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    Monochromator and radiation source with monochromator
    1.
    发明申请
    Monochromator and radiation source with monochromator 有权
    单色仪和辐射源

    公开(公告)号：US20080290273A1

    公开(公告)日：2008-11-27

    申请号：US12153455

    申请日：2008-05-20

    Applicant: Stephan Uhlemann

    Inventor： Stephan Uhlemann

    IPC: H01J47/00

    CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/26 ,  H01J49/48 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

    Abstract: A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the plane (5) of a selection aperture (6) to select charged particles of a desired energy interval (7) and at least one second deflection element (8, 9) with an electrostatic deflecting field (8′, 9′) which eliminates the dispersion (4) of the at least one first deflecting field (2′, 3′). A radiation source (17) comprises such a monochromator (1). High monchromatism without intensity contrasts caused by defects of the slit aperture is thereby achieved in that the deflection elements (2, 3, 8, 9) have a design other than spherically shaped and their electrodes (24, 25) are given a potential (φ+, φ−) such that the charged particles (xα, yβ) which virtually enter the image of the radiation source (17) at different respective angles (α, β) in different sections (x, y), are differently focused such that charged particles (xα, yβ) of one energy are point focused (10, 10′, 10″) exclusively in the plane (5) of the selection aperture (6), since zero-crossings (11, 12) of the deflections (A) of the charged particles (xα, yβ) of the different sections (x, y) only coincide there at the same axial position (z, E).

    Abstract translation: 用于带电粒子光学器件的单色仪（1），特别是用于电子显微镜的装置包括至少一个具有用于产生分散体（4）的静电偏转场（2'，3'）的第一偏转元件（2,3） 选择孔径（6）的平面（5）以选择具有期望能量间隔（7）的带电粒子和至少一个具有静电偏转场（8'，9'）的第二偏转元件（8,9） 所述至少一个第一偏转场（2'，3'）的色散（4）。 辐射源（17）包括这样的单色仪（1）。 因此，由于偏转元件（2,3,8,9）具有除球形之外的设计，并且它们的电极（24,25）被赋予电位（phi + ，phi），使得在不同部分（x，y）中以不同的相应角度（α，β）实际进入辐射源（17）的图像的带电粒子（xalpha，ybeta）被不同地聚焦，使得带电 一个能量的粒子（xalpha，ybeta）专门在选择孔径（6）的平面（5）中点聚焦（10,10'，10“），因为偏转的零交叉（11,12） A）的不同部分（x，y）的带电粒子（xalpha，ybeta）仅在相同的轴向位置（z，E）处重合。

    Corrector
    4.
    发明申请
    Corrector 有权
    校正者

    公开(公告)号：US20120153147A1

    公开(公告)日：2012-06-21

    申请号：US12973984

    申请日：2010-12-21

    Applicant: Joachim Zach ,  Stephan Uhlemann

    Inventor： Joachim Zach ,  Stephan Uhlemann

    IPC: H01J3/20 ,  H01J37/28

    CPC classification number: H01J37/153 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

    Abstract: A corrector (10) for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image (9) of the axial fundamental rays (xα, yβ) is produced in the quadrupole field (1′) of a first quadrupole element (1) and this quadrupole field (1′) is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are produced in the region of the center of the quadrupole fields (3′, 4′) of a third (3) and fourth multipole element (4) and there also, due to the setting of the quadrupole field (2′) of a second quadrupole element (2), the axial fundamental rays (xα, yβ) of the same section (x, y) as that, in which the intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are located, each exhibit a maximum.

