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公开(公告)号:US11999645B2
公开(公告)日:2024-06-04
申请号:US17287015
申请日:2019-10-03
IPC分类号: C03B37/00 , C03B37/012 , C03B37/027 , C03C25/68 , G01N21/956 , G02F1/35 , G02F1/365 , G03F7/00
CPC分类号: C03B37/0122 , C03B37/01228 , C03B37/02781 , C03C25/68 , G01N21/956 , G02F1/3528 , G02F1/365 , G03F7/70316 , C03B2203/16 , C03B2203/42
摘要: An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method includes providing a manufacturing intermediate having an elongate body and having an aperture extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further includes etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.
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公开(公告)号:US20230122602A1
公开(公告)日:2023-04-20
申请号:US17910762
申请日:2021-03-10
发明人: Robert R THOMSON , Calum ROSS
IPC分类号: C03C25/68 , C03C25/6208 , C03B37/012
摘要: A method of fabricating an optical fibre preform is disclosed comprising using a subtractive process on an optical monolith to define therein at least a transverse section of the optical fibre preform, wherein the transverse section comprises at least two regions with different refractive indexes. An optical fibre preform fabricated in accordance with the method is also disclosed along with a method of assembling optical components using a subtractive process to define a first interconnecting feature in or for use with a first optical component; using a subtractive process to define a second interconnecting feature in or for use with a second optical component; and coupling the first and second components together using the first and second interconnecting features such that the coupling dictates a passive alignment of the first and second components.
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公开(公告)号:US20230067875A1
公开(公告)日:2023-03-02
申请号:US17462734
申请日:2021-08-31
发明人: Tiziana C. BOND , Sara Elizabeth HARRISON , Catherine E. REINHARDT , Payal Kamlesh SINGH , Victor V. KHITROV
摘要: The present disclosure relates to a method of forming a tapered optical fiber, where the optical fiber has a cladding encasing a core and has an initial outer diameter. The method involves applying opposing forces to spaced apart sections of the optical fiber. The spaced apart sections define a length portion representing a waist region. While applying the opposing forces, simultaneously applying heat to the waist region to gradually produce a taper of the optical fiber within the waist region. The taper has a first diameter at a midpoint of the waist region which is less than the initial outer diameter. An etch operation is then performed by chemically etching at least a subportion of the waist region of the optical fiber to reduce the subportion to a second diameter which is less than the first diameter.
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公开(公告)号:US11442227B2
公开(公告)日:2022-09-13
申请号:US17076510
申请日:2020-10-21
申请人: Magic Leap, Inc.
摘要: A fiber optic element of a fiber scanning system includes a motion actuator having longitudinal side members, an internal orifice, a first support region, a central region, and a second support region. The fiber optic element also includes a first fiber optic cable passing through the internal orifice and having a first fiber joint as well as a second fiber optic cable passing through the internal orifice. The second fiber optic cable has a second fiber joint disposed in the central region and spliced to the first fiber joint, a second coupling region, a light delivery region, and a light emission tip. The light delivery region is characterized by a first diameter and the light emission tip is characterized by a second diameter less than the first diameter.
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公开(公告)号:US10884188B2
公开(公告)日:2021-01-05
申请号:US15931908
申请日:2020-05-14
发明人: Jesse A. Frantz , Lynda E. Busse , Jason D. Myers , L. Brandon Shaw , Jasbinder S. Sanghera , Ishwar D. Aggarwal , Catalin M. Florea
摘要: A method for creating a random anti-reflective surface structure on an optical fiber including a holder configured to hold the optical fiber comprising a groove and a fiber connector, an adhesive material to hold the optical fiber in the holder and fill any gap between the optical fiber and the holder, a glass to cover the adhesive material and the optical fiber, and a reactive ion etch device. The reactive ion etch device comprises a plasma and is configured to expose an end face of the optical fiber to the plasma. The plasma is configured to etch a random anti-reflective surface structure on the end face of the optical fiber.
