公开(公告)号：US20070165311A1

公开(公告)日：2007-07-19

申请号：US10597872

申请日：2005-02-22

申请人： Yim-Bun Kwan ,  Bernhard Geuppert ,  Nico Kemper

发明人： Yim-Bun Kwan ,  Bernhard Geuppert ,  Nico Kemper

IPC分类号： G02B7/02

CPC分类号： G02B7/02 ,  G03F7/70833

摘要： In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.

摘要翻译： 在用于安装光学元件的壳体结构中，特别是用于制造半导体元件的投影曝光系统中的投影透镜壳体，具有用于连接到支撑结构的连接部件的附接位置设置在结构元件上。 具有用于连接到支撑结构的安装凸缘的支撑元件以这样的方式作用于结构元件，使得重力基本上被压力和剪切力占据。

公开(公告)号：US07692881B2

公开(公告)日：2010-04-06

申请号：US10597872

申请日：2005-02-22

申请人： Yim-Bun Patrick Kwan ,  Bernhard Geuppert ,  Nico Kemper

发明人： Yim-Bun Patrick Kwan ,  Bernhard Geuppert ,  Nico Kemper

IPC分类号： G02B7/02

CPC分类号： G02B7/02 ,  G03F7/70833

摘要： A structure for mounting an assembly of optical elements disposed within a housing, in particular of a projection lens assembly of a projection exposure system for manufacturing semiconductor elements includes a plurality of supporting elements, each respective one of which forms part of a respective one of a plurality of connections though which the housing of the assembly is connected to said supporting structure through which the weight of the assembly is transferred to the supporting structure in such a way that supporting forces generated by said supporting structure are taken up by pressure forces and shear forces which act on at least one of the supporting elements.

摘要翻译： 用于安装设置在壳体内的光学元件的组件的结构，特别是用于制造半导体元件的投影曝光系统的投影透镜组件包括多个支撑元件，每个支撑元件各自形成一个 多个连接件，其中组件的壳体连接到所述支撑结构，组件的重量通过所述支撑结构传递到支撑结构，使得由所述支撑结构产生的支撑力被压力和剪切力所吸收 其作用于至少一个支撑元件。