公开(公告)号：US12055448B1

公开(公告)日：2024-08-06

申请号：US18646672

申请日：2024-04-25

Applicant: Institute of Rock and Soil Mechanics, Chinese Academy of Sciences

Inventor： Xianjun Tan ,  Weizhong Chen ,  Hongdan Yu ,  Jingqiang Yuan ,  Yun Zhou ,  Xuyan Tan ,  Peichao Zheng

IPC: G01L1/10

CPC classification number: G01L1/106

Abstract: The disclosure provides a vibrating wire compressive stress gauge and stress testing equipment suitable for use in low-temperature environments. By providing a stress trigger sleeve made of elastic material, the concrete structure of the lining itself expands when it is affected by high or low temperatures, extruding the stress trigger sleeve, and the extrusion force is offset through the elastic force of the elastic material, thereby preventing the expansion force from being transmitted to the vibrating wire assembly to generate stress signals that are caused by the self-expansion of the lining structure, which may cause measurement error. Specifically, the vibrating wire assembly is provided in the vibrating wire measurement space composed of a stress trigger sleeve and a pair of anchoring disks. When the lining is subjected to external stress, a certain internal force will be generated.

公开(公告)号：US20180100775A1

公开(公告)日：2018-04-12

申请号：US15839042

申请日：2017-12-12

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA ,  Keiichi YAMAGUCHI ,  Atsushi MATSUO ,  Fumio ICHIKAWA

IPC: G01L1/16 ,  G01L1/10 ,  G01C19/5607

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US08631711B2

公开(公告)日：2014-01-21

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01B7/16

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

公开(公告)号：US08445977B2

公开(公告)日：2013-05-21

申请号：US13422466

申请日：2012-03-16

Applicant: Takashi Yoshida

Inventor： Takashi Yoshida

IPC: H01L29/84

CPC classification number: G01L9/0019 ,  G01H11/00 ,  G01L1/106 ,  G01P15/097

Abstract: Vibration beams are provided on a substrate in parallel with the substrate and in parallel with each other, and provided in vacuum chambers formed by a shell and the substrate. Each of vibration beams has a sectional shape with a longer sectional thickness in a direction perpendicular to a surface of the substrate than a sectional thickness in a direction parallel to the surface of the substrate. A first electrode plate is provided in parallel with the surface of the substrate and connected to one end of each of the vibration beams. A second electrode plate is provided in parallel with the surface of the substrate and between the vibration beams. Third and fourth electrode plates are provided on opposite sides of the vibration beams. Asperities are provided in opposed side wall portion surfaces of the vibration beams and the second, third and fourth electrode plates.

Abstract translation: 振动梁与基板平行地设置在基板上并且彼此平行，并且设置在由壳体和基板形成的真空室中。 每个振动梁具有在与基板的表面垂直的方向上的截面厚度比在与基板的表面平行的方向上的截面厚度的截面形状。 第一电极板与衬底的表面平行地设置并连接到每个振动梁的一端。 第二电极板与基板的表面和振动梁之间平行设置。 第三和第四电极板设置在振动梁的相对侧上。 在振动梁和第二，第三和第四电极板的相对的侧壁部分表面中设置有凹凸。

公开(公告)号：US20120266686A1

公开(公告)日：2012-10-25

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01N3/08

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

公开(公告)号：US20120235257A1

公开(公告)日：2012-09-20

申请号：US13422466

申请日：2012-03-16

Applicant: Takashi YOSHIDA

Inventor： Takashi YOSHIDA

IPC: H01L29/84

CPC classification number: G01L9/0019 ,  G01H11/00 ,  G01L1/106 ,  G01P15/097

Abstract: Vibration beams are provided on a substrate in parallel with the substrate and in parallel with each other, and provided in vacuum chambers formed by a shell and the substrate. Each of vibration beams has a sectional shape with a longer sectional thickness in a direction perpendicular to a surface of the substrate than a sectional thickness in a direction parallel to the surface of the substrate. A first electrode plate is provided in parallel with the surface of the substrate and connected to one end of each of the vibration beams. A second electrode plate is provided in parallel with the surface of the substrate and between the vibration beams. Third and fourth electrode plates are provided on opposite sides of the vibration beams. Asperities are provided in opposed side wall portion surfaces of the vibration beams and the second, third and fourth electrode plates.

Abstract translation: 振动梁与基板平行地设置在基板上并且彼此平行，并且设置在由壳体和基板形成的真空室中。 每个振动梁具有在与基板的表面垂直的方向上的截面厚度比在与基板的表面平行的方向上的截面厚度的截面形状。 第一电极板与衬底的表面平行地设置并连接到每个振动梁的一端。 第二电极板与基板的表面和振动梁之间平行设置。 第三和第四电极板设置在振动梁的相对侧上。 在振动梁和第二，第三和第四电极板的相对的侧壁部分表面中设置有凹凸。

公开(公告)号：US20120073387A1

公开(公告)日：2012-03-29

申请号：US13376329

申请日：2010-06-23

Applicant: Naoya Shinozaki

Inventor： Naoya Shinozaki

IPC: G01L1/10

CPC classification number: G01G3/16 ,  G01G21/244 ,  G01L1/106

Abstract: (Problem)To provide a load detection sensor capable of stably weighing a heavy object to be weighed in high precision(Means to solve the problem)The load detection sensor 40 according to the present invention comprises a force sensor 41 including a tuning fork vibrator and a block body 42 that has a rectangular parallelepiped outer shape and transmits an applied load to the force sensor by using a lever to reduce the load. It is characterized in that the block body 42 contains therein a lever mechanism and a Roberval mechanism by working on the longitudinal side thereof and that the force sensor 41 is coupled to the side of the block body 42. Although the block body is cut and ground in the side for fabricating the lever mechanism and the Roberval mechanism, it maintains the rectangular parallelepiped outer shape and sufficient mechanical strength, thereby enabling to stably reduce the applied load.

