公开(公告)号：US20170168089A1

公开(公告)日：2017-06-15

申请号：US15445779

申请日：2017-02-28

Applicant: Oxford Instruments Asylum Research, Inc.

Inventor： Mario Viani ,  Roger Proksch ,  Maarten Rutgers ,  Jason Cleveland ,  Jim Hodgson

IPC: G01Q30/10 ,  G01Q30/20

CPC classification number: G01Q30/10 ,  G01Q10/00 ,  G01Q30/12 ,  G01Q30/18 ,  G01Q30/20

Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.

公开(公告)号：US20170059465A1

公开(公告)日：2017-03-02

申请号：US15119635

申请日：2015-02-13

Applicant: University of Huddersfield

Inventor： Michael Reading

IPC: G01N13/00 ,  G01Q30/14 ,  G02B21/00 ,  G01N30/06 ,  G01Q30/04 ,  G01Q60/24 ,  G01N21/3577 ,  G01Q30/20 ,  H01J37/26

CPC classification number: G01N13/00 ,  G01N21/3577 ,  G01N30/06 ,  G01N2201/12 ,  G01Q30/04 ,  G01Q30/14 ,  G01Q30/20 ,  G01Q60/24 ,  G02B21/00 ,  G02B21/33 ,  H01J37/261

Abstract: An apparatus and method of analysis including at least one microscope means operable to characterize the surface of a sample in use, at least a first conduit to convey one or more solvents to the sample and a further conduit to convey at least part of the solution from the sample. At least one pump means delivers solvent to the sample and/or removes solution from the same.

Abstract translation: 一种分析装置和方法，包括至少一个可操作以表征使用中的样品表面的显微镜装置，至少第一导管，用于将一种或多种溶剂输送到样品，以及另外的导管，将至少部分溶液从 例子。 至少一个泵装置将溶剂输送到样品和/或从其中去除溶液。

公开(公告)号：US09279849B2

公开(公告)日：2016-03-08

申请号：US14828594

申请日：2015-08-18

Applicant: International Business Machines Corporation

Inventor： Terence L. Kane ,  John M. Walsh

IPC: G01R31/26 ,  G01Q30/20

CPC classification number: G01R31/2644 ,  G01N1/32 ,  G01Q30/20 ,  G01Q60/40 ,  G01R31/2621 ,  G01R31/2898 ,  H01J37/317 ,  H01J2237/31749 ,  H01L22/14 ,  H01L22/20

Abstract: A method for atom probe tomography (APT) sample preparation from a three-dimensional (3D) field effect transistor device formed within a semiconductor structure is provided. The method may include measuring a capacitance-voltage (C-V) characteristic for the 3D field effect transistor device and identifying, based on the measured capacitance-voltage (C-V) characteristic, a Fin structure corresponding to the 3D field effect transistor device. The identified Fin structure is detached from the 3D field effect transistor device using a nanomanipulator probe tip. The detached Fin is then welded to the nanomanipulator probe tip using an incident focused ion beam having a voltage of less than about 1000 eV. The incident focused ion beam having a voltage of less than about 1000 eV is applied to a tip of the Fin that is welded to the nanomanipulator probe tip.

Abstract translation: 提供了一种从在半导体结构内形成的三维（3D）场效应晶体管器件的原子探针层析成像（APT）样品制备方法。 该方法可以包括测量3D场效应晶体管器件的电容电压（C-V）特性，并且基于所测量的电容电压（C-V）特性识别与3D场效应晶体管器件相对应的鳍结构。 使用纳米机械手探针尖端将识别的Fin结构与3D场效应晶体管器件分离。 然后使用具有小于约1000eV的电压的入射聚焦离子束将分离的Fin焊接到纳米操纵器探针尖端。 将具有小于约1000eV的电压的入射聚焦离子束施加到焊接到纳米操纵器探针尖端的鳍的末端。

公开(公告)号：US20150067931A1

公开(公告)日：2015-03-05

申请号：US14223727

申请日：2014-03-24

Applicant: Mark J. Hagmann

Inventor： Mark J. Hagmann

IPC: G01Q30/20

CPC classification number: G01Q30/20 ,  G01Q60/00 ,  G01Q60/10 ,  G01Q60/14 ,  G01Q60/16 ,  G01Q60/30 ,  G01Q60/48

Abstract: A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion.

