公开(公告)号：US08616059B2

公开(公告)日：2013-12-31

申请号：US13045934

申请日：2011-03-11

Applicant: Arnaud Walther ,  Guillaume Jourdan ,  Philippe Robert

Inventor： Arnaud Walther ,  Guillaume Jourdan ,  Philippe Robert

IPC: G01P15/097

CPC classification number: G01P15/123 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/051 ,  G01P15/0802

Abstract: A MEMS or NEMS device for detecting a force following a given direction, comprising a support and at least one seismic mass capable of moving under the effect of the force to be measured in the direction of the force, and a detector for detecting the movement of the seismic mass, the seismic mass being articulated relative to the support by at least one pivot link, and an actuator capable of varying the distance between the axis of the pivot link and the center of gravity of the exertion of the force on the seismic mass.

Abstract translation: 一种用于检测沿给定方向的力的MEMS或NEMS装置，包括支撑件和能够在力的方向上在待测量的力的作用下移动的至少一个地震块;以及检测器，用于检测 地震质量，相对于支撑件通过至少一个枢转连杆铰接的地震质量，以及能够改变枢轴连杆的轴线与地震质量上的力的重心之间的距离的致动器 。

公开(公告)号：US20130000411A1

公开(公告)日：2013-01-03

申请号：US13538143

申请日：2012-06-29

Applicant: Philippe ROBERT ,  Guillaume JOURDAN

Inventor： Philippe ROBERT ,  Guillaume JOURDAN

IPC: G01L7/08 ,  G01L9/12

CPC classification number: G01L9/0052 ,  B81B2203/0127 ,  B81B2203/0154 ,  B81B2203/0307 ,  B81B2203/053 ,  G01L9/001 ,  G01L9/0019 ,  G01L9/006 ,  G01L9/0073

Abstract: A MEMS and/or NEMS pressure measurement device comprising a deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, detection means with strain gauges for the deformation of the membrane, said detection means being formed on a substrate and a non-deformable arm, transmitting the deformation in an amplified manner of the membrane to the detection means, the arm being rotatably hinged to the substrate about an axis (Y) substantially parallel to the plane of the membrane and which is integral with the membrane so that it transmits a deformation of the membrane to the detection means in an amplified manner.

Abstract translation: 一种MEMS和/或NEMS压力测量装置，其包括悬挂在基板上的可变形膜，所述膜的一个表面旨在经受待测量的压力，具有用于膜变形的应变计的检测装置， 检测装置形成在基板和不可变形臂上，将膜的放大方式的变形传递到检测装置，臂可旋转地铰接到基板上，绕轴线（Y）大致平行于 膜，并且其与膜成一体，使得其以放大的方式将膜的变形传递到检测装置。

公开(公告)号：US09157821B2

公开(公告)日：2015-10-13

申请号：US13538143

申请日：2012-06-29

Applicant: Philippe Robert ,  Guillaume Jourdan

Inventor： Philippe Robert ,  Guillaume Jourdan

IPC: B81B7/00 ,  G01L9/00

CPC classification number: G01L9/0052 ,  B81B2203/0127 ,  B81B2203/0154 ,  B81B2203/0307 ,  B81B2203/053 ,  G01L9/001 ,  G01L9/0019 ,  G01L9/006 ,  G01L9/0073

Abstract: A MEMS and/or NEMS pressure measurement device includes a deformable membrane suspended on a substrate, one of the faces of the membrane configured to be subjected to a pressure to be measured, a detector configured to detect deformation of the membrane and being provided at least partly on the substrate; and a non-deformable transmission device configured to transmit the deformation of the membrane to the detector, said transmission device rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to said one of the faces, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.

Abstract translation: MEMS和/或NEMS压力测量装置包括悬挂在基板上的可变形膜，膜的一个面被配置为经受待测量的压力，检测器被配置为检测膜的变形并且至少提供 部分在基材上; 以及不可变形传动装置，其被配置为将所述膜的变形传递到所述检测器，所述传动装置围绕基本上平行于所述膜的平面的轴线可旋转地铰接到所述基板，并且面向所述膜的与所述膜的相对的另一个面 一个表面，使得至少超过给定压力，所述传输装置和膜彼此可移动地一体化，并且使得传动装置以放大的方式将变形或应力从变形传递到检测器 的膜。

公开(公告)号：US20110219875A1

公开(公告)日：2011-09-15

申请号：US13045934

申请日：2011-03-11

Applicant: Arnaud WALTHER ,  Guillaume JOURDAN ,  Philippe ROBERT

Inventor： Arnaud WALTHER ,  Guillaume JOURDAN ,  Philippe ROBERT

IPC: G01P15/02 ,  G01P15/125 ,  G01P15/09 ,  G01P15/105 ,  G01P15/12 ,  G01P15/097

CPC classification number: G01P15/123 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/051 ,  G01P15/0802

Abstract: A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured in the direction of said force, and means (10) for detecting the movement of said seismic mass (2), said seismic mass being articulated relative to the support by at least one pivot link, and means capable of varying the distance between the axis (Z) of the pivot link and the center of gravity (G) of the exertion of the force on said seismic mass.

Abstract translation: 一种用于检测沿给定方向的力的MEMS或NEMS装置，包括支撑件（4）和能够在所述力的方向上在待测量力的作用下移动的至少一个地震块（2），以及装置 （10），用于检测所述地震块（2）的运动，所述地震质量通过至少一个枢轴连杆相对于所述支撑件铰接，以及能够改变所述枢转连杆的轴线（Z）与所述支架之间的距离的装置 重力（G）对所述地震块的力的作用。