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公开(公告)号:US20170243826A1
公开(公告)日:2017-08-24
申请号:US15418896
申请日:2017-01-30
申请人: MEDIATEK INC.
发明人: Tzu-Hung LIN , I-Hsuan PENG , Ching-Wen HSIAO , Nai-Wei LIU , Wei-Che HUANG
IPC分类号: H01L23/538 , H01L49/02 , H01L25/00 , H01L25/065 , H01L21/48 , H01L21/56 , H01L23/31 , H01L25/10
摘要: A semiconductor package structure including a first semiconductor package is provided. The first semiconductor package includes a first redistribution layer (RDL) structure having a first surface and a second surface opposite thereto. A first semiconductor die is disposed on and electrically coupled to the first surface of the first RDL structure. A first molding compound is disposed on the first surface of the first RDL structure and surrounds the first semiconductor die. A plurality of solder balls or conductive pillar structures is disposed in the first molding compound and electrically coupled to the first semiconductor die through the first RDL structure. A method for forming the semiconductor package is also provided.
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公开(公告)号:US20190123176A1
公开(公告)日:2019-04-25
申请号:US16121730
申请日:2018-09-05
申请人: MEDIATEK Inc.
IPC分类号: H01L29/66 , H01L29/78 , H01L29/417 , H01L27/12 , H01L21/8238 , H01L21/84
摘要: A semiconductor chip includes a substrate and a transistor. The transistor is formed on the substrate and includes an insulation layer and a fin. The fin includes a base portion and a protrusion connected with the base portion, wherein the protrusion is projected with respect to an upper surface of the base portion and has a recess recessed with respect to the upper surface.
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公开(公告)号:US20160181201A1
公开(公告)日:2016-06-23
申请号:US14963451
申请日:2015-12-09
申请人: MediaTek Inc.
发明人: Ming-Tzong YANG , Cheng-Chou HUNG , Wei-Che HUANG , Yu-Hua HUANG , Tzu-Hung LIN , Kuei-Ti CHAN , Ruey-Beei WU , Kai-Bin WU
IPC分类号: H01L23/538 , H01L25/065
CPC分类号: H01L23/5384 , H01L21/76802 , H01L21/76877 , H01L21/76898 , H01L23/481 , H01L23/49816 , H01L23/49838 , H01L23/5386 , H01L24/14 , H01L25/0657 , H01L2224/16146 , H01L2225/06541 , H01L2225/06544
摘要: The invention provides a semiconductor package assembly with a TSV interconnect. The semiconductor package assembly includes a first semiconductor die mounted on a base. The first semiconductor die includes a semiconductor substrate. A first array of TSV interconnects and a second array of TSV interconnects are formed through the semiconductor substrate, wherein the first array and second array of TSV interconnects are separated by an interval region. A first ground TSV interconnect is disposed within the interval region. A second semiconductor die is mounted on the first semiconductor die, having a ground pad thereon. The first ground TSV interconnect of the first semiconductor die has a first terminal coupled to the ground pad of the second semiconductor die and a second terminal coupled to an interconnection structure disposed on a front side of the semiconductor substrate.
摘要翻译: 本发明提供一种具有TSV互连的半导体封装组件。 半导体封装组件包括安装在基座上的第一半导体管芯。 第一半导体管芯包括半导体衬底。 通过半导体衬底形成TSV互连的第一阵列和TSV互连的第二阵列,其中TSV互连的第一阵列和第二阵列被间隔区隔开。 第一接地TSV互连设置在间隔区域内。 第二半导体管芯安装在第一半导体管芯上,其上具有接地焊盘。 第一半导体管芯的第一接地TSV互连具有耦合到第二半导体管芯的接地焊盘的第一端子和耦合到布置在半导体衬底的前侧上的互连结构的第二端子。
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公开(公告)号:US20150162267A1
公开(公告)日:2015-06-11
申请号:US14621682
申请日:2015-02-13
申请人: MediaTek Inc.
CPC分类号: H01L21/76898 , H01L21/02107 , H01L21/268 , H01L21/30625 , H01L23/481 , H01L23/5227 , H01L23/66 , H01L24/11 , H01L24/13 , H01L24/16 , H01L31/18 , H01L2223/6616 , H01L2224/13025 , H01L2224/131 , H01L2224/16225 , H01L2224/16227 , H01L2924/11 , H01L2924/12042 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要: An electronic device package has a base and an electronic device chip mounted on the base. The electronic device chip includes a semiconductor substrate having a front side and a back side, a electronic component disposed on the front side of the semiconductor substrate, an interconnect structure disposed on the electronic component, a through hole formed through the semiconductor substrate from the back side of the semiconductor substrate, connecting to the interconnect structure, and a TSV structure disposed in the through hole. The interconnect structure is electrically connected to the RF component, and a thickness of the semiconductor substrate is less than that of the interconnect structure.
