公开(公告)号：US09519004B2

公开(公告)日：2016-12-13

申请号：US15037518

申请日：2014-10-21

申请人： SAGEM DEFENSE SECURITE

发明人： Alain Jeanroy

IPC分类号： G01P15/00 ,  G01P15/097 ,  G01P15/08 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/18 ,  G01P15/14 ,  G01C19/5733 ,  G01C19/5642 ,  G01C19/56 ,  G01P15/125

CPC分类号： G01P15/097 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0857

摘要： A sensor comprising: a stand; a first body movable along a sensing axis; two pairs of second bodies arranged symmetrically relative to the first body and along the sensing axis; transducers for detecting a position of the first body relative to the stand, for setting the second bodies into vibration along a vibration axis, and for detecting respective vibration frequencies of the second bodies; and surface electrostatic coupling means connecting each second body to the first body in such a manner that a movement of the first body relative to the stand along the sensing axis gives rise respectively to an increase and to a decrease in the electrostatic coupling for one and the other of the pairs of second bodies. Methods of controlling such a sensor.

摘要翻译： 一种传感器，包括：支架; 沿着感测轴可移动的第一主体; 两对第二主体相对于第一主体并沿传感轴对称地布置; 用于检测第一主体相对于支架的位置的换能器，用于将第二主体沿着振动轴线设置成振动，并且用于检测第二主体的各个振动频率; 以及表面静电耦合装置，其将每个第二主体连接到第一主体，使得第一主体相对于支架沿传感轴的运动分别产生一个和第二主体的静电耦合的增加和减小 其他两对第二体。 控制这种传感器的方法。

公开(公告)号：US09869551B2

公开(公告)日：2018-01-16

申请号：US14362195

申请日：2012-12-03

申请人： SAGEM DEFENSE SECURITE

发明人： Alain Jeanroy

IPC分类号： G01C19/574 ,  H01L29/84 ,  B81B3/00 ,  B81C99/00

CPC分类号： G01C19/574 ,  B81B3/0021 ,  B81B7/02 ,  B81C99/0025 ,  B81C99/003 ,  B81C99/0045

摘要： An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.

公开(公告)号：US20140299947A1

公开(公告)日：2014-10-09

申请号：US14362195

申请日：2012-12-03

申请人： SAGEM DEFENSE SECURITE

发明人： Alain Jeanroy

IPC分类号： G01C19/574 ,  B81C99/00 ,  B81B3/00

CPC分类号： G01C19/574 ,  B81B3/0021 ,  B81B7/02 ,  B81C99/0025 ,  B81C99/003 ,  B81C99/0045

摘要： An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.

摘要翻译： MEMS型的惯性角度传感器具有至少两个质量的支撑件，其相对于支撑件可移动地安装，至少一个静电致动器和至少一个静电检测器。 质量悬挂在通过悬挂装置连接到支架上的框架中。 致动器和检测器被设计成分别产生和检测质量的振动;以及一种用于平衡这样的传感器的方法，所述传感器设置有安装在框架和支撑件之间的至少一个负载检测器，以及至少一个静电弹簧， 框架和质量之一并且被从动以确保作为负载传感器的测量信号的函数的传感器的动态平衡。