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    Combined semiconductor metrology system
    1.
    发明授权
    Combined semiconductor metrology system 有权
    组合半导体计量系统

    公开(公告)号：US09553034B1

    公开(公告)日：2017-01-24

    申请号：US13533360

    申请日：2012-06-26

    申请人： Scott A. Young ,  Guoheng Zhao ,  NanChang Zhu ,  Neeraj Khanna

    发明人： Scott A. Young ,  Guoheng Zhao ,  NanChang Zhu ,  Neeraj Khanna

    IPC分类号： H01L21/66 ,  G01N21/95

    CPC分类号： H01L22/24 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/8845 ,  H01L22/12 ,  H01L22/20

    摘要： A semiconductor wafer inspection system includes a camera and two or more illuminators. The illuminators illuminate a line of the semiconductor wafer in sequence and the camera captures an interleaved image of illuminated lines such that the individual images can be recovered from the interleaved image. The semiconductor wafer can be moved by a conveyor so that adjacent lines can be sequentially illuminated by the illuminators. The camera may include two or more line sensors.

    摘要翻译： 半导体晶片检查系统包括相机和两个或更多个照明器。 照明器依次照射半导体晶片的一行，并且相机捕获照明线的交错图像，使得各个图像可以从交错图像中恢复。 半导体晶片可以通过输送机移动，使得相邻的线可以被照明器依次照明。 相机可以包括两个或更多个线传感器。

    METHODS OF REDUCING ABSORPTION OF TRANS FATTY ACIDS USING WATER-INSOLUBLE CELLULOSE DERIVATIVES
    3.
    发明申请
    METHODS OF REDUCING ABSORPTION OF TRANS FATTY ACIDS USING WATER-INSOLUBLE CELLULOSE DERIVATIVES 审中-公开
    使用水不溶性纤维素衍生物减少转运脂肪酸的吸收方法

    公开(公告)号：US20120129804A1

    公开(公告)日：2012-05-24

    申请号：US13124533

    申请日：2009-10-16

    申请人： Kerr W.H. Anderson ,  David R. Albers ,  Scott A. Young ,  Wallace H. Yokoyama

    发明人： Kerr W.H. Anderson ,  David R. Albers ,  Scott A. Young ,  Wallace H. Yokoyama

    IPC分类号： A61K31/717 ,  A61P3/00

    CPC分类号： A23L33/24 ,  A23L29/262

    摘要： Provided are food products comprising at least 0.5 g of trans fatty acid per serving and one or more water-insoluble cellulose derivatives in an amount sufficient to reduce absorption of the trans fatty acid by a mammal consuming the food product, methods of ameliorating the harmful effects of trans fatty acids on a mammal that has consumed trans fatty acids, and methods of reducing the amount of trans fatty acids capable of being absorbed by a mammal ingesting a trans fatty acid containing food product.

    摘要翻译： 提供的是每份含有至少0.5g反式脂肪酸的食品和一种或多种水不溶性纤维素衍生物，其量足以减少消耗食品的哺乳动物吸收反式脂肪酸，改善有害影响的方法 反式脂肪酸对已经消耗反式脂肪酸的哺乳动物的反式脂肪酸的量，以及减少能够被摄入含反式脂肪酸的食品的哺乳动物吸收的反式脂肪酸的量的方法。

    Confocal wafer inspection method and apparatus using fly lens arrangement
    5.
    发明授权
    Confocal wafer inspection method and apparatus using fly lens arrangement 有权
    共焦晶片检查方法和使用飞行透镜装置的装置

    公开(公告)号：US06867406B1

    公开(公告)日：2005-03-15

    申请号：US09533203

    申请日：2000-03-23

    申请人： Christopher R. Fairley ,  Tao-Yi Fu ,  Bin-Ming Benjamin Tsai ,  Scott A. Young

    发明人： Christopher R. Fairley ,  Tao-Yi Fu ,  Bin-Ming Benjamin Tsai ,  Scott A. Young

    IPC分类号： G02B21/00 ,  G02B27/40

    CPC分类号： G01N21/9501 ,  G02B3/0056 ,  G02B21/0024 ,  G02B21/0028 ,  G02B21/008 ,  G02B27/40

    摘要： A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.