摘要翻译: 电子器件封装具有安装在基座上的基座和电子器件芯片。 电子设备芯片包括具有前侧和后侧的半导体衬底,设置在半导体衬底的前侧的电子部件,设置在电子部件上的互连结构,从背面穿过半导体衬底形成的通孔 连接到互连结构的半导体衬底的一侧以及设置在通孔中的TSV结构。 互连结构电连接到RF部件,并且半导体衬底的厚度小于互连结构的厚度。
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公开(公告)号:US20150162242A1
公开(公告)日:2015-06-11
申请号:US14621703
申请日:2015-02-13
申请人: MediaTek Inc.
IPC分类号: H01L21/768 , H01L21/268 , H01L21/306 , H01L23/00
CPC分类号: H01L21/76898 , H01L21/02107 , H01L21/268 , H01L21/30625 , H01L23/481 , H01L23/5227 , H01L23/66 , H01L24/11 , H01L24/13 , H01L24/16 , H01L31/18 , H01L2223/6616 , H01L2224/13025 , H01L2224/131 , H01L2224/16225 , H01L2224/16227 , H01L2924/11 , H01L2924/12042 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要: A method for fabricating a electronic device package provides a electronic device chip, wherein the electronic device chip includes a semiconductor substrate having a front side and a back side, wherein the semiconductor substrate has a first thickness, an electronic component disposed on the front side of the semiconductor substrate, and an interconnect structure disposed on the electronic component. The method further performs a thinning process to remove a portion of the semiconductor substrate from the back side thereof The method then removes a portion of the thinned semiconductor substrate and a portion of a dielectric layer of the interconnect structure from a back side of the thinned semiconductor substrate until a first metal layer pattern of the interconnect structure is exposed, thereby forming a through hole. Finally, the method forms a TSV structure in the through hole, and mounts the electronic device chip on a base.
摘要翻译: 一种制造电子器件封装的方法,提供了一种电子器件芯片,其中电子器件芯片包括具有正面和背面的半导体衬底,其中半导体衬底具有第一厚度,电子部件设置在第一厚度的前侧 半导体衬底和布置在电子部件上的互连结构。 该方法还进行薄膜化处理以从背面去除半导体衬底的一部分。然后,该方法从薄化半导体的背面去除一部分减薄的半导体衬底和互连结构的介电层的一部分 衬底,直到互连结构的第一金属层图案被暴露,从而形成通孔。 最后,该方法在通孔中形成TSV结构,并将电子设备芯片安装在基座上。
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公开(公告)号:US20170098629A1
公开(公告)日:2017-04-06
申请号:US15218379
申请日:2016-07-25
申请人: MediaTek Inc.
发明人: Nai-Wei LIU , Tzu-Hung LIN , I-Hsuan PENG , Ching-Wen HSIAO , Wei-Che HUANG
IPC分类号: H01L25/065 , H01L23/00 , H01L25/00
CPC分类号: H01L23/3114 , H01L21/568 , H01L23/3135 , H01L23/49811 , H01L23/5389 , H01L24/19 , H01L24/20 , H01L24/94 , H01L2224/02379 , H01L2224/04105 , H01L2224/12105 , H01L2224/19 , H01L2224/32145 , H01L2224/32225 , H01L2224/73267 , H01L2224/83005 , H01L2224/92244 , H01L2224/94 , H01L2924/1431 , H01L2924/1432 , H01L2924/1436 , H01L2924/19011 , H01L2924/35121 , H01L2924/37001 , H01L2224/83
摘要: A semiconductor package structure is provided. The structure includes a first semiconductor die having a first surface and a second surface opposite thereto. A first molding compound surrounds the first semiconductor die. A first redistribution layer (RDL) structure is disposed on the second surface of the first semiconductor die and laterally extends on the first molding compound. A second semiconductor die is disposed on the first RDL structure and has a first surface and a second surface opposite thereto. A second molding compound surrounds the second semiconductor die. A first protective layer covers a sidewall of the first RDL structure and a sidewall of the first molding compound.
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公开(公告)号:US20170098589A1
公开(公告)日:2017-04-06
申请号:US15212113
申请日:2016-07-15
申请人: MediaTek Inc.
发明人: Nai-Wei LIU , Tzu-Hung LIN , I-Hsuan PENG , Ching-Wen HSIAO , Wei-Che HUANG
IPC分类号: H01L23/31 , H01L23/00 , H01L23/544
CPC分类号: H01L23/544 , H01L21/561 , H01L21/568 , H01L23/562 , H01L24/19 , H01L24/20 , H01L24/96 , H01L24/97 , H01L2224/04105 , H01L2224/12105 , H01L2224/29016 , H01L2224/2919 , H01L2224/32225 , H01L2224/73267 , H01L2224/9222 , H01L2225/1035 , H01L2225/1041 , H01L2924/1431 , H01L2924/1432 , H01L2924/1436 , H01L2924/3511 , H01L2924/3512 , H01L2924/35121 , H01L2924/37001
摘要: A semiconductor package structure is provided. The structure includes a molding compound having a dicing lane region. A semiconductor die is disposed in the molding compound and surrounded by the dicing lane region. The semiconductor die has a first surface and a second surface opposite thereto, and the first and second surfaces are exposed from the molding compound. The structure further includes a redistribution layer (RDL) structure disposed on the first surface of the semiconductor die and covering the molding compound. The RDL structure includes a photo-sensitive material and has an opening aligned with the dicing lane region.
