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公开(公告)号：US20230003637A1
公开(公告)日：2023-01-05
申请号：US17757224
申请日：2020-12-08
Applicant: NOVA LTD.
Inventor： Yonatan OREN , Gilad BARAK
Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.
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公开(公告)号：US20230168200A1
公开(公告)日：2023-06-01
申请号：US17816713
申请日：2022-08-01
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up
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公开(公告)号：US20240295436A1
公开(公告)日：2024-09-05
申请号：US18600698
申请日：2024-03-09
Applicant: NOVA LTD.
Inventor： Gilad BARAK , Yonatan OREN
CPC classification number: G01J3/0208 , G01J3/0224 , G01J3/06 , G01J3/10 , G01J3/2803 , G01J3/2823 , G01J3/44 , G01J2003/283
Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.
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公开(公告)号：US20220373465A1
公开(公告)日：2022-11-24
申请号：US17714035
申请日：2022-04-05
Applicant: NOVA LTD
Inventor： Yonatan OREN
Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
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公开(公告)号：US20220326159A1
公开(公告)日：2022-10-13
申请号：US17694782
申请日：2022-03-15
Applicant: NOVA LTD.
Inventor： Gilad Barak , Yanir HAINICK , Yonatan OREN , Vladimir Machavariani
Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.
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Patent Agency Ranking
公开(公告)号：US20240210322A1
公开(公告)日：2024-06-27
申请号：US18402708
申请日：2024-01-02
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/06113 , G01N2201/0636
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up
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公开(公告)号：US20240019375A1
公开(公告)日：2024-01-18
申请号：US18245161
申请日：2021-09-14
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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公开(公告)号：US20230296434A1
公开(公告)日：2023-09-21
申请号：US18147682
申请日：2022-12-28
Applicant: NOVA LTD.
Inventor： Gilad BARAK , Yonatan OREN
CPC classification number: G01J3/0208 , G01J3/0224 , G01J3/06 , G01J3/10 , G01J3/2803 , G01J3/2823 , G01J3/44 , G01J2003/283
Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.
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公开(公告)号：US20230035404A1
公开(公告)日：2023-02-02
申请号：US17758067
申请日：2020-12-24
Applicant: NOVA LTD.
Inventor： Yonatan OREN , Gilad BARAK
IPC: G01N21/956 , G01N21/95
Abstract: A combined OCD and photoreflectance system and method for improving the OCD performance in measurements of optical properties of a target sample. The system comprises (a) either a single channel OCD set-up comprised of a single probe beam configured in a direction normal/oblique to the target sample or a multi-channel OCD set-up having multiple probe beams configured in normal and oblique directions to the target sample for measuring the optical properties of the target sample, (b) at least one laser source for producing at least one laser beam, (c) at least one modulation device to turn the at least one laser beam into at least one alternatingly modulated laser beam, and (d) at least one spectrometer for measuring spectral components of the at least one light beam reflecting off said target sample; wherein the at least one alternatingly modulated laser beam is alternatingly modulating the spectral reflectivity of the target sample,
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公开(公告)号：US20240302284A1
公开(公告)日：2024-09-12
申请号：US18435632
申请日：2024-02-07
Applicant: NOVA LTD.
Inventor： Yonatan OREN
CPC classification number: G01N21/65 , G01N21/9501 , G03F7/70616 , G01N2201/0231 , G01N2201/06113
Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
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