发明申请
US20070165311A1 Housing structure for mounting optical elements 有权
用于安装光学元件的外壳结构

  • 专利标题: Housing structure for mounting optical elements
  • 专利标题(中): 用于安装光学元件的外壳结构
  • 申请号: US10597872
    申请日: 2005-02-22
  • 公开(公告)号: US20070165311A1
    公开(公告)日: 2007-07-19
  • 发明人: Yim-Bun KwanBernhard GeuppertNico Kemper
  • 申请人: Yim-Bun KwanBernhard GeuppertNico Kemper
  • 优先权: DE102004009203.6 20040225
  • 国际申请: PCT/EP05/01826 WO 20050222
  • 主分类号: G02B7/02
  • IPC分类号: G02B7/02
Housing structure for mounting optical elements
摘要:
In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.
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