公开(公告)号：US20160343637A1

公开(公告)日：2016-11-24

申请号：US15156774

申请日：2016-05-17

申请人： Ekaterina AXELROD ,  Eran FINE ,  Shlomo OREN ,  Ziv HERMON

发明人： Ekaterina AXELROD ,  Eran FINE ,  Shlomo OREN ,  Ziv HERMON

IPC分类号： H01L23/367 ,  B23P15/26 ,  H01L23/498 ,  H05K7/20

CPC分类号： H01L23/3675 ,  B81B7/0093 ,  H01L23/467 ,  H01L23/49816 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2924/15311 ,  H01L2924/00

摘要： In various embodiments, component-level and product-level devices incorporated one or more low-profile cooling devices for dissipating heat. The low-profile cooling devices may include multiple benders arranged on a substrate. The benders are actuated so as to cause movement thereof, thereby producing an air flow.

摘要翻译： 在各种实施例中，组件级和产品级设备结合有一个或多个低轮廓冷却装置来散热。 低轮廓冷却装置可以包括布置在基板上的多个弯曲器。 弯曲器被致动以引起其运动，从而产生空气流。

公开(公告)号：US09233838B2

公开(公告)日：2016-01-12

申请号：US14509183

申请日：2014-10-08

申请人： General Electric Company

发明人： Mehmet Arik ,  Stanton Earl Weaver

IPC分类号： F04B17/03 ,  B81B7/00 ,  F04B45/047 ,  H01L23/467 ,  B81C1/00 ,  H01L41/09

CPC分类号： B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

摘要： A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

公开(公告)号：US20100052112A1

公开(公告)日：2010-03-04

申请号：US12418071

申请日：2009-04-03

申请人： John A. ROGERS ,  Tae Ho KIM ,  Won Mook CHOI ,  Dae Hyeong KIM ,  Matthew MEITL ,  Etienne MENARD ,  John CARLISLE

发明人： John A. ROGERS ,  Tae Ho KIM ,  Won Mook CHOI ,  Dae Hyeong KIM ,  Matthew MEITL ,  Etienne MENARD ,  John CARLISLE

IPC分类号： H01L29/06 ,  H01L21/20 ,  B05D5/12

CPC分类号： H01L21/20 ,  B81B7/0093 ,  B81C1/0038 ,  B81C2201/0191 ,  H01L23/3732 ,  H01L2924/0002 ,  H01L2924/00

摘要： Various heat-sinked components and methods of making heat-sinked components are disclosed where diamond in thermal contact with one or more heat-generating components are capable of dissipating heat, thereby providing thermally-regulated components. Thermally conductive diamond is provided in patterns capable of providing efficient and maximum heat transfer away from components that may be susceptible to damage by elevated temperatures. The devices and methods are used to cool flexible electronics, integrated circuits and other complex electronics that tend to generate significant heat. Also provided are methods of making printable diamond patterns that can be used in a range of devices and device components.

摘要翻译： 公开了各种散热部件和制造散热部件的方法，其中与一个或多个发热部件热接触的金刚石能够散热，从而提供热调节部件。 导热金刚石以能够提供有效和最大的热传递的图案提供，远离可能易受高温损坏的部件。 这些器件和方法用于冷却易于产生显着热量的柔性电子器件，集成电路和其他复杂电子器件。 还提供了制造可在一系列装置和装置部件中使用的可印刷金刚石图案的方法。

公开(公告)号：US09711432B2

公开(公告)日：2017-07-18

申请号：US15110026

申请日：2015-01-07

申请人： SAFRAN ELECTRONICS & DEFENSE

发明人： Jean-Christophe Riou

IPC分类号： H01L23/495 ,  H01L23/44 ,  H05K7/20 ,  H01L23/00 ,  B81B7/00 ,  H01L23/06 ,  H01L23/367 ,  H01L23/373 ,  H01L25/07

CPC分类号： H01L23/44 ,  B81B7/0093 ,  B81B2201/01 ,  H01L23/06 ,  H01L23/3675 ,  H01L23/3736 ,  H01L23/49541 ,  H01L23/49568 ,  H01L24/48 ,  H01L24/73 ,  H01L25/074 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01013 ,  H01L2924/01022 ,  H01L2924/01026 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/10272 ,  H01L2924/1033 ,  H01L2924/13055 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/19107 ,  H05K7/20236 ,  H05K7/20927 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099 ,  H01L2224/85399 ,  H01L2224/05599

摘要： An electronic device comprising at least one electronic component mounted on a support and surrounded by a deformable casing containing a heat-conducting and electrically-insulating liquid, the device comprising a heat dissipation plate that is substantially parallel to the support and spaced apart therefrom, and heat exchange means for heat exchange by conduction between the casing and the plate, the heat-conducting and electrically-insulating liquid being selected and the casing being arranged so that thermal expansion of the oil leads to the casing applying force against the means for heat exchange by conduction.

