公开(公告)号：US09395173B2

公开(公告)日：2016-07-19

申请号：US14521440

申请日：2014-10-22

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Ming-Hsing Shen ,  Wei-Chung Wang ,  Chi-Hung Huang ,  Jyh-Rou Sze ,  Chun-Li Chang

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/447

CPC classification number: G01B9/02042 ,  G01B9/02044 ,  G01B9/0209 ,  G01J3/447 ,  G01J3/45 ,  G02B21/0024

Abstract: The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Abstract translation: 传统的白光干涉仪，共聚焦显微镜和椭偏仪被集成为功能意义上的一个装置，并且可以在集成装置上推导传统测量的几何参数。 因此，与现有技术相比，可以确保设备成本节省，在线测量，快速监测，缩短制造时间以及减少制造过程中物体损坏可能性的优点和功效。

公开(公告)号：US10126472B2

公开(公告)日：2018-11-13

申请号：US15256715

申请日：2016-09-05

Applicant: National Applied Research Laboratories

Inventor： Jyh-Rou Sze ,  Po-Jui Chen ,  Chun-Fu Lin

IPC: G01J1/08 ,  G02B5/18 ,  G02B17/00 ,  G02B27/30 ,  G02B27/42 ,  G02B27/10 ,  G01J3/02 ,  G01J3/18

Abstract: A multi-band spectrum division device is provided, comprising: a first parabolic reflection mirror, planar multi-mirrors, an optical grating and a second parabolic mirror. The first parabolic mirror is configured to reduce the divergent angle of incident optical beam, and to generate a collimated optical beam. The planar multi-mirrors are configured to adjust the incident angles of collimated beam on the grating surface. The grating is configured to disperse the incident signals with multi-wavelengths. The second parabolic mirror is configured to focus the multi-wavelength signals on its focal plane. Besides, each of the planar multi-mirrors has different location and angle in this device.