MEMS strain gauge pressure sensor with mechanical symmetries

    公开(公告)号:US11879800B2

    公开(公告)日:2024-01-23

    申请号:US17216049

    申请日:2021-03-29

    发明人: Jun Zheng

    IPC分类号: G01L9/00 B81B7/00

    摘要: A microelectromechanical system (MEMS) strain gauge pressure sensor includes a top wafer stack having a top surface and a first cavity that is configured to receive a first fluid at a first pressure, a backing wafer having a bottom surface opposite the top surface of the top wafer stack; a diaphragm wafer positioned between the top wafer stack and the backing wafer and having a second cavity that is configured to receive a second fluid at a second pressure, and a pedestal connected laterally to the top wafer stack, the backing wafer, and the diaphragm wafer. The diaphragm wafer includes a diaphragm extending between the first cavity and the second cavity, and a resistor positioned on the diaphragm. The MEMS strain gauge pressure sensor has a central axis such that the MEMS strain gauge pressure sensor has mechanical symmetries about the central axis.

    Pressure sensor
    6.
    发明授权

    公开(公告)号:US10060815B2

    公开(公告)日:2018-08-28

    申请号:US15035838

    申请日:2014-11-12

    摘要: In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed. The pressure sensor is a pressure sensor obtained by arranging, on a diaphragm having a long side and a short side, a sensor chip in which four strain gauges having the same characteristic and constituting a bridge circuit are provided, the pressure sensor being for detecting, in the bridge circuit, voltage output that is in proportion to a pressure applied to the diaphragm, and the pressure sensor is configured as follows: the four strain gauges are arranged to be adjacent to one another in the vicinity of the center of the diaphragm so that two strain gauges are arranged along the short side and the other two strain gauges are arranged along the long side; and the diaphragm has a thin portion in a long-side direction seen from the sensor chip.

    Piezoresistive Pressure Sensor Provided With A Calibration Resistor Of The Offset

    公开(公告)号:US20180038753A1

    公开(公告)日:2018-02-08

    申请号:US15665584

    申请日:2017-08-01

    IPC分类号: G01L9/00 G01L27/00

    摘要: The piezoresistive pressure sensor (1) comprises a rigid flat support (2), a flat flexible membrane (3) having a flat external face (4) exposed to a pressure of a fluid and a flat internal face (5) delimiting in cooperation with a flat internal face (7) of the support (2) a chamber (9) accommodating the deformation of the membrane (3), an electrical measuring circuit comprising a resistive Wheatstone bridge (10) applied on the flat internal face (5) of the membrane (3) for detecting the deformation of the membrane (3), and at least an electrical resistor (Rc) for calibrating the value of the output signal when the fluid is at a reference pressure, the calibration resistor (Rc) being applied on the flat internal face (5) of the membrane (3).

    PRESSURE SENSOR
    9.
    发明申请
    PRESSURE SENSOR 审中-公开

    公开(公告)号:US20180010975A1

    公开(公告)日:2018-01-11

    申请号:US15638734

    申请日:2017-06-30

    申请人: Azbil Corporation

    IPC分类号: G01L9/00 G01L13/02 G01L19/14

    摘要: To suppress variations in the shift amount of the zero point of a sensor output when a pipe is connected to a pressure sensor via a clamp. A pressure sensor includes two semiconductor chips in two straight lines, orthogonal to each other, that pass through a center of a diaphragm in plan view, two resistors in the region between two supporting members supporting one semiconductor chip, and two other resistors in the region between two other supporting members supporting the other semiconductor chip.