公开(公告)号：US09170167B2

公开(公告)日：2015-10-27

申请号：US13779852

申请日：2013-02-28

Applicant: Seiko Instruments Inc.

Inventor： Takeshi Uchiyama ,  Masataka Shinogi

IPC: G01L9/16 ,  G01L13/02 ,  G01L19/00 ,  G01L9/00

CPC classification number: G01L13/02 ,  G01L9/0019 ,  G01L9/0055 ,  G01L19/0038

Abstract: A pressure sensor has a detecting unit configured to detect a difference between outputs from deformation detecting units of first and second pressure variation sensors. The first and second pressure variation sensors are connected to one another so that the gap of the first pressure variation sensor communicates the exterior of the cavities of the first and second pressure variation sensors and the interior of the cavity of the first pressure variation sensor, and so that the gap of the second pressure variation sensor communicates the interior of the cavity of the first pressure variation sensor and the interior of the cavity of the second pressure variation sensor.

Abstract translation: 压力传感器具有检测单元，其被配置为检测第一和第二压力变化传感器的变形检测单元的输出之间的差异。 第一和第二压力变化传感器彼此连接，使得第一压力变化传感器的间隙连通第一和第二压力变化传感器的空腔的外部和第一压力变化传感器的空腔的内部， 使得第二压力变化传感器的间隙连通第一压力变化传感器的空腔的内部和第二压力变化传感器的腔的内部。

公开(公告)号：US20140208857A1

公开(公告)日：2014-07-31

申请号：US14034346

申请日：2013-09-23

Applicant: NXP B.V.

Inventor： Kim Phan Le ,  Willem Frederik Adrianus Besling

IPC: G01L11/04 ,  B81C1/00

CPC classification number: G01L11/04 ,  B81C1/00158 ,  G01L9/0019 ,  G01L19/0092

Abstract: A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

Abstract translation: 一种共振MEMS压力传感器，其中MEMS谐振器的谐振器质量块被固定在谐振器腔下方的固定基底以及谐振腔上的顶部膜上。 这提供了更稳固的谐振器质量固定并且提供谐振频率对空腔外的压力的依赖性。

公开(公告)号：US20140053651A1

公开(公告)日：2014-02-27

申请号：US13592570

申请日：2012-08-23

Applicant: Willem Frederik Adrianus Besling ,  Peter Gerard STEENEKEN ,  Olaf Wunnicke

Inventor： Willem Frederik Adrianus Besling ,  Peter Gerard STEENEKEN ,  Olaf Wunnicke

IPC: G01L11/04

CPC classification number: G01L9/0016 ,  G01L9/0019 ,  G01L21/22

Abstract: As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.

Abstract translation: 可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。 膜在其中具有多个开口，其将气体进入和离开室。 当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。 传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。

公开(公告)号：US08516905B2

公开(公告)日：2013-08-27

申请号：US13583379

申请日：2012-04-02

Applicant: Kunihiko Nakamura ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Keiji Onishi

Inventor： Kunihiko Nakamura ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Keiji Onishi

IPC: G01L1/10 ,  G01B7/16

CPC classification number: G01L9/0019 ,  H03H9/2463 ,  H03H2009/02488

Abstract: A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.

Abstract translation: 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力 基于由检测电路检测到的AC信号的传输特性。

公开(公告)号：US20130000411A1

公开(公告)日：2013-01-03

申请号：US13538143

申请日：2012-06-29

Applicant: Philippe ROBERT ,  Guillaume JOURDAN

Inventor： Philippe ROBERT ,  Guillaume JOURDAN

IPC: G01L7/08 ,  G01L9/12

CPC classification number: G01L9/0052 ,  B81B2203/0127 ,  B81B2203/0154 ,  B81B2203/0307 ,  B81B2203/053 ,  G01L9/001 ,  G01L9/0019 ,  G01L9/006 ,  G01L9/0073

Abstract: A MEMS and/or NEMS pressure measurement device comprising a deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, detection means with strain gauges for the deformation of the membrane, said detection means being formed on a substrate and a non-deformable arm, transmitting the deformation in an amplified manner of the membrane to the detection means, the arm being rotatably hinged to the substrate about an axis (Y) substantially parallel to the plane of the membrane and which is integral with the membrane so that it transmits a deformation of the membrane to the detection means in an amplified manner.

