MASS FLOW CONTROLLER, APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD FOR MAINTENANCE THEREOF

    公开(公告)号:US20190170563A1

    公开(公告)日:2019-06-06

    申请号:US16013199

    申请日:2018-06-20

    Abstract: Disclosed are mass flow controllers, apparatuses for manufacturing semiconductor devices, and methods of maintenance thereof. The mass flow controller may control an amount of a gas provided into a chamber. The mass flow controller may be configured to obtain an absolute volume of the gas provided into the chamber at a standard flow rate when the mass flow controller is initially used. The mass flow controller may be configured to obtain a detected flow rate of the gas provided at a measured flow rate after the mass flow controller has been used for a predetermined time. The mass flow controller may be configured to compare the detected flow rate and the standard flow rate to verify a full-scale error in the measured flow rate.

    Clock gating circuit
    2.
    发明授权

    公开(公告)号:US10230373B2

    公开(公告)日:2019-03-12

    申请号:US15139949

    申请日:2016-04-27

    Abstract: Provided are semiconductor circuits. A semiconductor circuit includes: a first circuit configured to propagate a value of a first node to a second node based on a voltage level of a clock signal; a second circuit configured to propagate a value of the second node to a third node based on the voltage level of the clock signal; and a third circuit configured to determine a value of the third node based on a voltage level of the second node and the voltage level of the clock signal, wherein the first circuit comprises a first transistor gated to a voltage level of the first node, a second transistor connected in series with the first transistor and gated to the voltage level of the third node, and a third transistor connected in parallel with the first and second transistors and gated to a voltage level of the clock signal to provide the value of the first node to the second node.

    Clock gating circuit
    3.
    再颁专利

    公开(公告)号:USRE50010E1

    公开(公告)日:2024-06-11

    申请号:US17672371

    申请日:2022-02-15

    Abstract: Provided are semiconductor circuits. A semiconductor circuit includes a first circuit configured to propagate a value of a first node to a second node based on a voltage level of a clock signal; a second circuit configured to propagate a value of the second node to a third node based on the voltage level of the clock signal; and a third circuit configured to determine a value of the third node based on a voltage level of the second node and the voltage level of the clock signal, wherein the first circuit comprises a first transistor gated to a voltage level of the first node, a second transistor connected in series with the first transistor and gated to the voltage level of the third node, and a third transistor connected in parallel with the first and second transistors and gated to a voltage level of the clock signal to provide the value of the first node to the second node.

    Flip-flop, master-slave flip-flop, and operating method thereof

    公开(公告)号:US11528018B2

    公开(公告)日:2022-12-13

    申请号:US16930658

    申请日:2020-07-16

    Abstract: A flip-flop includes an input switching circuit configured to output an intermediate signal based on an input signal and at least one of a phase of a clock signal or a phase of an inverted clock signal, the phase of the inverted clock signal being opposite to the phase of the clock signal, and block application of a driving voltage to at least one circuit element of the input switching circuit in response to receiving a reset signal representing a reset operation of the flip-flop, and a latch circuit configured to generate an output signal based on the intermediate signal according to the at least one of the phase of the clock signal or the phase of the inverted clock signal.

    Integrated circuit including complex logic cell

    公开(公告)号:US10586809B2

    公开(公告)日:2020-03-10

    申请号:US16211496

    申请日:2018-12-06

    Abstract: An integrated circuit includes a complex logic cell. The complex logic cell includes a first logic circuit providing a first output signal from a first input signal group and a common input signal group, and a second logic circuit providing a second output signal from a second input signal group and the common input signal group. The first and second logic circuits respectively include first and second transistors formed from a gate electrode, the gate electrode extending in a first direction and receiving a first common input signal of the common input signal group.

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