公开(公告)号：US20120008137A1

公开(公告)日：2012-01-12

申请号：US12833093

申请日：2010-07-09

申请人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

发明人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

IPC分类号： G01N21/84

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A system for inspecting a constant layer depth relative to a particular device layer. The system has an image sensor with a fixed focal plane. A focus sensor senses the surface topography of the substrate and outputs a focus data stream. A stage moves the substrate in an XY plane, and a motor moves the substrate in a Z dimension. A controller operates the system in one of a setup mode and an inspection mode. In the setup mode the controller controls XY movement of the substrate so as to scan a first portion of the substrate. The controller receives the focus data stream, concurrently receives XY data, and stores correlated XYZ data for the substrate. In the inspection mode the controller controls XY movement of the substrate so as to scan a second portion of the substrate. The controller receives the focus data stream, concurrently receives XY data, and subtracts the stored Z data from the focus data stream to produce a virtual data stream. The controller feeds the virtual data stream plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance, regardless of the surface topography of the substrate.

摘要翻译： 用于检查相对于特定器件层的恒定层深度的系统。 该系统具有一个具有固定焦平面的图像传感器。 聚焦传感器感测基板的表面形貌并输出焦点数据流。 台架在XY平面上移动基板，马达使基板移动Z轴。 控制器以设置模式和检查模式之一操作系统。 在设置模式下，控制器控制衬底的XY运动，以扫描衬底的第一部分。 控制器接收聚焦数据流，同时接收XY数据，并存储基板的相关XYZ数据。 在检查模式中，控制器控制衬底的XY运动，以扫描衬底的第二部分。 控制器接收聚焦数据流，同时接收XY数据，并从聚焦数据流中减去存储的Z数据，以产生虚拟数据流。 控制器将虚拟数据流和偏移量馈送到电动机，以在检查期间上下移动衬底，从而将焦平面保持在期望的Z距离，而不管衬底的表面形貌如何。

公开(公告)号：US08643835B2

公开(公告)日：2014-02-04

申请号：US12833093

申请日：2010-07-09

申请人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

发明人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

IPC分类号： G01N21/00 ,  G01B11/14 ,  G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.

摘要翻译： 一种用于使用具有固定焦平面的传感器检查相对于层的深度的系统。 聚焦传感器感测基板的表面并输出焦点数据。 在设置模式下，控制器扫描基板的第一部分，接收聚焦数据和XY数据，并存储基板的相关XYZ数据。 在检查模式下，控制器扫描基板的第二部分，接收焦点数据和XY数据，并从焦点数据中减去存储的Z数据，以产生虚拟数据。 控制器将虚拟数据加上偏移量供给电机，以在检查期间上下移动基板，从而将焦平面保持在所需的Z距离。

公开(公告)号：US06937809B1

公开(公告)日：2005-08-30

申请号：US10132855

申请日：2002-04-25

申请人： Yale Zhang

发明人： Yale Zhang

IPC分类号： G02B6/00 ,  G02B6/32 ,  G02B6/34 ,  H04J14/02

CPC分类号： G02B6/4246 ,  G02B6/29361 ,  G02B6/2937 ,  G02B6/29395 ,  H04J14/021 ,  H04J14/0219 ,  H04J14/0221

摘要： Optical devices for adding/dropping an optical signal with a particular wavelength are disclosed. According to embodiment, a reflection channel module including a grin lens and a bandpass filter is employed to transmit the optical with a particular wavelength and reflect all other channel signals. The transmitted signal is regulated by an optical regulator (e.g. variable optical attenuator) before it is output from the device via a grin lens. As a result, a regulated channel can be dropped or added depending on an application.

摘要翻译： 公开了用于添加/丢弃具有特定波长的光信号的光学装置。 根据实施例，采用包括微光透镜和带通滤光器的反射通道模块来传输具有特定波长的光学并反射所有其它通道信号。 发射信号由光调节器（例如可变光衰减器）调节，然后经由微光透镜从器件输出。 因此，可以根据应用降低或添加受规管道。

公开(公告)号：US07039552B2

公开(公告)日：2006-05-02

申请号：US10718636

申请日：2003-11-24

申请人： Yale Zhang ,  Vit Vaculik ,  Ivan Miletic ,  Michael S. Dudzic

发明人： Yale Zhang ,  Vit Vaculik ,  Ivan Miletic ,  Michael S. Dudzic

IPC分类号： G06F19/00

CPC分类号： B22D11/161

摘要： A new start-up operation of a continuous caster is monitored by comparing itself with the normal start-up operation, which is benchmarked by a multivariate statistical model using selected historical operation data. If the new operation is statistically different from the benchmark, then alarms are generated to indicate an impending start cast breakout and at the same time, the process variables that lead to process excursions from the normal operation are identified as the most likely root causes of the predicted breakout. The model is built using Mult-way Principal Component Analysis technology to characterize the operation-to-operation variance in a reduced dimensional space (also known as latent variable space) based on a large number of process trajectories from past normal start-up operations. The process trajectories over the entire start cast duration are predicted based on the current observations. They are then synchronized by interpolating themselves based on pre-specified non-uniform synchronization scales in the strand length such that all trajectories can be aligned with respect to the strand length for further use in model development.

