Method of producing lightweight structural elements
    2.
    发明授权
    Method of producing lightweight structural elements 有权
    生产轻型结构件的方法

    公开(公告)号:US09550696B2

    公开(公告)日:2017-01-24

    申请号:US14000427

    申请日:2012-02-09

    摘要: The invention relates to a method of producing lightweight structural elements which are produced as a composition construction element having at least one cover plate and one carrier element which are connected to one another. A carrier element, at which at least one apertures and/or at least one cut-out is/are formed and at least one further element, which is a cover plate, are connected to one another. A carrier element and at least one cover plate can be formed from a glass, a glass ceramic material, a ceramic material and/or silicon having an oxide surface layer which is formed at least in the bonding region of the elements to be connected to one another. The carrier element should have at least a double thickness with respect to the thickness of a cover plate. The surfaces of the cover plate(s) and of the carrier element to be connected to one another should be intensely cleaned in their bonding regions and should be smoothed such that a roughness of the surface is achieved there, such that they are in direct touching contact with at least 80% of their bonding surface with an active compression source and in this respect a thermal treatment is carried out at a temperature of at least 100° C. and maintaining of the temperature over a period of at least 0.5 h to establish a bond connection of the cover plate(s) and the carrier element. In this respect, at least one cover plate should be connected to a surface of the carrier element at which at least one opening of an aperture or of a cut-out is arranged.

    摘要翻译: 本发明涉及一种生产轻质结构元件的方法,该方法是作为具有彼此连接的至少一个盖板和一个载体元件的组合物构造元件而制造的。 至少一个孔和/或至少一个切口被形成的载体元件和作为盖板的至少一个另外的元件彼此连接。 载体元件和至少一个盖板可以由玻璃,玻璃陶瓷材料,陶瓷材料和/或具有氧化物表面层的硅形成,所述氧化物表面层至少形成在要连接到元件的元件的接合区域中 另一个。 载体元件应当相对于盖板的厚度具有至少两倍的厚度。 要连接的盖板和载体元件的表面应在其接合区域进行强烈清洁,并应平滑,以使表面的粗糙度达到,使其直接接触 与至少80%的粘合表面与活性压缩源接触,在这方面热处理在至少100℃的温度下进行,并保持温度至少0.5小时以建立 盖板和载体元件的接合连接。 在这方面,至少一个盖板应该连接到载体元件的表面,在该表面上布置有孔或切口的至少一个开口。

    Method for the siliceous bonding of coated and uncoated optical bodies
    4.
    发明授权
    Method for the siliceous bonding of coated and uncoated optical bodies 有权
    涂层和未涂层​​光学体的硅质粘结方法

    公开(公告)号:US09233873B2

    公开(公告)日:2016-01-12

    申请号:US13697253

    申请日:2011-05-09

    摘要: The present invention pertains to a process for the silicate bonding of joined surfaces, facing one another, of two components by means of an aqueous, alkaline, silicon-cation-containing joining solution for the purpose of producing an optical element, characterized in that one or both of said joined surfaces (1; 2b; 10) are covered with a layer of an oxide (3), which has a higher refractive index than SiO2 and is selected from among oxides of the third and fourth main group elements, of the second and third group of the transition elements as well as zirconium and from among mixed oxides of the said elements, whereupon the joining solution is applied to at least one of the surfaces to be joined and the surfaces are bonded to one another. The present invention also teaches the use of oxide layer (3) as a topmost layer of a component to be joined by means of an alkaline, silicate-containing solution for preventing or reducing opacifications and/or defects as a result of a chemical attack on the layer lying under it by the said alkaline solution.

    摘要翻译: 本发明涉及一种通过含水,碱性,含硅阳离子的接合溶液将两个组分相互面对的硅酸盐接合的方法,用于制造光学元件,其特征在于,一个 或者两个所述接合表面(1; 2b; 10)被一层氧化物(3)覆盖,所述氧化物层具有比SiO 2更高的折射率并且选自第三和第四主要元素的氧化物, 第二和第三组过渡元素以及锆和从所述元素的混合氧化物中分离,由此将接合溶液施加到待接合的表面中的至少一个并且表面彼此结合。 本发明还教导了使用氧化物层(3)作为通过含碱性硅酸盐的溶液连接的组分的最上层,以防止或减少由于化学侵蚀导致的不透明和/或缺陷 该层位于其下方的所述碱性溶液中。