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公开(公告)号:US20160211194A1
公开(公告)日:2016-07-21
申请号:US14601440
申请日:2015-01-21
申请人: MediaTek Inc.
发明人: Cheng-Chou HUNG , Ming-Tzong YANG , Tung-Hsing LEE , Wei-Che HUANG , Yu-Hua HUANG , Tzu-Hung LIN
IPC分类号: H01L23/48 , H01L21/761 , H01L21/768 , H01L29/06
CPC分类号: H01L21/76898 , H01L21/761 , H01L23/481 , H01L23/49816 , H01L23/49827 , H01L24/11 , H01L29/0619 , H01L29/0623 , H01L2224/13 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor package structure and method for forming the same are provided. The semiconductor package structure includes a substrate and the substrate has a front side and a back side. The semiconductor package structure includes a through silicon via (TSV) interconnect structure formed in the substrate; and a first guard ring doped region and a second guard ring doped region formed in the substrate, and the first guard ring doped region and the second guard ring doped region are adjacent to the TSV interconnect structure.
摘要翻译: 提供一种半导体封装结构及其形成方法。 半导体封装结构包括衬底,并且衬底具有正面和背面。 半导体封装结构包括在衬底中形成的穿硅通孔(TSV)互连结构; 以及形成在所述衬底中的第一保护环掺杂区域和第二保护环掺杂区域,并且所述第一保护环掺杂区域和所述第二保护环掺杂区域与所述TSV互连结构相邻。
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公开(公告)号:US20160118318A1
公开(公告)日:2016-04-28
申请号:US14986295
申请日:2015-12-31
申请人: MediaTek Inc.
发明人: Ming-Tzong YANG , Yu-Hua HUANG , Wei-Che HUANG
IPC分类号: H01L23/48 , H01L23/528 , H01L27/088 , H01L29/06 , H01L29/423
CPC分类号: H01L23/481 , H01L21/76898 , H01L23/528 , H01L23/5384 , H01L24/11 , H01L27/088 , H01L29/0649 , H01L29/42356 , H01L2224/02372 , H01L2224/0912 , H01L2225/06541
摘要: The invention provides a semiconductor package with a through silicon via (TSV) interconnect. An exemplary embodiment of the semiconductor package with a TSV interconnect includes a semiconductor substrate, having a front side and a back side. A contact array is disposed on the front side of the semiconductor substrate. An isolation structure is disposed in the semiconductor substrate, underlying the contact array. The TSV interconnect is formed through the semiconductor substrate, overlapping with the contact array and the isolation structure.
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公开(公告)号:US20160099231A1
公开(公告)日:2016-04-07
申请号:US14741820
申请日:2015-06-17
申请人: MediaTek Inc.
发明人: Ming-Tzong YANG , Wei-Che HUANG , Tzu-Hung LIN
IPC分类号: H01L25/065 , H01L23/522 , H01L23/31 , H01L23/492 , H01L23/495
CPC分类号: H01L23/5226 , H01L23/3171 , H01L23/49816 , H01L23/49827 , H01L23/5389 , H01L24/19 , H01L24/24 , H01L24/25 , H01L25/105 , H01L2224/12105 , H01L2224/13025 , H01L2224/16145 , H01L2224/24137 , H01L2224/24146 , H01L2224/24226 , H01L2224/25171 , H01L2224/73209 , H01L2224/73253 , H01L2225/06513 , H01L2225/06541 , H01L2225/1035 , H01L2225/1041 , H01L2225/1058 , H01L2924/1431 , H01L2924/1432 , H01L2924/1436 , H01L2924/18161 , H01L2924/18162
摘要: The invention provides a semiconductor package assembly. The semiconductor package assembly includes a first semiconductor package and a second semiconductor package stacked on the first semiconductor package. The first semiconductor package includes a first redistribution layer (RDL) structure. A first semiconductor die is coupled to the first RDL structure. A first molding compound surrounds the first semiconductor die, and is in contact with the RDL structure and the first semiconductor die. The second semiconductor package includes a second redistribution layer (RDL) structure. A first dynamic random access memory (DRAM) die without through silicon via (TSV) interconnects formed passing therethrough is coupled to the second RDL structure.
摘要翻译: 本发明提供一种半导体封装组件。 半导体封装组件包括堆叠在第一半导体封装上的第一半导体封装和第二半导体封装。 第一半导体封装包括第一再分配层(RDL)结构。 第一半导体裸片耦合到第一RDL结构。 第一模塑料围绕第一半导体管芯,并与RDL结构和第一半导体管芯接触。 第二半导体封装包括第二再分配层(RDL)结构。 通过其形成的通过硅通孔(TSV)互连的第一动态随机存取存储器(DRAM)管芯被耦合到第二RDL结构。
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