摘要翻译： 通过与正常启动操作进行比较来监控连续施法者的新启动操作，该操作由使用所选历史操作数据的多变量统计模型进行基准测试。 如果新操作与基准测量具有统计学差异，则生成报警以指示即将开始的投入突破，同时，导致正常操作过程偏差的过程变量被识别为最可能的根本原因 预测突破。 该模型使用多路主成分分析技术构建，以基于过去正常启动操作中的大量过程轨迹来表征减小维空间（也称为潜在可变空间）中的操作变化方差。 根据当前的观察结果预测整个起始持续时间的过程轨迹。 然后，它们通过基于在线长度中的预先规定的非均匀同步尺度进行内插自身进行同步，使得所有轨迹可以相对于线长度对准以便在模型开发中进一步使用。

公开(公告)号：US06885907B1

公开(公告)日：2005-04-26

申请号：US10854217

申请日：2004-05-27

申请人： Yale Zhang ,  Michael S. Dudzic

发明人： Yale Zhang ,  Michael S. Dudzic

IPC分类号： B22D11/16 ,  G06F19/00

CPC分类号： B22D11/16 ,  G05B23/024

摘要： A real-time system and method for online monitoring a transient operation in a continuous casting process. The transient operation refers to, but is not limited to, submerged entry nozzle changes, flying tundish changes, product grade changes, etc. This invention treats the aforementioned transient operations as batch processes and utilizes multiway principal component analysis to develop a multivariate statistical model to characterize normal process transitions based on carefully selected historical process data. Such a model is used by an online monitoring system to determine if a continuous caster transient operation is normal. This monitoring system can further be used to predict an impending breakout, one type of catastrophic process failures which may occur in a continuous casting process, during the transient operation. Process variables that are most likely related to the predicted breakout are identified by the system such that appropriate control actions can be taken to prevent an actual breakout occurrence.

摘要翻译： 用于在线监测连续铸造过程中的瞬态操作的实时系统和方法。 瞬态操作是指但不限于浸入式喷嘴变化，中间包间隙变化，产品等级变化等。本发明将上述瞬时操作视为批处理，并利用多路主成分分析开发多变量统计模型 基于仔细选择的历史过程数据来描述正常过程转换。 这种模型由在线监控系统用于确定连续脚轮瞬态操作是否正常。 该监测系统还可以用于预测在瞬时操作期间即将发生的突破，即连续铸造过程中可能发生的一种类型的灾难性过程故障。 最有可能与预测突破相关的过程变量由系统识别，从而可以采取适当的控制动作来防止实际的突围发生。

公开(公告)号：US06856719B2

公开(公告)日：2005-02-15

申请号：US10097112

申请日：2002-03-11

申请人： Lin T. Wang ,  Yale Zhang ,  Yuqiao Liu ,  Wei-Shin Tsay

发明人： Lin T. Wang ,  Yale Zhang ,  Yuqiao Liu ,  Wei-Shin Tsay

IPC分类号： G02B6/35 ,  H04J14/02 ,  H04Q11/00 ,  G02B6/26

CPC分类号： G02B6/3524 ,  G02B6/3528 ,  G02B6/3546 ,  G02B6/356 ,  H04J14/0206 ,  H04J14/0212 ,  H04J14/0213 ,  H04J14/0219 ,  H04Q11/0005 ,  H04Q11/0062 ,  H04Q2011/0024 ,  H04Q2011/0052 ,  H04Q2011/0081 ,  H04Q2011/0092

摘要： The inventions invention relates to a generic re-configurable WDM optical cross connection device which may be viewed as an optical network element comprising transport interfaces optionally along with tributary interfaces. An switch system includes a plurality of switch modules each essentially including a pair of R-channel input collimators on one side and a pair of R-channel output collimators on the other side with a switching prism moveably positioned therebetween in an existence/active or non-existence/inactive manner. A pair of input fibers are respectively connected to the two input collimators and an pair of output fibers are respectively connected t the two output collimators. A plurality of jumper fibers cascading said switch modules together.

摘要翻译： 本发明涉及一种通用的可重新配置的WDM光交叉连接设备，其可以被视为包括传输接口的光网络元件，其可选地与支路接口一起。 开关系统包括多个开关模块，每个开关模块主要包括一侧的一对R沟道输入准直器和另一侧的一对R沟道输出准直器，其中可移动地位于其间的存在/有源或非有源 - 存在/不活动的方式。 一对输入光纤分别连接到两个输入准直仪，一对输出光纤分别连接在两个输出准直器上。 多个跳线纤维将所述开关模块级联在一起。