RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES

    公开(公告)号:US20250123210A1

    公开(公告)日:2025-04-17

    申请号:US18810435

    申请日:2024-08-20

    Applicant: NOVA LTD.

    Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.

    SENSING DEVICES
    2.
    发明申请

    公开(公告)号:US20250076129A1

    公开(公告)日:2025-03-06

    申请号:US18948391

    申请日:2024-11-14

    Abstract: Provide a sensing device comprising a cavity and an air pressure sensor disposed within the cavity. The cavity includes two elastic walls disposed opposite to each other and a rigid wall connecting the two elastic walls, wherein the rigid wall is in a form of a tubular structure, and the two elastic walls are configured to seal the tubular structure to form the cavity. A deformation of the two elastic walls changes air pressure within the cavity, and the air pressure sensor is configured to generate an electrical signal in response to the change of the air pressure.

    External gear, wave decelerator, and robot

    公开(公告)号:US12186902B2

    公开(公告)日:2025-01-07

    申请号:US17891333

    申请日:2022-08-19

    Inventor: Daisuke Takagi

    Abstract: An external gear includes a body, external teeth, a diaphragm, and a strain gauge. The diaphragm extends in a direction intersecting with an axial direction on another side in of the body the axial direction. The strain gauge is on at least one of a surface on one side of the diaphragm in the axial direction and a surface on another side of the diaphragm in the axial direction. The strain gauge is only in a region that is about a half or less of a radial length from one end of the diaphragm in the axial direction to the other end of the diaphragm in the axial direction with a radial midpoint between the one end of the diaphragm in the axial direction and the other end of the diaphragm in the axial direction as a center in a section passing through the central axis.

    HYBRID METROLOGY METHOD AND SYSTEM

    公开(公告)号:US20250003882A1

    公开(公告)日:2025-01-02

    申请号:US18760099

    申请日:2024-07-01

    Applicant: NOVA LTD

    Abstract: A method and system are presented for use in measuring characteristic(s) of patterned structures. The method utilizes processing of first and second measured data, wherein the first measured data is indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of illuminating and/or collected light conditions corresponding to the characteristic(s) to be measured, and the second measured data comprises at least one spectrum obtained from the patterned structure in Optical Critical Dimension (OCD) measurement session. The processing comprises applying model-based analysis to the at least one Raman spectrum and the at least one OCD spectrum, and determining the characteristic(s) of the patterned structure under measurements.

    Force touch judgment method
    6.
    发明授权

    公开(公告)号:US12153760B1

    公开(公告)日:2024-11-26

    申请号:US18381596

    申请日:2023-10-18

    Abstract: A force touch judgement method is applied to a force touch pad with two force sensors. Firstly, a force touch operation corresponding to a real force value is performed on a force touch position. Then, a first sensing signal value and a second sensing signal value corresponding to the force touch operation are respectively generated by the two force sensors. Then, the first sensing signal value and the second sensing signal value are added as a total sensing signal value. A calibration force value corresponding to the force touch position is obtained. A first calibration signal value and a second calibration signal value corresponding to the force touch position are added as a total calibration signal value. A ratio of the total sensing signal value to the total calibration signal value is equal to a ratio of the real force value to the calibration force value.

    Thin film sensor
    7.
    发明授权

    公开(公告)号:US12072250B2

    公开(公告)日:2024-08-27

    申请号:US17709435

    申请日:2022-03-31

    CPC classification number: G01L1/005 G01K13/08

    Abstract: A thin film sensor includes an insulating layer provided on a surface of a measurement target, and a sensor layer that is laminated on the insulating layer, and includes a plurality of regions partitioned by a groove that is provided by irradiation of a laser and penetrates in a thickness direction. Among the plurality of regions, at least one region corresponds to a sensor region that senses a pressure applied to the measurement target or a temperature of the measurement target, and other regions each correspond to a non-sensor region that does not sense a pressure applied to the measurement target or a temperature of the measurement target.

    Module and method for monitoring environmental influences on a module including multiple stress measuring cells

    公开(公告)号:US11976987B2

    公开(公告)日:2024-05-07

    申请号:US17838952

    申请日:2022-06-13

    CPC classification number: G01L1/005 G01L25/00

    Abstract: A module, including at least one first component in the form of a semiconductor component including multiple stress measuring cells situated in a distributed manner for detecting stress measured values at different measuring positions of the semiconductor component, at least one second component which is mechanically coupled to the semiconductor component, and an evaluation unit, which is designed to ascertain at least one location-dependent stress distribution in the semiconductor component based on the stress measured values detected at one measuring point in time, and to ascertain a deformation state of the at least one second component at the measuring point in time on the basis of the at least one ascertained location-dependent stress distribution in the semiconductor component. A corresponding method for monitoring environmental influences on a module is also described.

    Force sensor
    9.
    发明授权

    公开(公告)号:US11933681B2

    公开(公告)日:2024-03-19

    申请号:US17277382

    申请日:2019-09-23

    CPC classification number: G01L1/22 G01L5/1627

    Abstract: A force sensor comprising a force sensitive resistor having a common electrode and an electrode array separated by a force sensitive resistor material. The sensor includes a preload structure, where the preload structure imparts a force on the force sensitive resistor material. The sensor may also include a signal conditioning board to read a signal from the electrode array and convert it to a digital output.

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