公开(公告)号：US09260289B2

公开(公告)日：2016-02-16

申请号：US14016699

申请日：2013-09-03

申请人： Jae I. Park

发明人： Jae I. Park

IPC分类号： B81B3/00 ,  H01L29/06 ,  B81B7/00 ,  G02B6/00 ,  B82Y20/00

CPC分类号： B81B3/0029 ,  B81B3/0021 ,  B81B7/0093 ,  B81B2201/0292 ,  B81B2201/047 ,  B82Y20/00 ,  G02B6/00 ,  G02B6/1225 ,  G02B6/1228

摘要： An optical-microwave-quantum transducer can include a tapered optical fiber configured to transmit and receive optical signals. The optical-microwave-quantum transducer can also include a cantilever that can include an optical cavity that includes a nanophotonic crystal. The optical cavity can be configured to provide mechanical excitation in response to electromagnetic excitation induced by photons emitted from the tapered optical fiber. The cantilever can also include a mechanical coupler that is configured to induce electrical modulation onto a superconducting cavity in response to the mechanical excitation. The mechanical coupler can also be configured to provide mechanical excitation in response to electromagnetic excitation induced by photons from the superconducting cavity. The optical cavity can further be configured to provide electromagnetic excitation that induces optical modulation on the tapered optical fiber in response to the mechanical excitation.

摘要翻译： 光学微波量子换能器可以包括配置成发送和接收光信号的锥形光纤。 光学微波量子换能器还可以包括悬臂，其可以包括包括纳米光子晶体的光学腔。 光腔可以被配置为响应于从锥形光纤发射的光子引起的电磁激发而提供机械激励。 悬臂还可以包括机械耦合器，其被配置为响应于机械激励而在超导腔上引起电调制。 机械耦合器还可以被配置为响应于来自超导腔的光子引起的电磁激励而提供机械激励。 光腔可以进一步配置成提供响应于机械激励而在锥形光纤上引起光调制的电磁激励。

公开(公告)号：US09216899B2

公开(公告)日：2015-12-22

申请号：US13862616

申请日：2013-04-15

申请人： General Electric Company

发明人： Mehmet Arik ,  Stanton Earl Weaver

IPC分类号： F04B45/047 ,  B81B7/00 ,  H01L23/467 ,  B81C1/00 ,  H01L41/09

CPC分类号： B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

摘要： A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

摘要翻译： 微机电（MEM）合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底，使得第一开口形成在半导体衬底的第一表面中，并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜，其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸，以及一对致动器元件，其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。

公开(公告)号：US08802475B2

公开(公告)日：2014-08-12

申请号：US14186362

申请日：2014-02-21

申请人： Kaustubh Ravindra Nagarkar ,  Christopher Fred Keimel

发明人： Kaustubh Ravindra Nagarkar ,  Christopher Fred Keimel

IPC分类号： H01L21/00

CPC分类号： B81C1/00261 ,  B81B3/0081 ,  B81B7/0077 ,  B81B7/0093 ,  H01L21/56 ,  H01L23/10 ,  H01L23/3677 ,  H01L24/96 ,  H01L2224/16225 ,  H01L2924/01322 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/1461 ,  H01L2924/00

摘要： A method of fabricating a microelectronic device structure including increased thermal dissipation capabilities. The structure including a three-dimensional (3D) integrated chip assembly that is flip chip bonded to a substrate. The chip assembly including a device substrate including an active device disposed thereon. A cap layer is physically bonded to the device substrate to at least partially define a hermetic seal about the active device. The microelectronic device structure provides a plurality of heat dissipation paths therethrough to dissipate heat generated therein.

摘要翻译： 一种制造包括增加散热能力的微电子器件结构的方法。 该结构包括倒装芯片结合到基板的三维（3D）集成芯片组件。 芯片组件包括设置在其上的有源器件的器件衬底。 盖层物理地结合到器件衬底上，以至少部分地限定围绕有源器件的气密密封。 微电子器件结构提供穿过其中的多个散热路径来散发其中产生的热。

公开(公告)号：US20130230934A1

公开(公告)日：2013-09-05

申请号：US13862616

申请日：2013-04-15

申请人： GENERAL ELECTRIC COMPANY

发明人： Mehmet Arik ,  Stanton Earl Weaver

IPC分类号： B81C1/00

CPC分类号： B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

摘要： A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

公开(公告)号：US08164183B2

公开(公告)日：2012-04-24

申请号：US10580324

申请日：2004-11-12

申请人： Guillaume Bouche

发明人： Guillaume Bouche

IPC分类号： H01L23/34

CPC分类号： F04B43/043 ,  B81B7/0093 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0315 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

摘要翻译： 一种泵，具有：形成在绝缘基板内部的空腔，所述基板的上部位于具有边缘的所述空腔附近; 导电层，覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜，放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层，由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线，所述曝气线经由所述导电层中的开口而进入所述空腔， 用于在导电层和膜之间施加电压的端子。

公开(公告)号：US20070278663A1

公开(公告)日：2007-12-06

申请号：US10580324

申请日：2004-11-12

申请人： Guillaume Bouche

发明人： Guillaume Bouche

IPC分类号： H01L23/34 ,  H01L21/4763

CPC分类号： F04B43/043 ,  B81B7/0093 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0315 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

摘要翻译： 一种泵，具有：形成在绝缘基板内部的空腔，所述基板的上部位于具有边缘的所述空腔附近; 导电层，覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜，放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层，由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线，所述曝气线经由所述导电层中的开口而进入所述空腔， 用于在导电层和膜之间施加电压的端子。