    Abstract translation: 提出了一种用于电子显微镜的校正器（10），如果在四极场（1'）中产生轴向基本射线（xα，y＆bgr）的眩目中间图像（9），对于电源的波动较不敏感， ），并且该四极场（1'）被设置为使得在轴向中心的区域中产生离轴基波（xγ，yδ）的像散中间图像（12,13） 第三（3）和第四多极元件（4）的四极场（3'，4'），并且由于第二四极元件（2）的四极场（2'）的设定， 与偏轴基波（xγ，yδ）的中间图像（12,13）相同的部分（x，y）的基波（xα，y＆bgr）各自呈现最大值。

    Electrostatic corrector for eliminating the chromatic aberration of particle lenses
    6.
    发明授权
    Electrostatic corrector for eliminating the chromatic aberration of particle lenses 有权
    用于消除粒子透镜色差的静电校正器

    公开(公告)号：US06797962B1

    公开(公告)日：2004-09-28

    申请号：US10018193

    申请日：2002-03-05

    Applicant: Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbacker

    Inventor： Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbacker

    IPC: H01J314

    CPC classification number: H01J37/153 ,  H01J2237/1516

    Abstract: An electrostatic corrector for eliminating the chromatic aberration of particle lenses, includes a corrector having a straight optical axis and an electrostatic quadrupole for allocating to the objective lens. Two corrector pieces are positioned behind the quadrupole, along the optical axis in the direction of radiation. Each corrector piece has three electrical quadrupole fields with an overlying circular lens field. The quadrupole fields, however, are rotated 90° about the optical axis in relation to each other. This arrangement is adjusted so that the astigmatic first image of one sectional view lies in one corrector piece and the astigmatic first image perpendicular thereto, of the other sectional view, lies in the other corrector piece, with another electrostatic quadrupole being located on the output side.

    Abstract translation: 用于消除粒子透镜的色像差的静电校正器包括具有用于分配到物镜的直线光轴和静电四极杆的校正器。 两个校正件位于四极杆的后面，沿着辐射方向的光轴。 每个校正器具有三个具有上覆圆形透镜场的四极四极场。 然而，四极场相对于彼此绕光轴旋转90°。 调整这种布置，使得一个截面图的散光的第一图像位于一个校正件中，并且另一截面图垂直于其的象散的第一图像位于另一个校正件中，另一个静电四极杆位于输出侧 。

    Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope
    7.
    发明授权
    Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope 有权
    用于校正透镜中的三阶球面像差的装置，特别是电子显微镜的物镜

    公开(公告)号：US06605810B1

    公开(公告)日：2003-08-12

    申请号：US09601053

    申请日：2000-09-05

    Applicant: Maximilian Haider ,  Stephan Uhlemann

    Inventor： Maximilian Haider ,  Stephan Uhlemann

    IPC: H01J3710

    CPC classification number: H01J37/153

    Abstract: A device for correcting third-order spherical aberration in the objective lens of an electron microscope, including an objective lens and a correction device which is formed by two hexapoles and a round-lens doublet arranged therebetween having two round lenses with the same focal length, whereby a single round lens (3) is arranged between the objective lens (2) and the correction device (1) in such a way that a parallel optical path hits the correction device (1) and the coma-free plane (6) of the objective lens is represented on the plane of the first hexapole (8) of the correction device (1) or two round lenses with different focal lengths are arranged between the objective lens and the correction device, whereby the distance between the round lens (14) close to the objective and the coma-free plane (16) of the objective and the distance between the round lens (15) close to the correction device and the coma-free plane (17) of the correction device is the same is terms of focal length and the distance between both round lenses (14, 15) is equal to the sum of their focal lengths.

    Abstract translation: 一种用于校正电子显微镜的物镜中的三阶球面像差的装置，包括物镜和由两个六极体形成的校正装置和设置在其间的圆形透镜双面镜，具有两个具有相同焦距的圆形透镜， 由此在物镜（2）和校正装置（1）之间设置单个圆形透镜（3），使得平行光路撞击校正装置（1）和无偏转平面（6）， 物镜被表示在校正装置（1）的第一六极（8）的平面上，或者在物镜和校正装置之间布置具有不同焦距的两个圆形透镜，由此圆形透镜（14） ）接近目标的物体，并且物镜的无昏暗平面（16）和靠近校正装置的圆形透镜（15）与校正装置的无昏暗平面（17）之间的距离是相同的 的焦点 并且两个圆形透镜（14,15）之间的距离等于它们的焦距的总和。

