公开(公告)号：US06664549B2

公开(公告)日：2003-12-16

申请号：US10182389

申请日：2002-07-29

申请人： Seiichiro Kobayashi ,  Koichi Koyanagi ,  Teruo Honda ,  Hideo Saeki ,  Masaharu Motohashi

发明人： Seiichiro Kobayashi ,  Koichi Koyanagi ,  Teruo Honda ,  Hideo Saeki ,  Masaharu Motohashi

IPC分类号： H01L2168

CPC分类号： H01L21/6835 ,  B25B11/005 ,  G03F7/707 ,  H01L21/6838

摘要： In a wafer chuck for flatly vacuum-chucking a semiconductor wafer (11) supported by support pins (15) such that a pressure in a suction chamber (13) surrounded by an external wall (12), the upper surface of the external wall (12) is formed to be lower than the upper surfaces of the support pins, and the upper surface of the external wall (12) does not pressure the semiconductor wafer (11), a distance (L1) between the external wall (12) and closest support pins (15a) is up to 1.8 mm, and an alignment pitch. (L2) of the support pins (15) aligned inside the closest support pins (15a) to the external wall (12) is not more than 1.5 times of the distance (L1) between the external wall (12) and the closest support pins (15a).

摘要翻译： 在用于平坦地真空夹持由支撑销（15）支撑的半导体晶片（11）的晶片卡盘中，使得由外壁（12）包围的吸入室（13）中的压力，外壁的上表面 12）形成为比支撑销的上表面低，外壁（12）的上表面不对半导体晶片（11）施加压力，外壁（12）和 最靠近的支撑销（15a）高达1.8mm，并且具有对准间距。 排列在最靠近的支撑销（15a）内的支撑销（15）的外壁（12）的外径（L2）不大于外壁（12）和最靠近的支承销之间的距离（L1）的1.5倍 （15a）。

公开(公告)号：US4960658A

公开(公告)日：1990-10-02

申请号：US260870

申请日：1988-10-21

申请人： Masahiko Ikeno ,  Hideo Saeki

发明人： Masahiko Ikeno ,  Hideo Saeki

IPC分类号： H01L27/14 ,  B05C3/09 ,  B05C3/109 ,  G02B5/20

CPC分类号： B05C3/109 ,  B05C3/09

摘要： A color filter dyeing apparatus for dyeing a color filter formed on a substrate comprises a chuck for holding the substrate on which the color filter is mounted, a dyeing solution receptacle in intimate engagement, by means of a sealing member, with the chuck or the substrate, and forming a container for containing the color filter therein, an inlet for supplying the dyeing solution into the container, and means for discharging the dyeing solution from the container.

公开(公告)号：US4745327A

公开(公告)日：1988-05-17

申请号：US830131

申请日：1986-02-18

申请人： Hideo Saeki ,  Shigeyuki Uematsu

发明人： Hideo Saeki ,  Shigeyuki Uematsu

IPC分类号： G02B5/20 ,  H01J29/89 ,  H01L27/14 ,  H01J29/10 ,  H01J31/26

CPC分类号： B82Y30/00 ,  H01J29/898

摘要： A color separation filter is formed through use of dyestuffs provided with monomolecular film forming properties in which molecules can be adsorbed by air-water interfaces and with patterning properties capable of forming patterns through exposure by ionizing radiations. A method of manufacturing a color separation filter comprises a step of forming monomolecular films of dyestuffs provided with monomolecular film forming properties and patterning properties, a step of piling a plurality of monomolecular films to form cumulative films and a step of patterning the cumulative films by radiating ionizing radiations to the cumulative films.

摘要翻译： 通过使用具有单分子膜形成性质的染料形成分色滤色片，其中分子可以通过空气 - 水界面吸附，并具有能够通过电离辐射曝光形成图案的图案特性。 制造分色滤光器的方法包括形成具有单分子膜形成性和图案化性质的染料单分子膜的步骤，堆叠多个单分子膜以形成累积膜的步骤和通过辐射来对累积膜图案化的步骤 电离辐射到累积膜。

公开(公告)号：US4259407A

公开(公告)日：1981-03-31

申请号：US060593

申请日：1979-07-25

申请人： Tsukasa Tada ,  Yuzo Shimazaki ,  Masanobu Kohda ,  Hirohisa Kato ,  Hideo Saeki

发明人： Tsukasa Tada ,  Yuzo Shimazaki ,  Masanobu Kohda ,  Hirohisa Kato ,  Hideo Saeki

IPC分类号： G03F7/004 ,  C08F2/46 ,  C08F20/00 ,  C08F20/10 ,  C08F20/22 ,  C08F20/26 ,  G03F7/039 ,  B32B27/16 ,  B32B27/30 ,  C08F14/18

CPC分类号： G03F7/039 ,  Y10T428/3154

摘要： A radiation-sensitive positive resist which is prepared from a homogeneous polymer of any one of the various forms of halogenated alkyl .alpha.-halogenated acrylate expressed by the general structural formula: ##STR1## where: X = fluorine, chlorine or bromineR = alkyl group in which one or more hydrogen atoms are substituted by the corresponding number of fluorine atoms, or aryl group in which said substitution takes place, or alkoxy group in which said substitution takes place, or a copolymer of two or more of the monomers expressed by said general structural formula or a copolymer of any one of said monomers and any one of the different forms of vinyl monomer from those expressed by said general structural formula.

摘要翻译： 由通式结构式表示的各种形式的卤代烷基α-卤代丙烯酸酯的均匀聚合物制备的辐射敏感正性抗蚀剂：其中：X =氟，氯或溴R =烷基 其中一个或多个氢原子被相应数目的氟原子取代，或其中发生所述取代的芳基或发生所述取代的烷氧基，或由所述 所述单体和任意一种不同形式的乙烯基单体的共聚物与所述通式结构式表示的那些。

公开(公告)号：US4025037A

公开(公告)日：1977-05-24

申请号：US581621

申请日：1975-05-28

申请人： Kyoichi Shibayama ,  Hiroshi Ono ,  Eiki Jidai ,  Hideo Saeki

发明人： Kyoichi Shibayama ,  Hiroshi Ono ,  Eiki Jidai ,  Hideo Saeki

IPC分类号： B23K35/22 ,  C09D5/44 ,  H01B3/44 ,  H01B7/18 ,  H01B13/06 ,  B23K1/02 ,  C25D13/06

CPC分类号： C09D5/4411 ,  B23K35/226 ,  H01B13/065 ,  H01B3/447 ,  H01B7/18 ,  Y10S228/904

摘要： A process for soldering a metal substrate coated with an electrodeposited non-peelable coating comprising 35-65 wt parts of methacryl ester, 10-40 wt parts of acrylonitrile, 2-15 wt parts of methacrylic acid, 3-10 wt parts of acrylamide and/or vinyl acetate, in 100 parts of resin.

摘要翻译： 一种焊接涂有电解不可剥离涂层的金属基材的方法，包括35-65重量份甲基丙烯酸酯，10-40重量份丙烯腈，2-15重量份甲基丙烯酸，3-10重量份丙烯酰胺和 /或乙酸乙烯酯，在100份树脂中。

公开(公告)号：US5155060A

公开(公告)日：1992-10-13

申请号：US656725

申请日：1991-02-19

申请人： Masahiko Ikeno ,  Hideo Saeki ,  Hiroshi Kawashima

发明人： Masahiko Ikeno ,  Hideo Saeki ,  Hiroshi Kawashima

IPC分类号： H01L21/312 ,  H01L27/148 ,  H01L31/0216

CPC分类号： H01L27/14825 ,  H01L21/312 ,  H01L31/02162

摘要： A photoresist of sufficient thickness to fill a scribe line is applied to an entire substrate. The photoresist is exposed through a photomask having a pattern corresponding to the scribe line and then developed. A photosensitized gelatin is applied by spincoating on the flat substrate obtained in this process, pattern and then dyed, to obtain a color filter array.

公开(公告)号：US4824748A

公开(公告)日：1989-04-25

申请号：US158848

申请日：1988-02-22

申请人： Hideo Saeki ,  Shigeyuki Uematsu

发明人： Hideo Saeki ,  Shigeyuki Uematsu

IPC分类号： G02B5/20 ,  H01J29/89 ,  H01L27/14 ,  G03F9/00

CPC分类号： B82Y30/00 ,  H01J29/898

摘要： A color separation filter which is formed through use of dyestuffs provided with monomolecular film forming properties in which molecules can be absorbed by air-water interfaces and patterning properties capable of forming patterns through exposure by ionizing radiations. A method of manufacturing a color separation filter which comprises a step of forming monomolecular films of dyestuffs provided with monomolecular film forming properties and patterning properties, a step of piling a plurality of monomolecular films to form cumulative films and a step of patterning the cumulative films by radiating ionizing radiations to the cumulative films.

