发明申请
- 专利标题: Housing structure for mounting optical elements
- 专利标题(中): 用于安装光学元件的外壳结构
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申请号: US10597872申请日: 2005-02-22
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公开(公告)号: US20070165311A1公开(公告)日: 2007-07-19
- 发明人: Yim-Bun Kwan , Bernhard Geuppert , Nico Kemper
- 申请人: Yim-Bun Kwan , Bernhard Geuppert , Nico Kemper
- 优先权: DE102004009203.6 20040225
- 国际申请: PCT/EP05/01826 WO 20050222
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |