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公开(公告)号：US09897626B2
公开(公告)日：2018-02-20
申请号：US15517063
申请日：2015-10-05
摘要： A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.
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公开(公告)号：US09689893B2
公开(公告)日：2017-06-27
申请号：US15168985
申请日：2016-05-31
发明人： Kazunori Ando
摘要： Disclosed herein is a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air. At least the cantilever, the sample stage, and the three-dimensional moving mechanism are accommodated in the measurement chamber. The measurement chamber is provided with a pair of guide rails used to transport the sample stage. The sample stage has an engagement portion. The three-dimensional moving mechanism is disposed in the vicinity of a predetermined position and between the guide rails. The three-dimensional moving mechanism can be moved to above the guide rails and below the guide rails. When the sample stage is transported to the predetermined position in a horizontal direction, the three-dimensional moving mechanism is lifted up to the bottom surface of the sample stage so that the scanning probe microscope can perform measurement.
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公开(公告)号：US09658246B2
公开(公告)日：2017-05-23
申请号：US13566834
申请日：2012-08-03
CPC分类号： G01Q30/12 , B82Y35/00 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/2002 , H01J2237/2003 , H01J2237/28
摘要： A method and apparatus is provided for studying the reaction (chemical or physical) of a sample with a gas in the active atmosphere of an instrument such as an Environmental Transmission Electron Microscope (ETEM), optical microscope, X-ray microscope or scanning probe microscope. The sample is exposed to inert gas at a desired temperature before exchanging the inert gas to the active gas to reduce to avoid, or at least minimize, sample drift during image acquisition.
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公开(公告)号：US20150338438A1
公开(公告)日：2015-11-26
申请号：US14817517
申请日：2015-08-04
发明人： Mario Viani , Roger Proksch , Maarten Rutgers , Jason Cleveland , Jim Hodgson
摘要： A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
摘要翻译： 描述了在各种环境条件下允许超高分辨率成像和测量的模块化原子力显微镜。 该仪器允许在环境到液体或气体或极高或极低温度的环境中进行这种成像和测量。
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公开(公告)号：US20150226766A1
公开(公告)日：2015-08-13
申请号：US14412831
申请日：2013-07-05
申请人： Bruker Nano, Inc. , IMEC
摘要： An apparatus (100) for performing atomic force microscopy is disclosed. The apparatus comprises an AFM measurement unit (102) configured to operate in a first controlled atmosphere (300) and a pretreatment unit (101) configured to operate in a second controlled atmosphere (400), the second controlled atmosphere being different from the first controlled atmosphere. The pretreatment unit is connected to the AFM measurement unit. In one embodiment, the second controlled atmosphere is a vacuum atmosphere, whereas the first controlled atmosphere includes at least an inert gas.
摘要翻译： 公开了一种用于进行原子力显微镜的装置（100）。 该装置包括被配置为在第一受控气氛（300）中操作的AFM测量单元（102）和被配置为在第二受控气氛（400）中操作的预处理单元（101），所述第二受控气氛不同于第一受控气氛 大气层。 预处理单元连接到AFM测量单元。 在一个实施方案中，第二受控气氛是真空气氛，而第一受控气氛至少包括惰性气体。
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公开(公告)号：US20140289910A1
公开(公告)日：2014-09-25
申请号：US14357011
申请日：2012-11-15
IPC分类号： G01Q10/00
CPC分类号： G01Q30/14 , B82Y35/00 , G01Q10/00 , G01Q20/02 , G01Q30/08 , G01Q30/12 , G01Q30/18 , G01Q60/24 , G01Q60/32 , G01Q70/02
摘要： Provided is a sealed AFM cell in which measurement accuracy does not decrease and the types of observation liquids are not limited. A sealed AFM cell according to the present invention includes: a cantilever including a probe; a sample holder for fixing the sample; a scanner for moving the sample holder; a lid part which holds the cantilever so as to position the probe near a measurement surface of the sample; and a main body part which is a component for holding the scanner and positioned opposite the lid part with the sample in between, in which the lid part and the main body part are joined via a sealing liquid to seal the observation liquid inside a space formed by the lid part, the main body part, and the sealing liquid, the sealing liquid being different from the observation liquid and not in contact with the observation liquid.
摘要翻译： 提供了一种密封的AFM电池，其中测量精度不降低，并且观察液体的类型不受限制。 根据本发明的密封AFM电池包括：包括探针的悬臂; 用于固定样品的样品架; 用于移动样品架的扫描器; 盖部，其保持悬臂，以将探针定位在样品的测量表面附近; 以及主体部，其是用于保持扫描仪并且与盖部分相对设置在其间的样品的部件，其中盖部分和主体部分经由密封液接合，以将观察液体密封在形成的空间内 通过盖部，主体部和密封液，密封液与观察液不同，不与观察液接触。
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公开(公告)号：US20100205698A1
公开(公告)日：2010-08-12
申请号：US12598490
申请日：2008-04-23
申请人： Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
发明人： Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
IPC分类号： G01Q60/38
摘要： A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1′) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM′). A method of atomic force microscopy including the use of such a probe.
摘要翻译： 一种用于原子力显微镜（SM）的探针，其包括微机械谐振器（RMM）和用于从所述谐振器突出的原子力显微镜（P1）的尖端，所述探针的特征在于：其还包括用于选择性地激发体积的装置（EL1） 所述谐振器（RMM）的振荡模式; 并且所述原子力显微镜（P1，P1'）的尖端基本上与所述体积振荡模式的波腹点（PV1）相对应地从所述谐振器突出。 包括这种探针（SM'）的原子力显微镜。 包括使用这种探针的原子力显微镜的方法。
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公开(公告)号：US20170307655A1
公开(公告)日：2017-10-26
申请号：US15517063
申请日：2015-10-05
摘要： A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.
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公开(公告)号：US20170168089A1
公开(公告)日：2017-06-15
申请号：US15445779
申请日：2017-02-28
发明人： Mario Viani , Roger Proksch , Maarten Rutgers , Jason Cleveland , Jim Hodgson
摘要： A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
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公开(公告)号：US20160356810A1
公开(公告)日：2016-12-08
申请号：US15168985
申请日：2016-05-31
发明人： Kazunori ANDO
IPC分类号： G01Q30/16
摘要： Disclosed herein is a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air. At least the cantilever, the sample stage, and the three-dimensional moving mechanism are accommodated in the measurement chamber. The measurement chamber is provided with a pair of guide rails used to transport the sample stage. The sample stage has an engagement portion. The three-dimensional moving mechanism is disposed in the vicinity of a predetermined position and between the guide rails. The three-dimensional moving mechanism can be moved to above the guide rails and below the guide rails. When the sample stage is transported to the predetermined position in a horizontal direction, the three-dimensional moving mechanism is lifted up to the bottom surface of the sample stage so that the scanning probe microscope can perform measurement.
摘要翻译： 本文公开了一种扫描探针显微镜，其包括悬臂，三维移动机构，三维移动样品台，以及密封而不暴露于外部空气的测量室。 至少悬臂，样品台和三维移动机构容纳在测量室中。 测量室设有用于运送样品台的一对导轨。 样品台具有接合部分。 三维移动机构设置在预定位置附近和导轨之间。 三维移动机构可以移动到导轨上方和导轨下方。 当样品台沿水平方向输送到预定位置时，三维移动机构被提升到样品台的底表面，使得扫描探针显微镜可以进行测量。
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