Self-calibrating optical turbidity measuring apparatus

    公开(公告)号:US12038378B2

    公开(公告)日:2024-07-16

    申请号:US17566076

    申请日:2021-12-30

    申请人: ABB Schweiz AG

    IPC分类号: G01N21/51 G01N21/47

    CPC分类号: G01N21/51 G01N21/4785

    摘要: A system and method for self-calibrating optical turbidity measurements includes a housing comprising a cavity with an inner wall having an essentially straight section and an opening for the medium. An optical standard is moveable between first and second sections within the essentially straight section, and a light source and a light sensor, arranged at the first section and configured to measure the turbidity of the medium, when the optical standard is at the second section, and configured to measure the turbidity of the optical standard and to determine, as a function of the measured turbidity, a calibration coefficient for performing a self-calibration, when the optical standard is at the first section.

    COMBINED IMAGING AND SCATTEROMETRY METROLOGY

    公开(公告)号:US20190250521A1

    公开(公告)日:2019-08-15

    申请号:US16398175

    申请日:2019-04-29

    IPC分类号: G03F7/20 G01N21/95 G01N21/47

    摘要: Metrology targets, design files, and design and production methods thereof are provided. The targets comprise two or more parallel periodic structures at respective layers, wherein a predetermined offset is introduced between the periodic structures, for example, opposite offsets at different parts of a target. Quality metrics are designed to estimate the unintentional overlay from measurements of a same metrology parameter by two or more alternative measurement algorithms. Target parameters are configured to enable both imaging and scatterometry measurements and enhance the metrology measurements by the use of both methods on the same targets. Imaging and scatterometry target parts may share elements or have common element dimensions. Imaging and scatterometry target parts may be combined into a single target area or may be integrated into a hybrid target using a specified geometric arrangement.

    VIAL AND CAP FOR TURBIDITY STANDARD

    公开(公告)号:US20180113067A1

    公开(公告)日:2018-04-26

    申请号:US15486125

    申请日:2017-04-12

    申请人: Hach Company

    IPC分类号: G01N21/03 G01N21/51

    摘要: An embodiment provides a turbidimeter standard ampule, including: a main part composed of glass and containing therein a formazin solution comprising a formazine polymer diluted in a solvent; the main part including a lens positioned in a bottom edge thereof and permitting entry of light from a turbidimeter; the main part having glass sides and permitting redirected light to exit the glass sides for detection by a photodetector of the turbidimeter; an upper part composed of glass and being attached to the main part; and an opaque cap on the upper part, the opaque cap blocking light from entering the upper part of the ampule. Other embodiments are described and claimed.