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    Electron beam apparatus for visualizing a displacement of an electric field
    2.
    发明授权
    Electron beam apparatus for visualizing a displacement of an electric field 有权
    用于可视化电场位移的电子束装置

    公开(公告)号：US09208994B2

    公开(公告)日：2015-12-08

    申请号：US13817086

    申请日：2011-07-07

    申请人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

    发明人： Takashi Ohshima ,  Michio Hatano ,  Hideo Morishita

    IPC分类号： G01N23/00 ,  H01J37/26 ,  H01J37/28

    CPC分类号： H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20221

    摘要： The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (6), and an optical system (2, 3) for converging a secondary electron beam (9) on the reflective plate (6), and the axial displacement adjusting means includes an incline rotation mechanism (8) for a sample stage (5). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens (3) and a sample (4) and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.

    摘要翻译： 本发明提供了一种电子束装置，包括用于使延迟电场的轴向位移可视化的装置和用于调节轴向位移的装置。 轴向位移可视化装置包括反射板（6）和用于会聚反射板（6）上的二次电子束（9）的光学系统（2,3），并且轴向位移调节装置包括倾斜旋转机构 （8）用于样品台（5）。 利用这种结构，在诸如SEM等的电子束装置中，存在由物镜（3）和样品（4）之间的电场的轴对称位移引起的视野位移的问题，并且不能测量次级 可以消除提供所需信息的电子和反射电子。

    Scanning electron microscope
    3.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US09029766B2

    公开(公告)日：2015-05-12

    申请号：US14241121

    申请日：2012-05-28

    申请人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

    发明人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

    IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/04

    CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

    摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

    摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

    Airbag
    4.
    发明授权
    Airbag 有权
    安全气囊

    公开(公告)号：US08651513B2

    公开(公告)日：2014-02-18

    申请号：US13579803

    申请日：2011-02-02

    申请人： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

    发明人： Masakazu Okamoto ,  Akifumi Hanawa ,  Takashi Ohshima

    IPC分类号： B60R21/20 ,  B60R21/206

    CPC分类号： B60R21/2171 ,  B60R21/206 ,  B60R21/2346 ,  B60R21/237

    摘要： An airbag having a cushion part defining an insertion hole that is positioned between first and second sewing lines provided to a base fabric and that is provided for the insertion of the inflator from an outside to an inside. A diffuser positioned within the cushion part and in which the inflator is inserted from the insertion hole. The diffuser has a tubular portion with a portion formed by folding layers of fabrics and being sewn to the base fabric along the first sewing line. The diffuser fabric of the tubular portion on a side adjacent to the base fabric being additionally sewn to the base fabric along a second sewing line. The diffuser includes a guide member 1 that extends and covers the insertion hole with a surface that continues from an inner surface of the diffuser. The guide member being sewn to the base fabric along the first sewing line.

    摘要翻译： 一种安全气囊，其具有限定插入孔的缓冲部件，所述插入孔位于设置在基布上的第一和第二缝合线之间，并且设置成用于将充气器从外部插入到内部。 位于缓冲部分内的扩散器，其中充气机从插入孔插入其中。 扩散器具有管状部分，其部分通过折叠织物层而形成，并且沿着第一缝合线缝合到基底织物。 在与基底织物相邻的一侧的管状部分的扩散织物，沿第二缝合线另外缝合到基底织物上。 扩散器包括引导构件1，该引导构件1从扩散器的内表面延伸并覆盖插入孔。 引导构件沿着第一缝合线缝合到基底织物上。

    ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE SAME
    5.
    发明申请
    ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE SAME 有权
    电子束装置和使用其的电子束应用装置

    公开(公告)号：US20110240855A1

    公开(公告)日：2011-10-06

    申请号：US13133947

    申请日：2009-12-04

    申请人： Takashi Ohshima ,  Satoshi Tomimatsu

    发明人： Takashi Ohshima ,  Satoshi Tomimatsu

    IPC分类号： H01J9/02 ,  H01J19/02 ,  H01J37/073

    CPC分类号： H01J37/28 ,  H01J37/065 ,  H01J37/075 ,  H01J37/256 ,  H01J2237/06316

    摘要： To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 μm and less than 1 μm, and the cone angle α of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

    摘要翻译： 为了获得能够在低加速电压下提供高分辨率并允许高速元素分布测量的SEM，包括Zr-O作为扩散源的SE电子源被成形为使得尖端的曲率半径r大于 0.5μm以上且小于1μm，顶端附近的3r〜8r的尖部附近的圆锥部的锥角α大于5°且小于（8 / r） °。 另一个SE电子源使用Ba-O，并且包括由烧结金属和含有氧化钡的钡扩散源组成的钡扩散供给装置。

    ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT
    6.
    发明申请
    ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT 审中-公开
    电子源，电子枪和电子显微镜装置和电子束光刻设备使用它

    公开(公告)号：US20110186735A1

    公开(公告)日：2011-08-04

    申请号：US13020098

    申请日：2011-02-03

    申请人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

    发明人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

    IPC分类号： G21K7/00 ,  B01J19/08 ,  H01J9/04

    CPC分类号： B01J19/08 ,  G21K7/00 ,  H01J9/04 ,  H01J2237/06316

    摘要： An electron source is implemented which has a lower work function of an electron emission surface, yields emitted electrons of a narrower energy bandwidth and higher current density, and lasts longer than existing Zr/O/W electron sources. Further, an electron microscope which yields an image of higher-resolution in a shorter time and an electron beam lithography device which yields higher throughput are also provided. The electron source comprises a needle-shaped electrode made of metal having its tip in a needle shape, a heating body which heats up the needle-shaped electrode, and a diffusion source capable of being heated up by the heating body and made of a mixture of barium composite containing oxygen and carbon particles.

    摘要翻译： 实现了具有较低的电子发射表面功函数的电子源，产生较窄的能带宽和较高电流密度的发射电子，并且比现有的Zr / O / W电子源持续时间更长。 此外，还提供了在更短时间内产生更高分辨率的图像的电子显微镜以及产生较高产量的电子束光刻装置。 电子源包括由针尖形状的金属构成的针状电极，加热针状电极的加热体和能够被加热体加热并由混合物构成的扩散源 的含有氧和碳颗粒的钡复合物。

    Condensation reaction by metal catalyst
    7.
    发明授权
    Condensation reaction by metal catalyst 有权
    金属催化剂的缩合反应

    公开(公告)号：US07888513B2

    公开(公告)日：2011-02-15

    申请号：US12085988

    申请日：2006-12-04

    申请人： Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

    发明人： Kazushi Mashima ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

    IPC分类号： C07F15/00 ,  C07D263/08 ,  C07D263/52

    CPC分类号： C07D263/12 ,  B01J31/2226 ,  B01J2531/26 ,  C07C53/18 ,  C07C231/02 ,  C07C253/30 ,  C07D263/10 ,  C07D263/14 ,  C07D263/52 ,  C07D413/06 ,  C07F3/003 ,  C07F7/1892 ,  C07F9/5022 ,  C07K1/088 ,  C07K1/10

    摘要： The invention relates to a method for producing an azoline compound represented by the general formula (3): wherein R1 represents an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; R3, R4, R5 and R6 may be the same or different and each represents a hydrogen atom, an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; two arbitrary groups selected from R3, R4, R5 and R6 may bond to each other to form a ring; and Z1 represents an oxygen atom, a sulfur atom or a selenium atom; comprising reacting a carboxylic acid or a carboxylic acid derivative represented by the general formula (1): R1CO2R2  (1) wherein R1 is as defined above; R2 represents a hydrogen atom, an optionally substituted alkyl group or an optionally substituted aryl group; and R1 and R2 may bond to each other to form a ring; with an aminochalcogenide represented by the general formula (2): wherein R3, R4, R5, R6 and Z1 are as defined above; in the presence of a compound containing a group 12 metal element in the periodic table.

    摘要翻译： 本发明涉及一种制备由通式（3）表示的唑啉化合物的方法：其中R1表示任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基， 取代的氨基甲酰基或任选取代的杂环基; R3，R4，R5和R6可以相同或不同，各自表示氢原子，任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基，取代的氨基甲酰基 基团或任选取代的杂环基团; 选自R3，R4，R5和R6中的两个任意基团可以彼此键合形成环; Z1表示氧原子，硫原子或硒原子; 包括使由通式（1）表示的羧酸或羧酸衍生物：R1CO2R2（1）其中R1如上定义; R2表示氢原子，任选取代的烷基或任选取代的芳基; 并且R 1和R 2可以彼此键合形成环; 与通式（2）表示的氨基硫族化物：其中R3，R4，R5，R6和Z1如上定义; 在含有元素周期表中第12族金属元素的化合物存在下进行。

    Charged particle beam system and method for evacuation of the system
    9.
    发明授权
    Charged particle beam system and method for evacuation of the system 有权
    带电粒子束系统和排气系统的方法

