Virtually substrate-less composite power semiconductor device
    4.
    发明授权
    Virtually substrate-less composite power semiconductor device 有权
    几乎无衬底的复合功率半导体器件

    公开(公告)号:US08796858B2

    公开(公告)日:2014-08-05

    申请号:US13488424

    申请日:2012-06-04

    申请人: Tao Feng Yueh-Se Ho

    发明人: Tao Feng Yueh-Se Ho

    IPC分类号: H01L23/48

    摘要: A virtually substrate-less composite power semiconductor device (VSLCPSD) and method are disclosed. The VSLCPSD has a power semiconductor device (PSD), a front-face device carrier (FDC) made out of a carrier material and an intervening bonding layer (IBL). Both carrier and IBL material can be conductive or non-conductive. The PSD has back substrate portion, front semiconductor device portion with patterned front-face device metallization pads and a virtually diminishing thickness TPSD. The FDC has patterned back-face carrier metallizations contacting the front-face device metallization pads, patterned front-face carrier metallization pads and numerous parallelly connected through-carrier conductive vias respectively connecting the back-face carrier metallizations to the front-face carrier metallization pads. The FDC thickness TFDC is large enough to provide structural rigidity to the VSLCPSD. The diminishing thickness TPSD effects a low back substrate resistance and the through-carrier conductive vias effect a low front-face contact resistance to the front-face device metallization pads.

    摘要翻译: 公开了一种实际上无衬底的复合功率半导体器件(VSLCPSD)和方法。 VSLCPSD具有功率半导体器件(PSD),由载体材料制成的正面器件载体(FDC)和中间键合层(IBL)。 载体和IBL材料都可以是导电的或不导电的。 PSD具有后衬底部分,具有图案化前面装置金属化焊盘的前半导体器件部分和实际上减小的厚度TPSD。 FDC具有接触前表面器件金属化焊盘,图案化前面载体金属化焊盘和多个并联连接的贯穿载体导电通孔的图案化背面载体金属化,其分别将背面载体金属化物连接到前面载体金属化焊盘 。 FDC厚度TFDC足够大以向VSLCPSD提供结构刚度。 厚度减小的TPSD会影响背面的底层电阻,并且贯穿载体的导电通孔会对前面装置的金属化焊盘产生低的前端接触电阻。

    Wide and deep oxide trench in a semiconductor substrate with interspersed vertical oxide ribs
    7.
    发明授权
    Wide and deep oxide trench in a semiconductor substrate with interspersed vertical oxide ribs 有权
    在半导体衬底中具有散射的垂直氧化物肋的宽和深的氧化物沟槽

    公开(公告)号:US08642429B2

    公开(公告)日:2014-02-04

    申请号:US13537493

    申请日:2012-06-29

    IPC分类号: H01L21/336 H01L27/088

    摘要: A semiconductor device structure with an oxide-filled large deep trench (OFLDT) portion having trench size TCS and trench depth TCD is disclosed. A bulk semiconductor layer (BSL) is provided with a thickness BSLT>TCD. A large trench top area (LTTA) is mapped out atop BSL with its geometry equal to OFLDT. The LTTA is partitioned into interspersed, complementary interim areas ITA-A and ITA-B. Numerous interim vertical trenches of depth TCD are created into the top BSL surface by removing bulk semiconductor materials corresponding to ITA-B. The remaining bulk semiconductor materials corresponding to ITA-A are converted into oxide. If any residual space is still left between the so-converted ITA-A, the residual space is filled up with oxide deposition. Importantly, the geometry of all ITA-A and ITA-B should be configured simple and small enough to facilitate fast and efficient processes of oxide conversion and oxide filling.

    摘要翻译: 公开了具有沟槽尺寸TCS和沟槽深度TCD的具有氧化物填充的大深沟槽(OFLDT)部分的半导体器件结构。 体积半导体层(BSL)设置有厚度BSLT> TCD。 一个大的沟槽顶部区域(LTTA)映射到BSL顶部,其几何形状等于OFLDT。 LTTA被划分为散置的,互补的临时区域ITA-A和ITA-B。 通过去除对应于ITA-B的散装半导体材料,在顶部BSL表面上形成了许多深度TCD的临时垂直沟槽。 对应于ITA-A的剩余体积半导体材料被转化为氧化物。 如果在经过转换的ITA-A之间仍然留有剩余空间,则剩余空间被氧化物沉积填满。 重要的是,所有ITA-A和ITA-B的几何形状都应该被简单而小型化,以便于快速有效地进行氧化物转换和氧化物填充。

