed reflecting surface, the non-fixed reflecting surface being configured to be displaced when subject to an acceleration force; a light source to illuminate the reference and sense cavities; a controller to vary a wavelength of light emitted by the light source and/or an index of refraction of an optical medium of the cavities; a photodetector to detect light emitted by the reference and sense cavities; an interferometer sensor to measure using the detected light, for each variation of the wavelength of light and/or the index of refraction a reference displacement of the reference cavity and a sense displacement of the sense cavity; and a processor to calculate the acceleration using each of the reference displacements and the sense displacements.

公开(公告)号：US09702890B2

公开(公告)日：2017-07-11

申请号：US14176444

申请日：2014-02-10

Applicant: Seiko Epson Corporation

Inventor： Yoshikuni Saito

IPC: H05K7/00 ,  G01P1/02 ,  G01P1/00 ,  H05K1/02 ,  H05K7/10 ,  H05K1/16 ,  H05K1/11

CPC classification number: G01P1/023 ,  G01P1/006 ,  H05K1/0219 ,  H05K1/111 ,  H05K2201/10151

Abstract: A board main body of a board has a sensor mounting area, in which a physical quantity sensor is mounted, disposed on a surface. A non-electrode forming part and a plurality of electrodes are disposed in the sensor mounting area, the electrodes being disposed so as to be isolated from each other, and to correspond to mounting terminals of the physical quantity sensor. A shield electrode is disposed outside the sensor mounting area.