Invention Grant
- Patent Title: Corrector
- Patent Title (中): 校正者
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Application No.: US12973984Application Date: 2010-12-21
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Publication No.: US08362442B2Publication Date: 2013-01-29
- Inventor: Joachim Zach , Stephan Uhlemann
- Applicant: Joachim Zach , Stephan Uhlemann
- Applicant Address: DE Heidelberg
- Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee Address: DE Heidelberg
- Agent Paul Vincent
- Priority: DE102010054541 20101215
- Main IPC: H01J37/141
- IPC: H01J37/141

Abstract:
A corrector (10) for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image (9) of the axial fundamental rays (xα, yβ) is produced in the quadrupole field (1′) of a first quadrupole element (1) and this quadrupole field (1′) is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are produced in the region of the center of the quadrupole fields (3′, 4′) of a third (3) and fourth multipole element (4) and there also, due to the setting of the quadrupole field (2′) of a second quadrupole element (2), the axial fundamental rays (xα, yβ) of the same section (x, y) as that, in which the intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are located, each exhibit a maximum.
Public/Granted literature
- US20120153147A1 Corrector Public/Granted day:2012-06-21
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