Abstract translation: 一种MEMS和/或NEMS压力测量装置，其包括悬挂在基板上的可变形膜，所述膜的一个表面旨在经受待测量的压力，具有用于膜变形的应变计的检测装置， 检测装置形成在基板和不可变形臂上，将膜的放大方式的变形传递到检测装置，臂可旋转地铰接到基板上，绕轴线（Y）大致平行于 膜，并且其与膜成一体，使得其以放大的方式将膜的变形传递到检测装置。

公开(公告)号：US20120198916A1

公开(公告)日：2012-08-09

申请号：US13321505

申请日：2010-04-19

Applicant: Peter Kinnell ,  Russell William Craddock

Inventor： Peter Kinnell ,  Russell William Craddock

IPC: G01N29/02

CPC classification number: G01L9/0019

Abstract: A sensor is provided having a diaphragm. One side of the diaphragm is arranged to be exposed to a fluid, to measure a characteristic of the fluid. Two supports are mounted on the diaphragm and a resonator is provided on the supports. The proportion of energy transferred from the resonator to the diaphragm is variable for the sensor to be used either as a viscosity/density sensor or as a pressure sensor.

Abstract translation: 提供具有隔膜的传感器。 隔膜的一侧被布置成暴露于流体，以测量流体的特性。 两个支撑件安装在隔膜上，并且在支撑件上设置有谐振器。 从谐振器传递到隔膜的能量的比例是可变的，传感器可以用作粘度/密度传感器或压力传感器。

公开(公告)号：US20070113662A1

公开(公告)日：2007-05-24

申请号：US11617832

申请日：2006-12-29

Applicant: John GREENWOOD

Inventor： John GREENWOOD

IPC: G01L13/02 ,  G01L15/00

CPC classification number: G01L9/0019

Abstract: A diaphragm structure with a first substrate including a first surface with an annular groove therein and a second opposing surface with an annular groove on each side of annular groove in the first surface defining a first diaphragm. A second substrate also includes a first surface with an annular groove therein and a second opposing surface with an annular groove on each side of the annular groove in the first surface defining a second diaphragm. A diaphragm overload stop is located behind the first and second diaphragms.

Abstract translation: 一种隔膜结构，其具有包括第一表面和第二表面的第一表面，第一表面具有环形槽，第二相对表面在第一表面中的环形槽的每一侧具有环形槽，限定第一隔膜。 第二基板还包括其中具有环形槽的第一表面和在第一表面中的环形槽的每一侧上具有限定第二隔膜的环形槽的第二相对表面。 隔膜过载停止位于第一和第二隔膜后面。

公开(公告)号：US20060191349A1

公开(公告)日：2006-08-31

申请号：US11352629

申请日：2006-02-13

Applicant: Alain Izadnegahdar

Inventor： Alain Izadnegahdar

IPC: G01L21/04

CPC classification number: G01L15/00 ,  G01L9/0019 ,  G01L9/065 ,  G01L9/125 ,  G01L19/04

Abstract: Systems and methodologies that provide for multi-parameter sensing via micro fabricated sensing structures operatively connected to oscillators, each micro-fabricated sensing structure in part defines a frequency of a respective associated oscillator. Output from such oscillators can be combined together, and then AC coupled with an incoming DC voltage that feeds the oscillators. The wiring arrangement includes two conducting paths/wires that carry a direct current to the oscillators as well as outputting the combined signal to external measurement devices. In addition, arrangements for pressure sensors are provided that mitigate errors from temperature variations and the induced stress/strains.

