公开(公告)号：US20240356524A1

公开(公告)日：2024-10-24

申请号：US18584444

申请日：2024-02-22

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Won HAN ,  Sang Uk SON ,  Jong Woon KIM ,  Sungwook KIM ,  Jeong Hoon RYOU ,  Daehun JEONG ,  Jung-Eun YOUM ,  Sangheon HAN ,  Jeonga KIM ,  Hwasun LEE

IPC: H03H9/17 ,  H03H9/02

CPC classification number: H03H9/173 ,  H03H9/02118 ,  H03H9/02157

Abstract: A bulk acoustic resonator includes a resonance portion including a first electrode, a piezoelectric layer disposed on the first electrode along a height direction, and a second electrode disposed on the piezoelectric layer along the height direction. The resonance portion includes an overlapping region in which the first electrode, the piezoelectric layer, and the second electrode overlap each other along the height direction. The overlapping region includes a central portion and an edge portion disposed outside the central portion, and including a first edge portion and a second edge portion. A height of the second electrode of the first edge portion and a height of the second electrode of the second edge portion are lower than a height of the second electrode of the central portion along the height direction, and are different from each other along the height direction.

公开(公告)号：US20190386641A1

公开(公告)日：2019-12-19

申请号：US16190573

申请日：2018-11-14

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Tae Kyung LEE ,  Tae Yoon KIM ,  Jong Woon KIM ,  Moon Chul LEE ,  Yong Jin KANG ,  Nam Jung LEE

IPC: H03H9/17 ,  H03H9/58 ,  H03H9/13 ,  H03H3/02

Abstract: An acoustic resonator includes a substrate, and a resonant portion comprising a center portion in which a first electrode, a piezoelectric layer and a second electrode are sequentially laminated on the substrate, and an extending portion disposed along a periphery of the center portion, wherein the resonant portion is configured to have an asymmetrical polygonal plane, an insertion layer is disposed below the piezoelectric layer in the extending portion, and the piezoelectric layer is configured to have a top surface which is raised to conform to a shape of the insertion layer, and the insertion layer is configured to have an asymmetrical polygonal shape corresponding to a shape of the extending portion.

公开(公告)号：US20160169677A1

公开(公告)日：2016-06-16

申请号：US14930076

申请日：2015-11-02

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Won HAN ,  Jong Woon KIM

IPC: G01C19/5755

CPC classification number: G01C19/5755 ,  G01P15/09

Abstract: A rotation detection sensor is provided. The rotation detection sensor includes a fixed member spaced apart from a mass body, a first flexible member connecting the mass body and the fixed member to each other in a first direction, a second flexible member connecting the mass body and the fixed member to each other in a second direction perpendicular to the first direction, and membranes connecting the mass body and the fixed member to each other, the second flexible member being disposed between the membranes.

Abstract translation: 提供旋转检测传感器。 旋转检测传感器包括与质量体间隔开的固定部件，将质量体和固定部件沿第一方向彼此连接的第一柔性部件，将质量体与固定部件连结的第二柔性部件 在垂直于第一方向的第二方向上，以及将质量体和固定构件彼此连接的膜，第二柔性构件设置在膜之间。

公开(公告)号：US20160137489A1

公开(公告)日：2016-05-19

申请号：US14920184

申请日：2015-10-22

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jong Woon KIM ,  Won HAN ,  Woo Seok CHOI

IPC: B81B7/00

CPC classification number: B81B7/0051

Abstract: A microelectromechanical systems (MEMS) device includes: a circuit board; a lower cap disposed on the circuit board; a case disposed on the lower cap and having an internal space; a rotating part rotatably mounted in the case; an upper cap disposed on the case and including a reinforcing part disposed above a axis of the rotating part; and a molding layer encasing the lower cap, the case, and the upper cap.

Abstract translation: 微机电系统（MEMS）装置包括：电路板; 设置在电路板上的下盖; 设置在所述下盖上并且具有内部空间的壳体; 可旋转地安装在壳体中的旋转部件; 上盖设置在所述壳体上并且包括设置在所述旋转部件的轴线上方的加强部件; 以及包封下盖，外壳和上盖的成型层。

公开(公告)号：US20190253036A1

公开(公告)日：2019-08-15

申请号：US16193529

申请日：2018-11-16

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Won HAN ,  Sang Uk SON ,  Tae Yoon KIM ,  Jong Woon KIM

IPC: H03H9/17 ,  H03H9/13

CPC classification number: H03H9/177 ,  H03H9/132

Abstract: A bulk acoustic wave resonator includes: a substrate; a first electrode disposed above the substrate; a piezoelectric layer disposed above at least a portion of the first electrode; and a second electrode disposed above at least a portion of the piezoelectric layer. A first gap is formed between the piezoelectric layer and one of the first and second electrodes. The first gap includes a first inner gap disposed in an active area of the bulk acoustic wave resonator, and having a first spacing distance between the piezoelectric layer and the one of the first and second electrodes, and a first outer gap disposed outwardly of the active area and having a second spacing distance, different than the first spacing distance, between the piezoelectric layer and the one of the first and second electrodes.

