Laser interferometer and control method for laser interferometer

    公开(公告)号:US12123892B2

    公开(公告)日:2024-10-22

    申请号:US17412355

    申请日:2021-08-26

    发明人: Kohei Yamada

    摘要: A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, and the demodulation circuit intermittently performs the demodulation process.

    FIBRE-OPTIC SENSOR FOR MEASURING A PHYSICAL QUANTITY

    公开(公告)号:US20240167853A1

    公开(公告)日:2024-05-23

    申请号:US18282673

    申请日:2022-03-18

    摘要: A fibre-optic sensor for measuring a physical quantity, such as a pressure, force, acceleration or tilt, includes an optical fibre having a measurement section for measuring a strain in the fibre, and first and second structural members. The optical fibre is connected to a first fibre connection section of the first structural member and to a second fibre connection section of the second structural member. The first and second connection sections are arranged on opposite sides of the measurement section, such that at least the measurement section is suspended between the first and second fibre connection sections. At least one of the structural members is movable relative to the other in dependence of the physical quantity that is measured. The structural members are made from materials having different coefficients of thermal expansion such that a temperature induced strain in said optical fibre due to a temperature change is reduced.

    SENSOR AND MOVABLE BODY
    6.
    发明公开

    公开(公告)号:US20230288445A1

    公开(公告)日:2023-09-14

    申请号:US17823054

    申请日:2022-08-29

    IPC分类号: G01P15/093

    CPC分类号: G01P15/093 G01P2015/0865

    摘要: According to one embodiment, a sensor includes a stage, a driver, and a detector. The stage includes a first portion and a second portion. The driver is configured to rotate the stage. A rotation axis of the stage passes through the first portion and is along a first direction. A second direction from the first portion to the second portion crosses the first direction. The second portion is configured to rotate along a circumferential direction with the rotation axis as a center when the stage rotating. The detector is provided at the second portion. The detector includes a first detection element configured to detect a first acceleration including a component along the second direction, and a second detection element configured to detect a second acceleration including a component along the first direction.

    Accelerometer structure including photonic crystal cavity

    公开(公告)号:US11709178B2

    公开(公告)日:2023-07-25

    申请号:US17717169

    申请日:2022-04-11

    发明人: Hengjiang Ren Jie Luo

    IPC分类号: G01P15/00 G01P15/093 G01H9/00

    CPC分类号: G01P15/093 G01H9/004

    摘要: An accelerometer structure, a method for preparing the accelerometer structure and an acceleration measurement method are provided. The accelerometer structure includes a substrate having a groove structure, a test mass, a plurality of nano-tethers, and a nano-photonic-crystal measurement unit. The test mass, nano-tethers, and the nano-photonic-crystal measurement unit are suspended above the groove structure. A nano-photonic-crystal resonant cavity is formed in the nano-photonic-crystal measurement unit, and an acceleration of the test mass is characterized by a resonant frequency of the nano-photonic-crystal resonant cavity. The present disclosure provides a photoelasticity-based opto-micromechanical accelerometer structure, which uses a cavity resonance tension sensor in a nano-photonic-crystal cavity to measure a tension of the nano-photonic-crystal resonant cavity. The tension is concentrated in the nano-photonic-crystal resonant cavity, which makes the measurement of the tension more accurate and the resolution higher. Photoelastic-optomechanical coupling is also increased due to the nano-photonic-crystal resonant cavity.

    ELECTRONIC MODULE
    9.
    发明公开
    ELECTRONIC MODULE 审中-公开

    公开(公告)号:US20230194807A1

    公开(公告)日:2023-06-22

    申请号:US17559943

    申请日:2021-12-22

    发明人: Shih-Chieh TANG

    IPC分类号: G02B6/42 G01P15/093

    CPC分类号: G02B6/4246 G01P15/093

    摘要: An electronic module is provided. The electronic module includes a carrier, a movable component and an optical component. The movable component is on the carrier and configured to be movable with respect to the carrier. The optical component is configured to detect a movement of the movable component by an optical coupling between the optical component and the movable component.

    Probe-based bidirectional electrophoretic force optical trap loading method, device and application

    公开(公告)号:US11680961B2

    公开(公告)日:2023-06-20

    申请号:US17888940

    申请日:2022-08-16

    IPC分类号: G01P15/09 G21K1/00 G01P15/093

    CPC分类号: G01P15/093 G21K1/006

    摘要: A probe-based bidirectional electrophoretic force optical trap loading method includes steps of (1) detaching target particles from an upper electrode plate and capturing the target particles by a micro-scale probe based on a bidirectional electrophoretic force; (2) moving the probe with the target particles over an optical trap, applying a reverse electric field between the probe and the upper substrate electrode plate which is applied during a polar relaxation time of the target particles, and desorbing the target particles from the probe; and (3) turning on the optical trap, applying an electric field between the lower electrode plate and the upper electrode plate, adjusting the speed of the desorbed target particles through the electric field at which the optical trap is able to capture the desorbed target particles and the desorbed target particles moving to the effective capture range of the optical trap.