摘要翻译： 通过使用具有单分子膜形成性质的染料形成的分色过滤器，其中分子可以通过空气 - 水界面吸收，并且能够通过电离辐射曝光形成图案的图案特性。 一种制造分色滤光器的方法，其包括形成具有单分子成膜性和图案化性质的染料的单分子膜的步骤，堆叠多个单分子膜以形成累积膜的步骤以及通过 向累积膜辐射电离辐射。

公开(公告)号：US5135891A

公开(公告)日：1992-08-04

申请号：US297623

申请日：1989-01-17

申请人： Masahiko Ikeno ,  Hideo Saeki ,  Hiroshi Kawashima

发明人： Masahiko Ikeno ,  Hideo Saeki ,  Hiroshi Kawashima

IPC分类号： H01L21/312 ,  H01L27/148 ,  H01L31/0216

CPC分类号： H01L27/14825 ,  H01L21/312 ,  H01L31/02162

摘要： A photoresist of sufficient thickness to fill a scribe line is applied on an entire substrate. Then, the photoresist is exposed through a photomask having a pattern corresponding to the scribe line and is thereafter developed. A photosensitized gelatin is applied by spin-coating on the flat substrate obtained in this process, patterned, and then dyed, to obtain a color filter array.

摘要翻译： 将足够厚度的用于填充划线的光致抗蚀剂施加在整个基板上。 然后，通过具有对应于划线的图案的光掩模曝光光致抗蚀剂，然后显影。 通过旋转涂布将光敏明胶施加在在该方法中获得的平坦基底上，经图案化，然后染色，以获得滤色器阵列。

公开(公告)号：US5079595A

公开(公告)日：1992-01-07

申请号：US428552

申请日：1989-10-30

申请人： Shoji Suzuki ,  Hideo Saeki

发明人： Shoji Suzuki ,  Hideo Saeki

IPC分类号： B05D1/20 ,  C09K3/00 ,  C30B7/00 ,  C30B7/04 ,  C30B29/54 ,  G01J1/42 ,  G01N27/12 ,  G01N27/30 ,  H01L29/78 ,  H01L29/786 ,  H01L29/86 ,  H01L49/02 ,  H01L51/00 ,  H01L51/05 ,  H01L51/30 ,  H01L51/40 ,  H01L51/42 ,  H03K17/56

CPC分类号： H01L51/0078 ,  B05D1/202 ,  B82Y30/00 ,  B82Y40/00 ,  C30B29/54 ,  C30B29/58 ,  C30B7/00 ,  G01N27/126 ,  H01L51/0002 ,  H01L51/0075 ,  H01L51/0504 ,  H01L51/0508 ,  H01L51/42 ,  Y02E10/549

摘要： A method for manufacturing an organic semiconductor thin film (24) having an improved characteristic as a semiconductor is provided. A phthalocyanine compound having amino groups is mixed with stearic acid to form a bonded substance capable of being dissolved in an organic solvent. Then, an organic solution is made by dissolving this bonded substance in the organic solvent. By developing this organic solution on a water (20) surface, the thin layer (23) of this bonded substance is formed on the water (20) surface. Thereafter, this thin layer is moved onto a substrate (30) and accumulated to be deposited on the substrate (30). Next, the stearic acid is volatilized and removed from the above described thin film (23) deposited on the substrate (30) by baking the whole substrate. The thus structured organic semiconductor thin film (24) is used as a semiconductor material such as a photoelectric transfer device, a gas sensor, a transistor and the like.

摘要翻译： 提供了具有改进的特性作为半导体的有机半导体薄膜（24）的制造方法。 将具有氨基的酞菁化合物与硬脂酸混合以形成能够溶解在有机溶剂中的粘合物质。 然后，通过将该粘合物质溶解在有机溶剂中而形成有机溶液。 通过在水（20）表面上显影该有机溶液，该粘合物质的薄层（23）形成在水（20）表面上。 此后，将该薄层移动到基板（30）上并积累以沉积在基板（30）上。 接下来，通过烘烤整个基材，将硬脂酸挥发并从上述沉积在基材（30）上的薄膜（23））中除去。 这样构成的有机半导体薄膜（24）用作光电转移装置，气体传感器，晶体管等半导体材料。

公开(公告)号：US4821675A

公开(公告)日：1989-04-18

申请号：US941042

申请日：1986-12-12

申请人： Masahiko Ikeno ,  Hideo Saeki

发明人： Masahiko Ikeno ,  Hideo Saeki

IPC分类号： H01L27/14 ,  B05C3/09 ,  B05C3/109 ,  G02B5/20 ,  B05C11/00

CPC分类号： B05C3/109 ,  B05C3/09

摘要： A color filter dyeing apparatus for dyeing a color filter formed on a substrate comprises a chuck for holding the substrate on which the color filter is mounted, a dyeing solution receptacle in intimate engagement, by means of a sealing member, with the chuck or the substrate, and forming a container for containing the color filter therein, an inlet for supplying the dyeing solution into the container, and means for discharging the dyeing solution from the container.

摘要翻译： 用于对形成在基板上的滤色器进行染色的滤色器染色装置包括：卡盘，用于通过密封部件与卡盘或基板一起保持其上安装有滤色器的基板，紧密接合的染色溶液容器 并且形成用于容纳滤色器的容器，用于将染色溶液供应到容器中的入口以及用于将染色溶液从容器排出的装置。