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    Housing structure for mounting optical elements
    1.
    发明申请
    Housing structure for mounting optical elements 有权
    用于安装光学元件的外壳结构

    公开(公告)号：US20070165311A1

    公开(公告)日：2007-07-19

    申请号：US10597872

    申请日：2005-02-22

    申请人： Yim-Bun Kwan ,  Bernhard Geuppert ,  Nico Kemper

    发明人： Yim-Bun Kwan ,  Bernhard Geuppert ,  Nico Kemper

    IPC分类号： G02B7/02

    CPC分类号： G02B7/02 ,  G03F7/70833

    摘要： In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.

    摘要翻译： 在用于安装光学元件的壳体结构中，特别是用于制造半导体元件的投影曝光系统中的投影透镜壳体，具有用于连接到支撑结构的连接部件的附接位置设置在结构元件上。 具有用于连接到支撑结构的安装凸缘的支撑元件以这样的方式作用于结构元件，使得重力基本上被压力和剪切力占据。

    Structure for use in a projection exposure system for manufacturing semiconductors
    3.
    发明授权
    Structure for use in a projection exposure system for manufacturing semiconductors 有权
    用于制造半导体的投影曝光系统的结构

    公开(公告)号：US07692881B2

    公开(公告)日：2010-04-06

    申请号：US10597872

    申请日：2005-02-22

    申请人： Yim-Bun Patrick Kwan ,  Bernhard Geuppert ,  Nico Kemper

    发明人： Yim-Bun Patrick Kwan ,  Bernhard Geuppert ,  Nico Kemper

    IPC分类号： G02B7/02

    CPC分类号： G02B7/02 ,  G03F7/70833

    摘要： A structure for mounting an assembly of optical elements disposed within a housing, in particular of a projection lens assembly of a projection exposure system for manufacturing semiconductor elements includes a plurality of supporting elements, each respective one of which forms part of a respective one of a plurality of connections though which the housing of the assembly is connected to said supporting structure through which the weight of the assembly is transferred to the supporting structure in such a way that supporting forces generated by said supporting structure are taken up by pressure forces and shear forces which act on at least one of the supporting elements.

    摘要翻译： 用于安装设置在壳体内的光学元件的组件的结构，特别是用于制造半导体元件的投影曝光系统的投影透镜组件包括多个支撑元件，每个支撑元件各自形成一个 多个连接件，其中组件的壳体连接到所述支撑结构，组件的重量通过所述支撑结构传递到支撑结构，使得由所述支撑结构产生的支撑力被压力和剪切力所吸收 其作用于至少一个支撑元件。

    Optical projection system
    9.
    发明授权
    Optical projection system 有权
    光学投影系统

    公开(公告)号：US08300210B2

    公开(公告)日：2012-10-30

    申请号：US11664896

    申请日：2005-10-01

    申请人： Johannes Rau ,  Armin Schoeppach ,  Bernhard Gellrich ,  Jens Kugler ,  Martin Mahlmann ,  Bernhard Geuppert ,  Thomas Petasch ,  Gerhard Fuerter

    发明人： Johannes Rau ,  Armin Schoeppach ,  Bernhard Gellrich ,  Jens Kugler ,  Martin Mahlmann ,  Bernhard Geuppert ,  Thomas Petasch ,  Gerhard Fuerter

    IPC分类号： G03B27/54 ,  G03B27/42 ,  G02B7/02

    CPC分类号： G03F7/7015 ,  G02B7/00 ,  G02B7/008 ,  G02B7/021 ,  G02B7/028 ,  G02B7/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G03F7/70808 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/70883

    摘要： An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.

    摘要翻译： 提供了包括第一光学元件模块和至少一个第二光学元件模块的光学投影单元。 第一光学元件模块包括第一壳体单元和至少第一光学元件，第一光学元件被接收在第一壳体单元内并且具有限定第一光轴的光学使用的第一区域。 所述至少一个第二光学元件模块位于与所述第一光学元件模块相邻并且包括至少一个第二光学元件，所述第二光学元件限定所述光学投影单元的第二光轴。 第一壳体单元具有中心的第一壳体轴线和围绕第一壳体轴线在圆周方向上延伸的外壁。 第一光轴是相对于第一壳体轴线的横向偏移和倾斜中的至少一个。 此外，第一壳体轴线与第二光轴基本共线。