Spectral, polar and spectral-polar imagers for use in space situational awareness

    公开(公告)号:US09835491B1

    公开(公告)日:2017-12-05

    申请号:US13900768

    申请日:2013-05-23

    IPC分类号: G01J3/02

    摘要: An imager for imaging a plurality of images of a single scene over a plurality of disparate electromagnetic wavelength sets includes front-end optics for outputting a polychromatic, collimated image beam of the scene; a beam displacer configured for splitting the collimated image beam into spatially displaced, mutually parallel beams, and an imaging-sensor array configured for registration of the spatially displaced wavelength sets at disparate locations along the imaging-sensor array. In alternative versions, the beam displacer displaces constituent light beams based on at least one of wavelength and polarization. In various implementations, a back-end focusing element focuses each constituent beam onto a predetermined location along the imaging-sensor array. The imaging-sensor array is optimally configured for simultaneous sampling of the plural images focused thereupon by the back-end focusing elements.

    Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same
    9.
    发明授权
    Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same 有权
    旋转元件分光椭偏仪和旋转元件分光椭偏仪的测量精度预测方法,用于执行旋转元件分光椭偏仪的记录介质存储程序和存储在用于执行该程序的介质中的计算机程序

    公开(公告)号:US09581498B2

    公开(公告)日:2017-02-28

    申请号:US14969096

    申请日:2015-12-15

    摘要: Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.

    摘要翻译: 本发明提供了一种旋转元件分光椭偏仪和旋转元件分光椭偏仪的精度预测方法,用于执行旋转元件分光椭偏仪的记录介质存储程序以及存储在其执行介质的计算机程序, 旋转元件分光椭偏仪和用于测量旋转元件分光椭偏仪的精度预测的方法,其能够基于关于样品的椭偏参数的标准偏差的理论等式计算旋转元件分光椭偏仪的测量精度,记录 用于执行该存储程序的介质存储程序和存储在用于执行该程序的介质中的计算机程序。