    公开(公告)号：US07781743B2

    公开(公告)日：2010-08-24

    申请号：US12127030

    申请日：2008-05-27

    申请人： Souichi Katagiri ,  Takashi Ohshima

    发明人： Souichi Katagiri ,  Takashi Ohshima

    IPC分类号： F04B37/02 ,  F04B37/14 ,  H01J37/301

    CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/3056 ,  H01J2237/182 ,  H01J2237/1825

    摘要： The present invention provides a charged particle beam system which can perform evacuation on an electron gun chamber or an ion-gun chamber having a non-evaporable getter pump in a short time and can maintain the ultra-high vacuum for a long time, and a technology of evacuation therefor. Provided is a charged particle beam system equipped with a charged particle optics which makes the charged particle beam emitted from a charged particle source incident on a sample and means of evacuation for evacuating the charged particle optics, characterized in that the evaporation means has: a vacuum vessel with a charged particle source disposed in the vessel; a non-evaporable getter pump which connects with the vacuum vessel through a vacuum pipe and evacuates the interior of the vacuum vessel as a subsidiary vacuum pump; a valve interposed in the vacuum pipe connecting between the vacuum vessel and the non-evaporable getter pump; a rough pumping port which is provided closer to the non-evaporable getter pump than the valve and performs rough pumping; an open and shut valve for opening and shutting the rough pumping port; and a main vacuum pump which is provided closer to the vacuum vessel than the valve and evacuates the interior of the vacuum vessel.

    摘要翻译： 本发明提供了一种带电粒子束系统，其能够在短时间内在具有不可蒸发的吸气泵的电子枪室或离子枪室上进行排气并且能够长时间保持超高真空， 撤离技术。 提供了一种装有带电粒子光学器件的带电粒子束系统，其使从入射到样品上的带电粒子源发射的带电粒子束和抽空装置用于抽空带电粒子光学器件，其特征在于，蒸发装置具有：真空 具有设置在容器中的带电粒子源的容器; 一个不可蒸发的吸气泵，通过一个真空管与真空容器相连，抽真空真空容器的内部作为辅助真空泵; 插入在真空容器和不可蒸发的吸气剂泵之间的真空管中的阀; 一个粗略的抽气口，比阀门更靠近不可蒸发的吸气泵，进行粗抽; 用于打开和关闭粗抽泵口的打开和关闭阀; 以及主真空泵，其设置成比阀更靠近真空容器并排空真空容器的内部。

    Schottky emission cathode and a method of stabilizing the same
    10.
    发明授权
    Schottky emission cathode and a method of stabilizing the same 失效
    肖特基发射阴极及其稳定方法

    公开(公告)号：US5616926A

    公开(公告)日：1997-04-01

    申请号：US509286

    申请日：1995-07-31

    申请人： Hiroyuki Shinada ,  Shingo Kimura ,  Katsuhiro Kuroda ,  Satoru Fukuhara ,  Takashi Ohshima

    发明人： Hiroyuki Shinada ,  Shingo Kimura ,  Katsuhiro Kuroda ,  Satoru Fukuhara ,  Takashi Ohshima

    IPC分类号： H01J1/304 ,  H01J3/02

    CPC分类号： H01J1/304 ,  H01J2201/317 ,  H01J2237/06316

    摘要： A Schottky emission cathode has a filament, a needle-shaped piece of single crystal refractory metal which is attached to the filament and has a flat crystal surface at a tip thereof, and an adsorbed layer including at least one kind of a metal other than the single crystal refractory metal on the flat crystal surface. The piece of single crystal refractory metal is heated by passing a current through the filament and electrons are extracted by an electric field applied on a tip of the needle-shaped piece of single crystal refractory metal. The tip of the needle-shaped piece of single crystal refractory metal as a radius of curvature of a value to produce an energy width among electrons extracted from the tip not exceeding a predetermined value when the electric field is sufficient to prevent the flat crystal surface from collapsing during operation of the cathode.

    摘要翻译： 肖特基发射阴极具有长丝，单晶耐火金属针形片，其附着于灯丝并且在其顶端具有平坦的晶体表面，并且包括至少一种金属以外的吸附层， 单晶难熔金属在平面晶面上。 通过使电流通过灯丝来加热单晶难熔金属片，并通过施加在针状单晶耐火金属片的尖端上的电场来提取电子。 针状单晶难熔金属片的尖端作为曲率半径值，以在电场足以防止平坦晶体表面产生从尖端提取的电子之间的能量不超过预定值时 在阴极运行期间塌陷。