DEVICE AND METHOD FOR OPTICAL INSPECTION OF A SAMPLE
    2.
    发明申请
    DEVICE AND METHOD FOR OPTICAL INSPECTION OF A SAMPLE 审中-公开
    用于光学检测样品的装置和方法

    公开(公告)号:US20150002848A1

    公开(公告)日:2015-01-01

    申请号:US14372093

    申请日:2013-01-15

    Abstract: Method and device for optical inspection of a sample using spectral interferometry, wherein a beam (2″) emitted by a radiation source (1) is directed onto the sample (5) and a reference beam (2′) is directed onto a reference sample (4), and the spectral interference of both beams after being reflected on the samples or after passing the samples is recorded by means of a spectrograph (6); the interferogram I(ω) thus obtained is numerically derived with respect to the angular frequency ω. For the function I′(ω) thus obtained the zeros ωi are calculated numerically as solutions to the equation I′(ω)=0 and the frequency-dependent group delay τ(ω) is then calculated from the zeros ωi according to the equation τ(ωn)=π/(ωi+1−ωi), wherein i=1, 2 . . . and ωn=(ωi+1+ωi)2.

    Abstract translation: 用于使用光谱干涉测量法对样品进行光学检查的方法和装置,其中由辐射源(1)发射的光束(2“)被引导到样品(5)上,并且参考光束(2')被引导到参考样品 (4),并且两个光束在样品上反射之后或在通过样品之后的光谱干涉通过光谱仪(6)记录; 这样获得的干涉图I(ω)相对于角频率ω被数值地导出。 对于由此获得的函数I'(ω),零数值被计算为等式I'(ω)= 0的解,并且然后根据等式从零的ωi计算频率相关组延迟τ(ω) τ(ωn)=&pgr; /(ωi+ 1-ωi),其中i = 1,2。 。 。 和ωn=(ωi+ 1 +ωi)2。

    RADIO FREQUENCY TAGGING OPTICAL SPECTROMETER AND METHOD FOR MEASUREMENTS OF OPTICAL SPECTRA

    公开(公告)号:US20230152156A1

    公开(公告)日:2023-05-18

    申请号:US18092394

    申请日:2023-01-02

    Inventor: Quan LIU

    CPC classification number: G01J3/45 G01J3/0208 G01J3/021 G01J3/18 G01J2003/451

    Abstract: The present disclosure provides a radio frequency tagging optical spectrometer, comprising: a dynamic dispersion device, the dynamic dispersion device receiving a beam comprising more than two wavelength components and being driven by driving radio frequency signals, and the dynamic dispersion device encoding the intensity of each wavelength component into the amplitude of a different beat radio frequency signal based on different driving radio frequency signals, wherein the beat frequency of the different beat radio frequency signal is equal to the frequency of the corresponding driving radio frequency signal; a single-channel photodetector for detecting the sum of beat radio frequency signals formed by adding all the beat radio frequency signals; and a processing unit for performing Fourier transform on the sum of the beat radio frequency signals to obtain a spectrum or an associated radio frequency spectrum by which the optical spectrum is obtained.

    Systems and Methods for Spatial Heterodyne Raman Spectroscopy
    6.
    发明申请
    Systems and Methods for Spatial Heterodyne Raman Spectroscopy 有权
    空间异步拉曼光谱系统与方法

    公开(公告)号:US20140247447A1

    公开(公告)日:2014-09-04

    申请号:US14067244

    申请日:2013-10-30

    CPC classification number: G01J3/44 G01J3/14 G01J3/4531 G01J2003/451 G01N21/65

    Abstract: The present subject matter is directed to a device for spectroscopy. The device includes an excitation source and a first spatial heterodyne interferometer configured to receive wavelengths from the excitation source and filter the wavelengths to produce fringes on a sample. The device also includes a second heterodyne interferometer configured to receive Raman wavelengths from the sample.

    Abstract translation: 本发明涉及用于光谱学的装置。 该装置包括激发源和第一空间外差干涉仪,其被配置为从激发源接收波长并滤波波长以在样本上产生条纹。 该装置还包括配置成从样品接收拉曼波长的第二外差干涉仪。

    INTERFEROMETERY ON A PLANAR SUBSTRATE
    7.
    发明申请
    INTERFEROMETERY ON A PLANAR SUBSTRATE 审中-公开
    平面基板上的干涉仪

    公开(公告)号:US20140125983A1

    公开(公告)日:2014-05-08

    申请号:US14122773

    申请日:2012-05-30

    Abstract: An interferometer comprising a planar substrate is provided. The interferometer has a splitter formed on the planar substrate to split a received optical signal, a sample arm formed on the planar substrate to receive a first portion of the split optical signal and direct the first portion toward a sample, a reference arm formed on the planar substrate to receive a second portion of the split optical signal, and a detector element to receive an interferogram generated by interfering the second portion of the split optical signal with a received sample signal generated by the first portion of the split signal interacting with the sample.

