THERMAL FLUID FLOW SENSOR
    8.
    发明申请

    公开(公告)号:US20170328754A1

    公开(公告)日:2017-11-16

    申请号:US15535179

    申请日:2015-11-26

    CPC classification number: G01F1/6845 B81B1/00 G01F1/692

    Abstract: Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concave portion in an interlayer insulating film in the detection section and forming the insulating film having a tensile stress thereon. As a means thereof, stair-like step is provided in a side wall of a concave portion, formed in the interlayer insulating film on a diaphragm. Accordingly, each depth of a first concave portion and a second concave portion, which form the concave portion, is reduced, and coatability of the insulating film for the stress adjustment, which covers a side wall and a bottom face of the concave portion, is improved.

    Autofocus camera using MEMS actuation of image sensor

    公开(公告)号:US09813602B2

    公开(公告)日:2017-11-07

    申请号:US14979138

    申请日:2015-12-22

    Abstract: A miniature camera module that achieves autofocus (AF) by applying actuation to the image sensor using MEMS (Micro Electro Mechanical System) actuators comprising of a piston-tube electrostatic actuators. The camera comprises of a MEMS piston-tube actuator, an image sensor die, an IC package, a housing, and a lens barrel. The image sensor die is attached and is electrically bonded to the moving rotor of the MEMS electrostatic piston-tube actuator, which is, in turn, attached and electrically bonded to a semiconductor device package. The packaged piston-tube actuator with the image sensor attached to it is covered with a transparent protection lid which could be an IR filter.

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