    Corrector
    8.
    发明授权
    Corrector 有权
    校正者

    公开(公告)号：US08362442B2

    公开(公告)日：2013-01-29

    申请号：US12973984

    申请日：2010-12-21

    Applicant: Joachim Zach ,  Stephan Uhlemann

    Inventor： Joachim Zach ,  Stephan Uhlemann

    IPC: H01J37/141

    CPC classification number: H01J37/153 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

    Abstract: A corrector (10) for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image (9) of the axial fundamental rays (xα, yβ) is produced in the quadrupole field (1′) of a first quadrupole element (1) and this quadrupole field (1′) is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are produced in the region of the center of the quadrupole fields (3′, 4′) of a third (3) and fourth multipole element (4) and there also, due to the setting of the quadrupole field (2′) of a second quadrupole element (2), the axial fundamental rays (xα, yβ) of the same section (x, y) as that, in which the intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are located, each exhibit a maximum.

    Abstract translation: 提出了一种用于电子显微镜的校正器（10），如果在四极场（1'）中产生轴向基本射线（xα，y＆bgr）的眩目中间图像（9），对于电源的波动较不敏感， ），并且该四极场（1'）被设置为使得在轴向中心的区域中产生离轴基波（xγ，yδ）的像散中间图像（12,13） 第三（3）和第四多极元件（4）的四极场（3'，4'），并且由于第二四极元件（2）的四极场（2'）的设定， 与偏轴基波（xγ，yδ）的中间图像（12,13）相同的部分（x，y）的基波（xα，y＆bgr）各自呈现最大值。

    Electron-optical corrector for aplanatic imaging systems
    9.
    发明授权
    Electron-optical corrector for aplanatic imaging systems 有权
    用于摄影系统的电子 - 光学校正器

    公开(公告)号：US07800076B2

    公开(公告)日：2010-09-21

    申请号：US12297306

    申请日：2007-03-31

    Applicant: Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

    Inventor： Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

    IPC: H01J37/153

    CPC classification number: H01J37/153 ,  H01J2237/1534

    Abstract: A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.

    Abstract translation: 一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间 并调整为使六边形中心六极场成像。 在六极场之间，以中间平面为准，中间平面彼此共轭。 三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场 六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。 六极场对的取向相对于由六极场确定的取向旋转足够的角度，以便校正异轴三阶彗差。

    Electron-optical corrector for an aplanatic imaging system
    10.
    发明授权
    Electron-optical corrector for an aplanatic imaging system 有权
    用于平面成像系统的电子 - 光学校正器

    公开(公告)号：US07800074B2

    公开(公告)日：2010-09-21

    申请号：US12091411

    申请日：2006-10-11

    Applicant: Stephan Uhlemann

    Inventor： Stephan Uhlemann

    IPC: H01J37/153

    CPC classification number: H01J37/153 ,  H01J2237/153

    Abstract: An electron-optical corrector for rendering superfluous both the third-order opening error and the anisotropic part of the extra-axial third-order coma, using round lenses and hexapole fields, the corrector includes at least three coaxially arranged hexapole fields with at least one round lens field is arranged between adjacent hexapole fields, so that the hexapole fields are imaged onto each other in pairs. The intensities of the hexapole fields are selected so that the image error coefficient of the three-fold astigmatism is equal to 0, and at least three hexapole fields in the Larmor reference system are rotated in relation to each other at an angle about the optical axis.

    Abstract translation: 一种电子光学校正器，其使用圆形透镜和六极场来渲染多余的三次打开误差和异轴三次彗差的各向异性部分，校正器包括至少三个同轴布置的六极场，其具有至少一个 圆形透镜场布置在相邻的六极场之间，使得六极场成对成对。 选择六极场的强度，使得三折像散的图像误差系数等于0，并且拉莫尔参考系中的至少三个六极场相对于彼此以围绕光轴的角度相互旋转 。

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