公开(公告)号：US10794778B2

公开(公告)日：2020-10-06

申请号：US15839042

申请日：2017-12-12

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Keiji Nakagawa ,  Keiichi Yamaguchi ,  Atsushi Matsuo ,  Fumio Ichikawa

IPC: H01L41/107 ,  G01L1/16 ,  G01L1/10 ,  G01C19/5607 ,  G01C19/5621 ,  G01C19/5614 ,  H01L41/09

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US09874484B2

公开(公告)日：2018-01-23

申请号：US14665293

申请日：2015-03-23

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Keiji Nakagawa ,  Keiichi Yamaguchi ,  Atsushi Matsuo ,  Fumio Ichikawa

IPC: H01L41/107 ,  G01L1/16 ,  G01L1/10 ,  H01L41/09

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US20130312519A1

公开(公告)日：2013-11-28

申请号：US13899914

申请日：2013-05-22

Applicant: Seiko Epson Corporation

Inventor： Fumio Ichikawa

IPC: G01C19/56 ,  G01C25/00

CPC classification number: G01C19/56 ,  G01C19/5607 ,  G01C25/00 ,  Y10T29/42

Abstract: A vibrator element including: a base portion; vibrating arms which extend from the base portion; a first drive section and a second drive section, and a first detecting section and a second detecting sensor which are respectively provided in the vibrating arms; adjusting arms which extend from the base portion in parallel to the vibrating arms; and a first adjusting section and a second adjusting section which are respectively provided on a principal surface of the adjusting arms, wherein, in the first adjusting section and the second adjusting section, a first electrode, piezoelectric layers, and adjustment electrodes are laminated on the first principal surface to be formed, and output signals of the first adjusting section and the second adjusting section are in antiphase to charges generated by the first detecting section and the second detecting section when no angular velocity is added to the vibrating arms.

Abstract translation: 一种振动器元件，包括：基部; 从基部延伸的振动臂; 第一驱动部和第二驱动部，以及分别设置在所述振动臂中的第一检测部和第二检测传感器。 调节臂，其从所述基部平行于所述振动臂延伸; 以及分别设置在所述调整臂的主面上的第一调整部和第二调整部，其中，在所述第一调整部和所述第二调整部中，在所述第一调整部和所述第二调整部之间层叠有第一电极， 第一调整部分和第二调节部分的输出信号与第一检测部分和第二检测部分产生的电荷相反，当没有角速度被加到振动臂上时。

公开(公告)号：US09534894B2

公开(公告)日：2017-01-03

申请号：US14644770

申请日：2015-03-11

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumio Ichikawa

IPC: G01C19/56 ,  G01C19/5607 ,  H03H9/21 ,  G01C19/5621 ,  H03H9/05 ,  H03H9/10

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  H03H9/0547 ,  H03H9/1014 ,  H03H9/21

Abstract: In order to provide a resonator element having high production efficiency and low impedance in a small size, the resonator element includes a base portion, and a driving arm which extends from the base portion and includes a through hole, in which the driving arm vibrates along an in-plane direction, and includes a plurality of broad portions of which a width in the in-plane direction is broad and a plurality of narrow portions of which a width in the in-plane direction is narrow which alternate with each other, and the through hole is disposed in the broad portion.

Abstract translation: 为了提供具有高生产效率和小尺寸的低阻抗的谐振元件，谐振器元件包括基部和从基部延伸并包括通孔的驱动臂，驱动臂沿着该通孔振动 在面内方向上，并且包括多个宽边部分，其中在面内方向上的宽度是宽的，并且其中在面内方向上的宽度彼此交替的多个窄部分，以及 通孔设置在宽的部分。

公开(公告)号：US09341477B2

公开(公告)日：2016-05-17

申请号：US13899914

申请日：2013-05-22

Applicant: Seiko Epson Corporation

Inventor： Fumio Ichikawa

IPC: G01C19/56 ,  G01C25/00 ,  G01C19/5607

CPC classification number: G01C19/56 ,  G01C19/5607 ,  G01C25/00 ,  Y10T29/42

Abstract: A vibrator element including: a base portion; vibrating arms which extend from the base portion; a first drive section and a second drive section, and a first detecting section and a second detecting sensor which are respectively provided in the vibrating arms; adjusting arms which extend from the base portion in parallel to the vibrating arms; and a first adjusting section and a second adjusting section which are respectively provided on a principal surface of the adjusting arms, wherein, in the first adjusting section and the second adjusting section, a first electrode, piezoelectric layers, and adjustment electrodes are laminated on the first principal surface to be formed, and output signals of the first adjusting section and the second adjusting section are in antiphase to charges generated by the first detecting section and the second detecting section when no angular velocity is added to the vibrating arms.

Abstract translation: 一种振动器元件，包括：基部; 从基部延伸的振动臂; 第一驱动部和第二驱动部，以及分别设置在所述振动臂中的第一检测部和第二检测传感器。 调节臂，其从所述基部平行于所述振动臂延伸; 以及分别设置在所述调整臂的主面上的第一调整部和第二调整部，其中，在所述第一调整部和所述第二调整部中，在所述第一调整部和所述第二调整部之间层叠有第一电极， 第一调整部分和第二调节部分的输出信号与第一检测部分和第二检测部分产生的电荷相反，当没有角速度被加到振动臂上时。