Abstract translation: 用于将高频能量，特别是用于微波电路的高频能量耦合到纳米级结的方法包括将偏置T置于扫描探针显微镜的尖端和样品回路外部，并将分析的半导体的样品的一部分连接到 同轴电缆的外屏蔽层，以便以最少的样品参与来完成电路。 偏置T分支到高频和低频电路，两者均已完成，并且至少高频电路不依赖于器具或其他结构的接地来完成所述完成。

公开(公告)号：US08646344B2

公开(公告)日：2014-02-11

申请号：US13681898

申请日：2012-11-20

Applicant: Jacob Israelachvili

Inventor： Jacob Israelachvili

IPC: G01N13/00 ,  G01N1/28 ,  G01Q30/20

CPC classification number: G01N13/00 ,  B01L3/00 ,  G01N1/00 ,  G01N1/28 ,  G01N3/04 ,  G01N19/02 ,  G01Q30/02 ,  G01Q30/18 ,  G01Q30/20 ,  G01Q70/02 ,  G02B21/26

Abstract: A mounting system for samples and instruments for use with a measuring device such as a surface forces apparatus has a housing and a sample mount assembly positioned within the housing. The sample mount assembly has a pivot arm having a first edge and a flexing section. A spring has a first end coupled to the pivot arm. A first sample holder is coupled to the second end of the spring. A second sample holder is positioned in proximity to the first sample holder.

公开(公告)号：US20130031680A1

公开(公告)日：2013-01-31

申请号：US13559165

申请日：2012-07-26

Applicant: Huiwen Liu ,  Peter Gunderson

Inventor： Huiwen Liu ,  Peter Gunderson

IPC: G01Q30/20

CPC classification number: B82Y35/00 ,  G01Q30/04

Abstract: A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.

Abstract translation: 公开了一种用于样品的原子力显微镜（AFM）扫描的半自动化方法。 该方法可以包括在AFM工具上手动教示样品和AFM尖端相对位置; 然后通过预定义的程序扫描相同样品或具有相同图案的其他样品，以自动产生更多图像。

公开(公告)号：US08312561B2

公开(公告)日：2012-11-13

申请号：US12524936

申请日：2008-01-28

Applicant: Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

Inventor： Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

IPC: G01Q30/20

CPC classification number: H02N2/028 ,  G01Q10/04 ,  H02N2/0095

Abstract: The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.

Abstract translation: 本发明涉及用于微机械定位和处理物体的装置和方法。 本发明的目的是提供一种用于微机械定位和处理物体的装置和相关方法，通过该方法可以增加扫描速度并提高位置精度，使得实时图像或视频速率图像（约。 可以实现在纳米范围内具有横向和垂直分辨率的每秒25个图像。 根据本发明，优选由硅制成的整体部件包括支撑元件，物体载体，用于传递运动的多个引导元件和元件，优选压阻驱动元件和优选的压阻位置检测器，其被整合到所述 整体成分; 所述微机械定位装置可用于例如扫描探针显微镜和纳米定位和纳米操纵技术。

公开(公告)号：US07926328B2

公开(公告)日：2011-04-19

申请号：US12129149

申请日：2008-05-29

Applicant: Masatoshi Yasutake ,  Takeshi Umemoto ,  Masafumi Watanabe

Inventor： Masatoshi Yasutake ,  Takeshi Umemoto ,  Masafumi Watanabe

IPC: G01B5/28 ,  G02B21/32 ,  G01Q30/20 ,  B82B3/00

CPC classification number: B25J7/00 ,  B25J15/12 ,  G01Q60/38 ,  G01Q80/00 ,  G02B21/32 ,  Y10S977/962

Abstract: There is provided a sample manipulating apparatus which is an apparatus for manipulating a sample mounted on a substrate surface, in which at least position data and shape data are acquired by observing the sample. Thereafter, tweezers are positioned by moving means such that the sample is positioned between an observing probe and a grasping probe based on the two set of data. After positioning, a height of the tweezers is set to a position of being remote from the substrate surface by a constant distance by moving means while monitoring a result of measurement by displacement measuring means. Thereafter, the grasping probe is moved to a side of the observing probe while monitoring the result of measurement by the displacement measuring means at the set height and the sample is grasped while detecting a grasping start point.