    Termination structure with multiple embedded potential spreading capacitive structures for trench MOSFET and method
    8.
    发明授权
    Termination structure with multiple embedded potential spreading capacitive structures for trench MOSFET and method 有权
    具有多个嵌入式电位扩展电容结构的端接结构,用于沟槽MOSFET和方法

    公开(公告)号:US08399925B2

    公开(公告)日:2013-03-19

    申请号:US12704528

    申请日:2010-02-12

    IPC分类号: H01L29/66

    摘要: A termination structure with multiple embedded potential spreading capacitive structures (TSMEC) and method are disclosed for terminating an adjacent trench MOSFET atop a bulk semiconductor layer (BSL) with bottom drain electrode. The BSL has a proximal bulk semiconductor wall (PBSW) supporting drain-source voltage (DSV) and separating TSMEC from trench MOSFET. The TSMEC has oxide-filled large deep trench (OFLDT) bounded by PBSW and a distal bulk semiconductor wall (DBSW). The OFLDT includes a large deep oxide trench into the BSL and embedded capacitive structures (EBCS) located inside the large deep oxide trench and between PBSW and DBSW for spatially spreading the DSV across them. In one embodiment, the EBCS contains interleaved conductive embedded polycrystalline semiconductor regions (EPSR) and oxide columns (OXC) of the OFLDT, a proximal EPSR next to PBSW is connected to an active upper source region and a distal EPSR next to DBSW is connected to the DBSW.

    摘要翻译: 公开了具有多个嵌入式电位扩展电容结构(TSMEC)和方法的端接结构,用于在具有底部漏电极的体半导体层(BSL)的顶部端接邻近的沟槽MOSFET。 BSL具有支持漏极 - 源极电压(DSV)的近端体半导体壁(PBSW),并将TSMEC与沟槽MOSFET分离。 TSMEC具有由PBSW和远端体半导体壁(DBSW)界定的氧化物填充的大深沟槽(OFLDT)。 OFLDT包括位于大深度氧化物沟槽内部以及PBSW和DBSW之间的BSL中的大型深层氧化物沟槽和嵌入式电容结构(EBCS),用于在其间空间扩展DSV。 在一个实施例中,EBCS包含OFLDT的交错导电嵌入式多晶半导体区域(EPSR)和氧化物柱(OXC),与PBSW相邻的近端EPSR连接到活动上部源区域,并且与DBSW相邻的远端EPSR被连接到 星展集团

    Current limiting load switch with dynamically generated tracking reference voltage
    10.
    发明授权
    Current limiting load switch with dynamically generated tracking reference voltage 有权
    限流负载开关动态产生跟踪参考电压

    公开(公告)号:US07728655B2

    公开(公告)日:2010-06-01

    申请号:US12249162

    申请日:2008-10-10

    IPC分类号: G05F3/02

    CPC分类号: H03K17/166 H03K17/0822

    摘要: A current limiting load switch for bridging supply Vss and load with a reference voltage VRdt dynamically generated by a VRdt-generator is proposed. It includes: A pair of power FET and sense FET interconnected in split-current configuration. The FET pair develops a load voltage while limiting load current Iload to a preset maximum Imax. The FET pair is sized to draw device currents Ipower and Is with RATIOI=Is/Ipower

    摘要翻译: 提出了一种用于桥接电源Vss和负载由VRdt发生器动态生成的参考电压VRdt的限流负载开关。 它包括:分流电流互连的一对功率FET和感测FET。 FET对产生负载电压,同时将负载电流Iload限制在预设的最大值Imax。 FET对的大小可以用RATIOI = Is / Ipower << 1来绘制器件电流Ipower和Is。 感测FET高端端子通过检测电阻Rsense耦合到Vss,感测电压Vs = Is×Rsense。 一个电流限制放大器,其输入连接到VRdt和Vs,并且输出控制FET对封闭限流反馈回路。 VRdt发生器动态地调整VRdt并发和补偿,这是由于感测FET操作转换引起的改变RATIOI的不良影响,从而消除了Imload以外的Iload的过渡过冲。