Abstract translation: 通过可操作地连接到振荡器的微制造感测结构提供多参数感测的系统和方法，每个微制造的感测结构部分地限定相应的相关振荡器的频率。 来自这种振荡器的输出可以组合在一起，然后与馈送振荡器的输入DC电压耦合。 布线布置包括两个传导路径/导线，其将直流电流传送到振荡器，以及将组合的信号输出到外部测量装置。 此外，还提供了用于减轻温度变化和诱发的应力/应变的误差的压力传感器的布置。

公开(公告)号：US20050279175A1

公开(公告)日：2005-12-22

申请号：US11153665

申请日：2005-06-15

Applicant: Yuji Arai ,  Tadashi Nishikawa

Inventor： Yuji Arai ,  Tadashi Nishikawa

IPC: G01L9/00

CPC classification number: G01L9/0019

Abstract: A silicon resonant type pressure sensor has a sensing diaphragm to which a measuring pressure is to be applied; and a vibrating beam which is embedded on the sensing diaphragm, and which is made of a semiconductor, wherein the vibrating beam further has a vibrating beam body having first and second vibrating beams which are allocated in parallel each other, and at least one connecting beam portion which couples the first vibrating beam and the second vibrating beam, a driving vibrating beam portion which is fabricated on a side of at least one side face in an axial direction of the first and second vibrating beams, and which is made of a conductor, and detection vibrating beam portions which are fabricated on sides of another side face in the axial direction of the first and second vibrating beams respectively, and which are made of a conductor.

Abstract translation: 硅谐振型压力传感器具有要施加测量压力的感测膜片; 以及振动梁，其嵌入在所述检测膜上，并且由半导体制成，其中所述振动梁还具有振动梁主体，所述振动梁主体具有彼此平行分配的第一和第二振动梁，以及至少一个连接梁 连接第一振动梁和第二振动梁的部分，驱动振动梁部分，其制造在第一和第二振动梁的轴向方向上的至少一个侧面的一侧上，并且由导体制成， 以及检测振动梁部分，其分别制造在第一和第二振动梁的轴向上的另一个侧面的侧面上，并且由导体制成。

公开(公告)号：US20040045360A1

公开(公告)日：2004-03-11

申请号：US10343511

申请日：2003-01-31

Inventor： Moroni Andrea ,  Volonterio Eugenio

IPC: G01L009/06

CPC classification number: G01L9/0019

Abstract: A pressure sensing device for measuring the pressure of a fluid, comprising: a measurement diaphragm which is at least partially made of semiconductor material, is provided with a first surface and a second surface which are exposed respectively to a first pressure and to a second pressure, and undergoes a deformation following the application of the first pressure and of the second pressure; and a resonant element made of semiconductor material which is provided with a first end portion and with a second end portion for mechanically coupling the resonant element to the measurement diaphragm, the oscillation frequency of the resonant element varying according to the deformation to which the measurement diaphragm is subjected; and first circuit means for generating a sensing signal which is indicative of the oscillation frequency of the resonant element. Its particularity consisting of the fact that the resonant element comprises second circuit means for increasing the intensity of the sensing signal which is indicative of the oscillation frequency of the resonant element, the second circuit means being integrated with the structure of the resonant element.

Abstract translation: 一种用于测量流体压力的压力感测装置，包括：至少部分地由半导体材料制成的测量膜片，设置有分别暴露于第一压力和第二压力的第一表面和第二表面 并且在施加第一压力和第二压力之后经历变形; 以及由半导体材料制成的谐振元件，其具有第一端部和用于将谐振元件机械耦合到测量膜片的第二端部，谐振元件的振荡频率根据测量膜片的变形而变化 受到影响 以及用于产生表示谐振元件的振荡频率的感测信号的第一电路装置。 其特性包括以下事实：谐振元件包括用于增加表示谐振元件的振荡频率的感测信号的强度的第二电路装置，第二电路装置与谐振元件的结构集成。