Abstract translation: 提供了一种样品操作装置，其是用于操纵安装在基板表面上的样品的装置，其中至少通过观察样品获取位置数据和形状数据。 此后，通过移动装置定位镊子，使得样本基于两组数据位于观察探针和抓握探针之间。 在定位之后，通过移动装置将镊子的高度设置为远离基板表面一定距离的位置，同时通过位移测量装置监视测量结果。 此后，在检测到抓取开始点的同时，通过位移测量装置在设定高度监视测量结果，并将抓取探针移动到观察探测器的一侧，并且抓住样本。

公开(公告)号：US07849515B2

公开(公告)日：2010-12-07

申请号：US11791262

申请日：2005-11-22

Applicant: Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

Inventor： Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

IPC: G01Q30/20

CPC classification number: B81C99/002 ,  G01Q60/38 ,  G01Q80/00 ,  Y10S977/902 ,  Y10S977/962

Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.

Abstract translation: 根据本发明的纳米锥体（1）包括：支撑构件（25）; 观察探针（10），其从所述支撑构件（25）伸出，并且在观察所述试样的表面时使用; 设置在从所述支撑部件（25）突出的所述观察用探针（10）的旁边的可动臂（20），并且在所述观察探针（10）与所述可动臂（20）之间封闭或打开以保持或释放 所述试样保持在所述观察探针（10）和所述可动臂（20）之间; 以及驱动机构，其驱动所述可动臂（20）以在所述观察探针（10）和所述可动臂（20）之间关闭或打开，所述支撑部件（25），所述观察探针（10）和 可移动臂（20）各自通过通过光刻工艺处理半导体晶片（30）而形成。

公开(公告)号：US06979823B2

公开(公告)日：2005-12-27

申请号：US10865850

申请日：2004-06-14

Applicant: Hiroyuki Shinada ,  Yusuke Yajima ,  Hisaya Murakoshi ,  Masaki Hasegawa ,  Mari Nozoe ,  Atsuko Takafuji ,  Katsuya Sugiyama ,  Katsuhiro Kuroda ,  Kaoru Umemura ,  Yasutsugu Usami

Inventor： Hiroyuki Shinada ,  Yusuke Yajima ,  Hisaya Murakoshi ,  Masaki Hasegawa ,  Mari Nozoe ,  Atsuko Takafuji ,  Katsuya Sugiyama ,  Katsuhiro Kuroda ,  Kaoru Umemura ,  Yasutsugu Usami

IPC: G01N23/20 ,  G01N23/225 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q30/20 ,  H01J37/26 ,  H01L21/027 ,  H01L21/66 ,  H01J37/244

CPC classification number: H01J37/26 ,  G01N23/225 ,  H01J37/244 ,  H01J37/29 ,  H01J2237/20228 ,  H01J2237/221 ,  H01J2237/2447 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/24592 ,  H01J2237/2482

Abstract: An electron beam (area beam) having a fixed area is irradiated onto the surface of a semiconductor sample, and reflected electrons from the sample surface are imaged by the imaging lens, and images of a plurality of regions of the surface of the semiconductor sample are obtained and stored in the image storage unit, and the stored images of the plurality of regions are compared with each other, and the existence of a defect in the regions and the defect position are measured. By doing this, in an apparatus for testing a pattern defect of the same design, foreign substances, and residuals on a wafer in the manufacturing process of a semiconductor apparatus by an electron beam, speeding-up of the test can be realized.

Abstract translation: 具有固定面积的电子束（区域光束）被照射到半导体样品的表面上，并且通过成像透镜对来自样品表面的反射电子进行成像，并且半导体样品的表面的多个区域的图像是 获取并存储在图像存储单元中，并且将多个区域的存储图像相互比较，并且测量区域和缺陷位置中的缺陷的存在。 通过这样做，在通过电子束在半导体装置的制造过程中测试相同设计的模式缺陷，异物和晶片上的残留物的装置可以实现测试的加速。