    摘要翻译： 提供了使用多重元件布置的半导体晶片检查系统和方法，例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器，其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜，发射器/反射器，物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜，该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案，使得所产生的斑点可以重新组合成连续图像，并且系统利用时间延迟和积分电荷耦合器件与快速感测以及自动对焦系统一起测量和消除拓扑特征 标本。

    Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems
    6.
    发明授权
    Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems 失效
    自动光掩模和掩模版检查方法和设备，包括改进的缺陷检测器和对准子系统

    公开(公告)号：US4805123A

    公开(公告)日：1989-02-14

    申请号：US885197

    申请日：1986-07-14

    申请人： Donald F. Specht ,  Tim S. Wihl ,  Scott A. Young ,  James J. Hager, Jr. ,  Matthew B. Lutzker

    发明人： Donald F. Specht ,  Tim S. Wihl ,  Scott A. Young ,  James J. Hager, Jr. ,  Matthew B. Lutzker

    IPC分类号： H01L21/66 ,  G01B11/00 ,  G01N21/88 ,  G01N21/956 ,  G03F1/08 ,  G06T1/00 ,  G06T7/00 ,  H01L21/027 ,  H01L21/30 ,  G06K9/68 ,  G06K9/38

    CPC分类号： G06T7/001 ,  G01N21/95607 ,  G06T7/0026 ,  G06T2207/10056 ,  G06T2207/30148

    摘要： A photomask and reticle inspection method and apparatus wherein a selected surface area of an object is inspected and a first stream of data having signal values representing the image content of each pixel thereof is generated, a second stream of data having signal values representing the intended image content of each pixel of the first stream of data is generated, corresponding portions of the first and second streams of data are stored in memory, any misalignment between the stored portions of the first and second streams of data is detected, the misaligned first and second portions of data are then aligned using shifts of an integral number of pixels and/or subpixel interpolation to correct the detected misalignment therebetween, corresponding subportions of the stored and aligned first and second portions of data are then compared to detect difference therebetween, and upon detecting a difference exceeding a predetermined threshold, the presence of a defect at a particular pixel location on the inspected object is indicated.

    摘要翻译： 检查物体的选定表面区域的光掩模和掩模版检查方法和装置，并且生成具有表示其每个像素的图像内容的信号值的第一数据流，具有表示预期图像的信号值的第二数据流 产生第一数据流的每个像素的内容，第一和第二数据流的相应部分被存储在存储器中，检测到第一和第二数据流的存储部分之间的任何未对准，第一和第二数据未对准 然后使用整数个像素和/或子像素内插的偏移对数据的部分进行对准，以校正检测到的未对准之间的差异，然后比较存储和对准的第一和第二部分数据的相应子部分以检测它们之间的差异，并且在检测到 超过预定阈值的差异，在特定像素处存在缺陷 指示检查对象上的位置。

    Active planar autofocus
    8.
    发明授权
    Active planar autofocus 有权
    主动平面自动对焦

    公开(公告)号：US08643835B2

    公开(公告)日：2014-02-04

    申请号：US12833093

    申请日：2010-07-09

    申请人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

    发明人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

    IPC分类号： G01N21/00 ,  G01B11/14 ,  G06K9/00

    CPC分类号： G01N21/956 ,  G01N21/9501

    摘要： A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.

    摘要翻译： 一种用于使用具有固定焦平面的传感器检查相对于层的深度的系统。 聚焦传感器感测基板的表面并输出焦点数据。 在设置模式下，控制器扫描基板的第一部分，接收聚焦数据和XY数据，并存储基板的相关XYZ数据。 在检查模式下，控制器扫描基板的第二部分，接收焦点数据和XY数据，并从焦点数据中减去存储的Z数据，以产生虚拟数据。 控制器将虚拟数据加上偏移量供给电机，以在检查期间上下移动基板，从而将焦平面保持在所需的Z距离。

    METHODS OF REDUCING ABSORPTION OF TRANS FATTY ACIDS USING WATER-SOLUBLE CELLULOSE DERIVATIVES
    9.
    发明申请
    METHODS OF REDUCING ABSORPTION OF TRANS FATTY ACIDS USING WATER-SOLUBLE CELLULOSE DERIVATIVES 审中-公开
    使用水溶性纤维素衍生物减少转运脂肪酸的吸收方法

    公开(公告)号：US20110230439A1

    公开(公告)日：2011-09-22

    申请号：US13124537

    申请日：2009-10-16

    申请人： Kerr Anderson ,  David R. Albers ,  Scott A. Young ,  Wallace H. Yokoyama

    发明人： Kerr Anderson ,  David R. Albers ,  Scott A. Young ,  Wallace H. Yokoyama

    IPC分类号： A61K31/717 ,  A61P3/06

    CPC分类号： A23L33/24 ,  A23L29/262 ,  A23L33/12

    摘要： Provided are food products comprising at least 0.5 g of trans fatty acid per serving and at least 1.33 weight percent of one or more water-soluble cellulose derivatives, based on the total weight of the food product, methods of ameliorating the harmful effects of trans fatty acids on a mammal that has consumed trans fatty acids, and methods of reducing the amount of trans fatty acids capable of being absorbed by a mammal ingesting a trans fatty acid containing food product.

    摘要翻译： 提供的食品包含每份至少0.5g的反式脂肪酸和至少1.33％（重量）的一种或多种水溶性纤维素衍生物，基于食品的总重量，改善反式脂肪的有害作用的方法 已经消耗反式脂肪酸的哺乳动物上的酸，以及减少能够被哺乳动物摄入含反式脂肪酸的食品吸收的反式脂肪酸的量的方法。