    Abstract translation: 提供了包括平面基板的干涉仪。 所述干涉仪具有形成在所述平面基板上以分裂接收到的光信号的分离器,形成在所述平面基板上的样本臂,以接收所述分割光信号的第一部分并将所述第一部分引向样本, 平面基板以接收分离光信号的第二部分,以及检测器元件,用于接收通过将分离光信号的第二部分与由样本相互作用的分离信号的第一部分产生的接收采样信号而产生的干涉图 。

    Spatial heterodyne spectrometer and method
    8.
    发明授权
    Spatial heterodyne spectrometer and method 失效
    空间异质光谱仪和方法

    公开(公告)号:US5059027A

    公开(公告)日:1991-10-22

    申请号:US336068

    申请日:1989-04-11

    CPC classification number: G01J3/453 G01J2003/451 G01J2009/0219

    Abstract: A spatial heterodyne spectrometer has a two beam dispersive interferometer which includes a diffraction grating as a beam splitter/combiner. An incoming beam is collimated and passed to the grating in the interferometer where it is split into two beams which are recombined such that the angle between the wavefronts in the recombined beam at a particular wavelength is directly related to the deviation of that wavelength from a null wavelength at which the wavefronts are parallel. The recombined output beam is focused and imaged to produce Fizeau fringes across the output aperture, with these fringes being recorded on an imaging detector. The spatially varying intensity output of the imaging detector is Fourier transformed to yield an output indicative of the spectral frequency content of the image which is related to the wavelength content of the incoming beam from the source.

    Abstract translation: 空间外差光谱仪具有双光束色散干涉仪,其包括作为分束器/组合器的衍射光栅。 入射光束被准直并传递到干涉仪中的光栅,其中它被分裂成两个光束,其被重新组合,使得在特定波长处的重新组合光束中的波前之间的角度与该波长与零点的偏差直接相关 波前平行的波长。 重新组合的输出光束被聚焦和成像,以在输出孔径上产生Fizeau条纹,这些条纹被记录在成像检测器上。 对成像检测器的空间变化的强度输出进行傅里叶变换,以产生指示与来自源的入射波束的波长内容相关的图像的频谱频率内容的输出。

    DEVICE AND METHOD FOR ONLINE MEASURING SPECTRUM FOR LASER DEVICE

    公开(公告)号:US20230194348A1

    公开(公告)日:2023-06-22

    申请号:US17915388

    申请日:2020-12-16

    CPC classification number: G01J3/45 G01J3/021 G01J2003/451

    Abstract: Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15). A high precision measurement in a wide range for a central wavelength of a laser beam and an accurate measurement for spectral parameters of a corresponding FWHM and E95 are achieved through an arrangement of the FP etalon and the grating “in series” in the measurement optical path. There is no moving element in the measurement optical path, the structure is simple and compact, the measurement precision is high, and the stability is high. The corresponding measurement algorithm is simple and efficient, and has an extremely high scientific research or commercial application value.

    Method and apparatus for femtosecond laser pulse measurement based on transient-grating effect
    10.
    发明授权
    Method and apparatus for femtosecond laser pulse measurement based on transient-grating effect 有权
    基于瞬态光栅效应的飞秒激光脉冲测量方法和装置

    公开(公告)号:US09488525B2

    公开(公告)日:2016-11-08

    申请号:US14466861

    申请日:2014-08-22

    Abstract: Apparatuses and method for real-time measuring ultrashort pulse shape and pulse width. Transient-grating effect on a transparent optical medium is used to generate a reference beam. A black plate with four equal-sized holes divides the incoming laser beam into four beams, one of which is attenuated and introduced an appropriate time delay relative to the other three. The four laser beams pass through a concave mirror and are focused onto a nonlinear transparent optical medium. The three beams without attenuation are used to generate a transient-grating light in the transparent medium. The transient-grating light is collinear and overlapped with the fourth attenuated beam. According to the third-order nonlinear effect, the transient-grating light has a broader spectral bandwidth and more smooth spectrum phase with respect to the incident laser. By measuring the spectral interference, the spectrum and spectral phase may be retrieved by spectral interferometry.

    Abstract translation: 用于实时测量超短脉冲形状和脉冲宽度的装置和方法。 使用透明光学介质上的瞬态光栅效应来产生参考光束。 具有四个相等尺寸孔的黑色板将入射激光束分成四个光束,其中一个光束被衰减并且相对于其他三个光束引入适当的时间延迟。 四个激光束通过凹面镜并聚焦到非线性透明光学介质上。 不使用衰减的三个光束用于在透明介质中产生瞬时光栅光。 瞬态光栅光线与第四衰减光束共线并重叠。 根据三阶非线性效应,瞬态光栅光具有相对于入射激光器的更宽的光谱带宽和更平滑的光谱相位。 通过测量光谱干涉,光谱和光谱相位可以通过光谱干涉测量来检索。

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