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公开(公告)号:US10192719B2
公开(公告)日:2019-01-29
申请号:US14962407
申请日:2015-12-08
IPC分类号: H01J37/32 , B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , H01L21/302 , H01L21/461
摘要: A plasma processing method is provided that includes a step of loading a substrate into a chamber where a plasma process is to be executed, a step of applying a high frequency bias power that has a lower frequency than a high frequency excitation power for plasma excitation to a mounting table on which the substrate is mounted, and a step of applying a DC voltage to an electrostatic chuck configured to electrostatically attract the substrate that is mounted on the mounting table. The step of applying the DC voltage is performed after the step of applying the high frequency bias power.
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7.
公开(公告)号:US10163625B2
公开(公告)日:2018-12-25
申请号:US15386859
申请日:2016-12-21
IPC分类号: H01L21/302 , H01L21/461 , B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , H01L21/02 , C23C16/02 , C23C16/34 , C23C16/455 , C23C16/52 , H01L21/306 , H01L21/308 , C23C16/56
摘要: There is provided a method for manufacturing a semiconductor device, including: providing a substrate with an oxide film formed on a surface thereof; pre-processing a surface of the oxide film; and forming a nitride film containing carbon on the surface of the oxide film which has been pre-processed, by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas to the substrate; supplying a carbon-containing gas to the substrate; and supplying a nitrogen-containing gas to the substrate, or by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas to the substrate; and supplying a gas containing carbon and nitrogen to the substrate, or by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas containing carbon to the substrate; and supplying a nitrogen-containing gas to the substrate.
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公开(公告)号:US10161055B2
公开(公告)日:2018-12-25
申请号:US15087263
申请日:2016-03-31
发明人: Yuki Sato , Motoki Hiraoka , Hiroshi Yanagimoto , Hiroki Usui
IPC分类号: C23F1/00 , C03C15/00 , C03C25/68 , C25F3/00 , C25D5/08 , C25D3/00 , H05K3/00 , C25D5/02 , C25D7/00 , C25D17/00 , C25D17/12 , C25D21/10 , C25F3/02 , C25F7/00 , C23C18/16 , C23C18/30
摘要: A method of forming a wiring pattern includes: a) forming a metal underlayer including a first underlying wiring layer which is in contact with an electrode, a second underlying wiring layer which is not in contact with the electrode, and an underlying connection layer which connects the first underlying wiring layer to the second underlying wiring layer; b) forming a metal plating layer on the metal underlayer through electroplating; and c) removing a metal connection portion through etching. The metal connection portion is the underlying connection layer covered with the metal plating layer. The etching includes bringing a solid electrolyte material that contains a solution into which metal of the metal connection portion is dissolved, into contact with the metal connection portion and applying a voltage between the metal connection portion and the solid electrolyte material.
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公开(公告)号:US10155688B2
公开(公告)日:2018-12-18
申请号:US15794824
申请日:2017-10-26
申请人: UT-BATTELLE, LLC
发明人: John T. Simpson
IPC分类号: B32B1/08 , C03C15/00 , C03C25/68 , C03B37/012 , C03B37/025 , C03B37/028 , C03B37/075 , C03B37/16 , G02B1/18 , C03C3/089 , C03C13/04
摘要: A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.
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10.
公开(公告)号:US10121654B2
公开(公告)日:2018-11-06
申请号:US15386859
申请日:2016-12-21
IPC分类号: H01L21/302 , H01L21/461 , B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , H01L21/02 , C23C16/02 , C23C16/34 , C23C16/455 , C23C16/52 , H01L21/306 , H01L21/308 , C23C16/56
摘要: There is provided a method for manufacturing a semiconductor device, including: providing a substrate with an oxide film formed on a surface thereof; pre-processing a surface of the oxide film; and forming a nitride film containing carbon on the surface of the oxide film which has been pre-processed, by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas to the substrate; supplying a carbon-containing gas to the substrate; and supplying a nitrogen-containing gas to the substrate, or by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas to the substrate; and supplying a gas containing carbon and nitrogen to the substrate, or by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: supplying a precursor gas containing carbon to the substrate; and supplying a nitrogen-containing gas to the substrate.
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