公开(公告)号：US20180138888A1

公开(公告)日：2018-05-17

申请号：US15789194

申请日：2017-10-20

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Sang Kee YOON ,  Hyung Jae PARK ,  Nam Soo PARK ,  Jong Woon KIM ,  Moon Chul LEE

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/13 ,  H01L41/08 ,  H01L41/29 ,  H01L41/35

CPC classification number: H03H9/17 ,  H01L41/0477 ,  H01L41/081 ,  H01L41/18 ,  H01L41/29 ,  H01L41/35 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/02157 ,  H03H9/13 ,  H03H9/173 ,  H03H2003/021

Abstract: A bulk acoustic wave resonator includes a substrate on which a substrate protective layer is disposed, a membrane layer forming a cavity together with the substrate, and a resonant portion disposed on the membrane layer. The cavity is formed by removing a sacrificial layer using a mixed gas obtained by mixing a halide-based gas and an oxygen gas, and at least one of the membrane layer and the substrate protective layer has a thickness difference of 170 Å or less, after the cavity is formed.

公开(公告)号：US20160231114A1

公开(公告)日：2016-08-11

申请号：US15010770

申请日：2016-01-29

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jong Woon KIM ,  Won HAN ,  Tae Yoon KIM

IPC: G01C19/5705 ,  G01C19/5783

CPC classification number: G01C19/5712

Abstract: An angular velocity sensor includes a mass body; a first frame provided outside of the mass body; a first flexible part connecting the mass body and the first frame to each other; a second flexible part connecting the mass body and the first frame to each other; a second frame provided outside of the first frame; a third flexible part connecting the first frame and the second frame to each other; and a fourth flexible part connecting the first frame and the second frame to each other, wherein the mass body is fixed to the first frame by the second flexible part so as to be rotation-displaceable and translation-displaceable, and the first frame is connected to the second frame by the fourth flexible part so as to be rotation-displaceable.

Abstract translation: 角速度传感器包括质量体; 设置在质量体外部的第一框架; 连接质量体和第一框架的第一柔性部件; 将所述质量体和所述第一框架彼此连接的第二挠性部件; 设置在所述第一框架外部的第二框架; 将第一框架和第二框架彼此连接的第三柔性部件; 以及将所述第一框架和所述第二框架彼此连接的第四柔性部件，其中，所述质量体通过所述第二柔性部件固定到所述第一框架，以便能够旋转移位和平移 - 可移位，并且所述第一框架连接 通过第四柔性部分到第二框架，以便可旋转移位。

公开(公告)号：US20160178373A1

公开(公告)日：2016-06-23

申请号：US14550838

申请日：2014-11-21

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon KIM ,  Jung Won Lee ,  Seung Joo Shin ,  Won Kyu Jeung

IPC: G01C19/5705

CPC classification number: G01C19/5705 ,  G01C19/16

Abstract: Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

公开(公告)号：US20150274510A1

公开(公告)日：2015-10-01

申请号：US14265760

申请日：2014-04-30

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jae Chang LEE ,  Jong Hyeong SONG ,  Jong Woon KIM ,  Hyun Kee LEE

IPC: B81B7/00

CPC classification number: B81B7/0077 ,  B81C2203/0109 ,  Y10T428/24802 ,  Y10T428/31511

Abstract: Embodiments of the invention provide a cap module for MEMS including a substrate, a first negative photoresist, which is formed on one surface of the substrate, and a second negative photoresist, which is formed on one surface of the first negative photoresist.

Abstract translation: 本发明的实施例提供了一种用于MEMS的封装模块，其包括衬底，形成在衬底的一个表面上的第一负光致抗蚀剂和形成在第一负光致抗蚀剂的一个表面上的第二负光刻胶。

公开(公告)号：US20150198626A1

公开(公告)日：2015-07-16

申请号：US14465390

申请日：2014-08-21

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Tae Yoon KIM ,  Chang Hyun LIM ,  Jong Woon KIM

IPC: G01P15/12

CPC classification number: G01P15/123 ,  G01P2015/0842 ,  G01P2015/0871

Abstract: Embodiments of the invention provide an acceleration sensor, including a sensor part comprising a mass body part including a first mass body, a second mass body, and a connecting layer connecting the first mass body and the second mass body to each other, a flexible beam having the mass body part connected thereto to be displaceable, and a supporting part having the flexible beam connected thereto and supporting the mass body part to be floatable. The acceleration sensor further includes a cover coupled to the supporting part to cover the sensor part, being opposite to the first mass body to thereby form a cavity, and being opposite to the second mass body to thereby form a protrusion part.

Abstract translation: 本发明的实施例提供了一种加速度传感器，包括传感器部分，包括质量体部分，其包括第一质量体，第二质量体和将第一质量体和第二质量体彼此连接的连接层，柔性梁 具有连接到其上的质量体部分可移动，以及具有连接到其上的柔性梁并支撑质量体部分以可浮动的支撑部。 所述加速度传感器还包括与所述支撑部连接以覆盖所述传感器部分的盖，所述盖与所述第一质量体相对，从而形成空腔，并且与所述第二质量体相对，从而形成突出部。