MAGNETIC DEVICE
    5.
    发明申请
    MAGNETIC DEVICE 有权
    磁性装置

    公开(公告)号:US20120292724A1

    公开(公告)日:2012-11-22

    申请号:US13475520

    申请日:2012-05-18

    CPC classification number: H01L43/08

    Abstract: A magnetic tunnel junction element is provided. The magnetic tunnel junction element has first magnetic layer and second magnetic layer formed adjacent, e.g., on lower and upper portions of an insulating layer, respectively and each having a perpendicular magnetic anisotropy, a magnetic field adjustment layer formed on the second magnetic layer and having a perpendicular magnetic anisotropy, and a bather layer formed between the magnetic field adjustment layer and the second magnetic layer. The second magnetic layer and the magnetic field adjustment layer are magnetically decoupled from each other.

    Abstract translation: 提供磁性隧道结元件。 磁性隧道结元件分别具有第一磁性层和第二磁性层,该第一磁性层和第二磁性层分别形成在例如绝缘层的下部和上部上并且各自具有垂直的磁各向异性,磁场调节层形成在第二磁性层上并具有 垂直磁各向异性,以及形成在磁场调整层和第二磁性层之间的沐浴层。 第二磁性层和磁场调节层彼此磁耦合。

    Method For Forming Magnetic Tunnel Junction Structure And Method For Forming Magnetic Random Access Memory Using The Same
    7.
    发明申请
    Method For Forming Magnetic Tunnel Junction Structure And Method For Forming Magnetic Random Access Memory Using The Same 有权
    用于形成磁隧道结结构的方法和用于形成磁性随机存取存储器的方法

    公开(公告)号:US20120135543A1

    公开(公告)日:2012-05-31

    申请号:US13286630

    申请日:2011-11-01

    CPC classification number: H01L43/12 G11C11/161 H01L27/228

    Abstract: A method of fabricating a magnetic tunnel junction structure includes forming a magnetic tunnel junction layer on a substrate. A mask pattern is formed on a region of the second magnetic layer. A magnetic tunnel junction layer pattern and a sidewall dielectric layer pattern on at least one sidewall of the magnetic tunnel junction layer pattern are formed by performing at least one etch process and at least one oxidation process multiple times. The at least one etch process may include a first etch process to etch a portion of the magnetic tunnel junction layer using an inert gas and the mask pattern to form a first etch product. The at least one oxidation process may include a first oxidation process to oxidize the first etch product attached on an etched side of the magnetic tunnel junction layer.

    Abstract translation: 制造磁性隧道结结构的方法包括在衬底上形成磁性隧道结层。 在第二磁性层的区域上形成掩模图案。 通过多次执行至少一个蚀刻工艺和至少一个氧化工艺来形成在磁性隧道结层图案的至少一个侧壁上的磁性隧道结层图案和侧壁电介质层图案。 所述至少一个蚀刻工艺可以包括使用惰性气体蚀刻磁性隧道结层的一部分并且掩模图案以形成第一蚀刻产物的第一蚀刻工艺。 所述至少一个氧化工艺可以包括第一氧化工艺以氧化附着在磁性隧道结层的蚀刻侧上的第一蚀刻产物。

    Methods of forming resistive memory devices
    9.
    发明授权
    Methods of forming resistive memory devices 有权
    形成电阻式存储器件的方法

    公开(公告)号:US08058097B2

    公开(公告)日:2011-11-15

    申请号:US12784230

    申请日:2010-05-20

    Abstract: Methods of forming a resistive memory device include forming an insulation layer on a semiconductor substrate including a conductive pattern, forming a contact hole in the insulation layer to expose the conductive pattern, forming a lower electrode in the contact hole, forming a variable resistive oxide layer in the contact hole on the lower electrode, forming a middle electrode in the contact hole on the variable resistive oxide layer, forming a buffer oxide layer on the middle electrode and the insulation layer, and forming an upper electrode on the buffer oxide layer. Related resistive memory devices are also disclosed.

    Abstract translation: 形成电阻性存储器件的方法包括在包括导电图案的半导体衬底上形成绝缘层,在绝缘层中形成接触孔以露出导电图案,在接触孔中形成下电极,形成可变电阻氧化物层 在下电极的接触孔中,在可变电阻氧化物层的接触孔中形成中间电极,在中间电极和绝缘层上形成缓冲氧化物层,在缓冲氧化物层上形成上电极。 还公开了相关的电阻式存储器件。

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