    METHOD FOR THE SILICEOUS BONDING OF COATED AND UNCOATED OPTICAL BODIES
    5.
    发明申请
    METHOD FOR THE SILICEOUS BONDING OF COATED AND UNCOATED OPTICAL BODIES 有权
    涂层和未结合光学体系的粘结方法

    公开(公告)号:US20130048214A1

    公开(公告)日:2013-02-28

    申请号:US13697253

    申请日:2011-05-09

    IPC分类号: B32B37/12 B05D5/06

    摘要: The present invention pertains to a process for the silicate bonding of joined surfaces, facing one another, of two components by means of an aqueous, alkaline, silicon-cation-containing joining solution for the purpose of producing an optical element, characterized in that one or both of said joined surfaces (1; 2b; 10) are covered with a layer of an oxide (3), which has a higher refractive index than SiO2 and is selected from among oxides of the third and fourth main group elements, of the second and third group of the transition elements as well as zirconium and from among mixed oxides of the said elements, whereupon the joining solution is applied to at least one of the surfaces to be joined and the surfaces are bonded to one another. The present invention also teaches the use of oxide layer (3) as a topmost layer of a component to be joined by means of an alkaline, silicate-containing solution for preventing or reducing opacifications and/or defects as a result of a chemical attack on the layer lying under it by the said alkaline solution.

    摘要翻译: 本发明涉及一种通过含水,碱性,含硅阳离子的接合溶液将两个组分相互面对的硅酸盐接合的方法,用于制造光学元件,其特征在于,一个 或者两个所述接合表面(1; 2b; 10)被一层氧化物(3)覆盖,所述氧化物层具有比SiO 2更高的折射率并且选自第三和第四主要元素的氧化物, 第二和第三组过渡元素以及锆和从所述元素的混合氧化物中分离,由此将接合溶液施加到待接合的表面中的至少一个并且表面彼此结合。 本发明还教导了使用氧化物层(3)作为通过含碱性硅酸盐的溶液连接的组分的最上层,以防止或减少由于化学侵蚀导致的不透明和/或缺陷 该层位于其下方的所述碱性溶液中。

    Electrostatic Chuck With Anti-Reflective Coating, Measuring Method and Use of Said Chuck
    6.
    发明申请
    Electrostatic Chuck With Anti-Reflective Coating, Measuring Method and Use of Said Chuck 有权
    具有防反射涂层的静电卡盘,所述卡盘的测量方法和用途

    公开(公告)号:US20090279101A1

    公开(公告)日:2009-11-12

    申请号:US12436252

    申请日:2009-05-06

    IPC分类号: G01B11/02 H01L21/683

    摘要: The embodiments disclosed herein relate to an electrostatic chuck, or an optically structured element or an optical mask that comprise a metal film as well as a transparent cover applied on a substrate. At least two anti-reflective films are inserted between the metal film and the cover that reduce the reflectance of the metal film, as viewed from the surface, to almost zero. As a result, a direct interferometer measurement of the surface structure of the transparent cover is possible. Methods measurement and of use are also disclosed.

    摘要翻译: 本文公开的实施例涉及一种静电卡盘或者包含金属膜的光学结构元件或光学掩模以及施加在基板上的透明盖。 在金属膜和盖之间插入至少两个抗反射膜,从表面看,金属膜的反射率几乎为零。 结果,透明盖的表面结构的直接干涉仪测量是可能的。 还公开了方法的测量和使用。

    METHOD OF PRODUCING LIGHTWEIGHT STRUCTURAL ELEMENTS
    8.
    发明申请
    METHOD OF PRODUCING LIGHTWEIGHT STRUCTURAL ELEMENTS 有权
    生产轻型结构元件的方法

    公开(公告)号:US20130327093A1

    公开(公告)日:2013-12-12

    申请号:US14000427

    申请日:2012-02-09

    IPC分类号: C03B23/203

    摘要: The invention relates to a method of producing lightweight structural elements which are produced as a composition construction element having at least one cover plate and one carrier element which are connected to one another. A carrier element, at which at least one apertures and/or at least one cut-out is/are formed and at least one further element, which is a cover plate, are connected to one another. A carrier element and at least one cover plate can be formed from a glass, a glass ceramic material, a ceramic material and/or silicon having an oxide surface layer which is formed at least in the bonding region of the elements to be connected to one another. The carrier element should have at least a double thickness with respect to the thickness of a cover plate. The surfaces of the cover plate(s) and of the carrier element to be connected to one another should be intensely cleaned in their bonding regions and should be smoothed such that a roughness of the surface is achieved there, such that they are in direct touching contact with at least 80% of their bonding surface with an active compression source and in this respect a thermal treatment is carried out at a temperature of at least 100° C. and maintaining of the temperature over a period of at least 0.5 h to establish a bond connection of the cover plate(s) and the carrier element. In this respect, at least one cover plate should be connected to a surface of the carrier element at which at least one opening of an aperture or of a cut-out is arranged.

