公开(公告)号：US20100046005A1

公开(公告)日：2010-02-25

申请号：US12445798

申请日：2007-10-16

申请人： Gerhard Kalkowski ,  Olaf Stenzel ,  Wieland Stöckl

发明人： Gerhard Kalkowski ,  Olaf Stenzel ,  Wieland Stöckl

IPC分类号： G01B11/24

CPC分类号： G01C11/06 ,  G01B11/2545

摘要： The invention relates to a device for the contactless detection of a three-dimensional contour, comprising a projector with an imaging element and a projection lens for depicting a stripe pattern that is generated on the imaging element in an object space. The invention further comprises a camera arrangement for the surveillance of the object space from two different directions, having two camera lenses. The projector and the camera arrangement are housed together in a measurement head that can be handheld. The invention further relates to a method for detecting a three-dimensional contour using said device.

摘要翻译： 本发明涉及一种用于三维轮廓的非接触检测的装置，包括具有成像元件的投影仪和用于描绘在物体空间中在成像元件上产生的条纹图案的投影透镜。 本发明还包括用于从具有两个相机透镜的两个不同方向监视物​​体空间的照相机装置。 投影仪和相机装置一起放置在可以手持的测量头中。 本发明还涉及使用所述装置检测三维轮廓的方法。

公开(公告)号：US08081317B2

公开(公告)日：2011-12-20

申请号：US12436252

申请日：2009-05-06

申请人： Gerhard Kalkowski ,  Olaf Stenzel ,  Wieland Stöckl

发明人： Gerhard Kalkowski ,  Olaf Stenzel ,  Wieland Stöckl

IPC分类号： G01B11/02 ,  F23Q3/00

CPC分类号： H01L21/6833 ,  G03F1/46 ,  G03F1/50 ,  G03F7/70708 ,  G03F7/70958 ,  H01L21/68757 ,  H02N13/00

摘要： The embodiments disclosed herein relate to an electrostatic chuck, or an optically structured element or an optical mask that comprise a metal film as well as a transparent cover applied on a substrate. At least two anti-reflective films are inserted between the metal film and the cover that reduce the reflectance of the metal film, as viewed from the surface, to almost zero. As a result, a direct interferometer measurement of the surface structure of the transparent cover is possible. Methods of measurement and of use are also disclosed.

摘要翻译： 本文公开的实施例涉及一种静电卡盘或者包含金属膜的光学结构元件或光学掩模以及施加在基板上的透明盖。 在金属膜和盖之间插入至少两个抗反射膜，从表面看，金属膜的反射率几乎为零。 结果，透明盖的表面结构的直接干涉仪测量是可能的。 还公开了测量和使用方法。