Abstract translation: （问题）提供能够以高精度稳定称重重物的负载检测传感器（解决问题的手段）根据本发明的负载检测传感器40包括力传感器41，其包括音叉振动器和 块体42，其具有长方体外形，并且通过使用杠杆将负载施加到力传感器以减轻负载。 其特征在于，块体42在其纵向侧上装有杠杆机构和罗泊威机构，并且力传感器41联接到块体42的侧面。尽管块体被切割和磨削 在制造杠杆机构和罗伯威尔机构的一侧，它保持了长方体外形和足够的机械强度，从而能够稳定地降低施加的载荷。

公开(公告)号：US08143768B2

公开(公告)日：2012-03-27

申请号：US12784441

申请日：2010-05-20

Applicant: Richard A. Hanson

Inventor： Richard A. Hanson

IPC: H03H9/05 ,  H03H9/19 ,  H03H9/205 ,  H01L41/04 ,  G01P15/097 ,  G01P1/08 ,  G01P1/16

CPC classification number: H03H9/2463 ,  G01L1/106 ,  G01L7/024 ,  H03H9/21 ,  H03H9/2405 ,  H03H9/2473 ,  H03H2009/0244

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract translation: 用于微型振动梁机械谐振器的新型配置为支撑结构提供低能量传递，并且对安装未对准具有低灵敏度。 对称的悬挂部分包括两个振动梁，其振动垂直于谐振器的静止平面，彼此相位相差180度。 振动梁至少在一端附接到扭转联接元件，该扭转联接元件沿非平移悬挂边界连接到安装垫。 平衡连接到振动梁，并且谐振器被构造成使得耦合到来自振动梁的每个扭转耦合元件的动力和力矩沿着邻近对称轴的每个标称非平移悬浮边界平行，并且沿对称轴接近 到每个标称非翻译悬浮边界。 每个非平移悬挂边界是用于第一扭转耦合元件的扭转变形的扭转轴。

公开(公告)号：US20110301876A1

公开(公告)日：2011-12-08

申请号：US13201318

申请日：2010-02-12

Applicant: Kaoru Yamashita

Inventor： Kaoru Yamashita

IPC: G06F19/00 ,  G01L1/00

CPC classification number: B25J13/084 ,  G01L1/106 ,  G01L5/16

Abstract: A tactile sensor unit is provided, which includes a substrate; a coat formed on the substrate; and a cantilever beam structure having one end fixed to the substrate and curved to rise in such a direction that the other end of the cantilever beam structure is farther from the substrate than the one end. The tactile sensor unit detects a load applied to the coat. The cantilever beam structure is capable of resonating at a first resonant frequency and a second resonant frequency which is different from the first resonant frequency. The tactile sensor unit further includes a computation section for calculating a directional component of the load based on a change ratio of the first resonant frequency obtained in accordance with a change in the load and a change ratio of the second resonant frequency obtained in accordance with the change in the load.

Abstract translation: 提供了一种触觉传感器单元，其包括基板; 在基板上形成的涂层; 以及一个悬臂梁结构，其一端固定在基板上并弯曲成沿垂直于悬臂梁结构的另一端离开基板的方向上升。 触觉传感器单元检测施加到外套的负载。 悬臂梁结构能够以不同于第一谐振频率的第一谐振频率和第二谐振频率谐振。 触觉传感器单元还包括计算部分，用于基于根据负载变化获得的第一谐振频率的变化率和根据负载变化获得的第二谐振频率的变化率来计算负载的方向分量 改变负载。

公开(公告)号：US20020125791A1

公开(公告)日：2002-09-12

申请号：US09907729

申请日：2001-07-17

Inventor： Graeme A. Blake

IPC: H02N002/00

CPC classification number: H03H9/2473 ,  G01L1/106 ,  G01P15/097

Abstract: A resonator beam structure that, during vibration of the tines, minimizes coupling of a longitudinal motion of the tines into a support structure to which the resonator beam is attached. The resonator beam includes a pair of tines; a first base region mechanically coupling a first ends of the tines together; a second base region mechanically coupling the second ends of the tines together; a first cutout of a first predetermined geometry at a first predetermined position in a closed interior portion of the first base region; and a second cutout of a second predetermined geometry at a second predetermined position in a closed interior portion of the second base region. The invention includes a method for using finite element analysis to determine an optimum geometry and position of the cutouts.

Abstract translation: 谐振器束结构，其在尖齿的振动期间最小化尖齿的纵向运动与谐振器梁所附着的支撑结构的耦合。 谐振器束包括一对尖齿; 将所述尖齿的第一端机械地联接在一起的第一基区; 将所述齿的第二端机械地联接在一起的第二基区; 在第一基区的封闭内部的第一预定位置处的第一预定几何形状的第一切口; 以及第二预定几何形状的第二切口，其位于第二基部区域的封闭内部的第二预定位置处。 本发明包括一种使用有限元分析来确定切口的最佳几何形状和位置的方法。