    摘要翻译: 本发明涉及一种生产轻质结构元件的方法,该方法是作为具有彼此连接的至少一个盖板和一个载体元件的组合物构造元件而制造的。 至少一个孔和/或至少一个切口被形成的载体元件和作为盖板的至少一个另外的元件彼此连接。 载体元件和至少一个盖板可以由玻璃,玻璃陶瓷材料,陶瓷材料和/或具有氧化物表面层的硅形成,所述氧化物表面层至少形成在要连接到元件的元件的接合区域中 另一个。 载体元件应当相对于盖板的厚度具有至少两倍的厚度。 要连接的盖板和载体元件的表面应在其接合区域进行强烈清洁,并应平滑,以使表面的粗糙度达到,使其直接接触 与至少80%的粘合表面与活性压缩源接触,在这方面热处理在至少100℃的温度下进行,并保持温度至少0.5小时以建立 盖板和载体元件的接合连接。 在这方面,至少一个盖板应该连接到载体元件的表面,在该表面上布置有孔或切口的至少一个开口。

    Flexibly deformable holding element for substrates
    9.
    发明授权
    Flexibly deformable holding element for substrates 有权
    用于基板的可变形保持元件

    公开(公告)号:US08274640B2

    公开(公告)日:2012-09-25

    申请号:US12565121

    申请日:2009-09-23

    IPC分类号: G03B27/58 H01L21/683

    CPC分类号: H01L21/68728 H01L21/6831

    摘要: Flexibly deformable holding elements operate such that substrates can be held in a fixed manner at a surface of the holding element electrostatically or also by use of negative pressure and planar positional deviations or unwanted deformations can be compensated simply and reliably, where at least one cut-out having an opening arranged at the rear side is formed at the rear side of the holding element which is disposed opposite the surface, and an actuator is arranged there exerting compressive forces or pulling forces for a widening or narrowing of the cut-out and/or for a deformation of the holding element.

    摘要翻译: 柔性可变形的保持元件的操作使得基板可以静电地保持在保持元件的表面上,或者也可以通过使用负压和平面位置偏差来保持,或者可以简单可靠地补偿不需要的变形, 具有设置在后侧的开口形成在与表面相对设置的保持元件的后侧,并且致动器设置在施加有压力或拉力以使切口和/ 或用于保持元件的变形。

    ELECTROSTATICE CHUCK WITH ANTI-REFLECTIVE COATING, MEASURING METHOD AND USE OF SAID CHUCK
    10.
    发明申请
    ELECTROSTATICE CHUCK WITH ANTI-REFLECTIVE COATING, MEASURING METHOD AND USE OF SAID CHUCK 有权
    具有抗反射涂层的电动刹车,测量方法和使用卡车

    公开(公告)号:US20100046005A1

    公开(公告)日:2010-02-25

    申请号:US12445798

    申请日:2007-10-16

    IPC分类号: G01B11/24

    CPC分类号: G01C11/06 G01B11/2545

    摘要: The invention relates to a device for the contactless detection of a three-dimensional contour, comprising a projector with an imaging element and a projection lens for depicting a stripe pattern that is generated on the imaging element in an object space. The invention further comprises a camera arrangement for the surveillance of the object space from two different directions, having two camera lenses. The projector and the camera arrangement are housed together in a measurement head that can be handheld. The invention further relates to a method for detecting a three-dimensional contour using said device.

    摘要翻译: 本发明涉及一种用于三维轮廓的非接触检测的装置,包括具有成像元件的投影仪和用于描绘在物体空间中在成像元件上产生的条纹图案的投影透镜。 本发明还包括用于从具有两个相机透镜的两个不同方向监视物​​体空间的照相机装置。 投影仪和相机装置一起放置在可以手持的测量头中。 本发明还涉及使用所述装置检测三维轮廓的方法。