公开(公告)号：US20110215242A1

公开(公告)日：2011-09-08

申请号：US12931356

申请日：2011-01-27

Applicant: Dirk Preikszas

Inventor： Dirk Preikszas

IPC: H01J37/28

CPC classification number: H01J37/145 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28

Abstract: A particle beam device and a method for operation of a particle beam device are disclosed. The particle beam device has a sample chamber, a sample arranged in the sample chamber, a first particle beam column, a second particle beam column and at least one detector arranged in a first cavity in a first hollow body. The first cavity has a first inlet opening. The first particle beam column and the second particle beam column are arranged on one plane, while the detector is not arranged on that plane. At least one control electrode is arranged on the first particle beam column. The second particle beam column has a terminating electrode. A first hollow body voltage, a control electrode voltage and/or a terminating electrode voltage are/is chosen such that first interaction particles and/or second interaction particles enter the first cavity in the first hollow body through the first inlet opening.

Abstract translation: 公开了一种粒子束装置及其操作方法。 粒子束装置具有样品室，布置在样品室中的样品，第一粒子束柱，第二粒子束柱和布置在第一中空体中的第一腔中的至少一个检测器。 第一腔具有第一入口开口。 第一粒子束柱和第二粒子束列布置在一个平面上，而检测器未布置在该平面上。 至少一个控制电极设置在第一粒子束柱上。 第二粒子束柱具有端接电极。 选择第一中空体电压，控制电极电压和/或端接电极电压，使得第一相互作用颗粒和/或第二相互作用颗粒通过第一入口进入第一中空体中的第一空腔。

公开(公告)号：US07825386B2

公开(公告)日：2010-11-02

申请号：US11923012

申请日：2007-10-24

Applicant: Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

Inventor： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

IPC: H01J37/244

CPC classification number: H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

Abstract: System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

Abstract translation: 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

公开(公告)号：US20090309025A1

公开(公告)日：2009-12-17

申请号：US12448229

申请日：2007-11-23

Applicant: Dirk Preikszas

Inventor： Dirk Preikszas

IPC: G01N23/00

CPC classification number: H01J37/09 ,  H01J37/145 ,  H01J37/3056 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A particle optical arrangement providing an electron microscopy system 3 and an ion beam processing system 7 comprises an objective lens 43 of the electron microscopy system having an annular electrode 59 being a component of the electron microscopy system arranged closest to a position 11 of an object to be examined. Between the annular electrode and a principal axis 9 of the ion beam processing system 7 a shielding electrode 81 is arranged.

Abstract translation: 提供电子显微镜系统3和离子束处理系统7的粒子光学装置包括电子显微镜系统的物镜43，其具有环形电极59，该环形电极是最靠近物体的位置11布置的电子显微镜系统的部件， 被检查。 在环形电极和离子束处理系统7的主轴9之间设置有屏蔽电极81。

公开(公告)号：US07112803B2

公开(公告)日：2006-09-26

申请号：US10897635

申请日：2004-07-23

Applicant: Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

Inventor： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

IPC: H01J37/10 ,  H01J37/147

CPC classification number: H01J37/147 ,  H01J37/026 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/1405 ,  H01J2237/1526

Abstract: A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.

Abstract translation: 提出了一种用于将带电粒子束朝向和远离样品引导的方法和系统。 该系统包括透镜装置，其具有形成有用于带电粒子束通过的光束开口的电极; 和磁偏转器。 磁偏转器具有由用于承载励磁线圈的芯部和极靴部分形成的磁路。 磁偏转器的极点与透镜装置的电极电连通，并且与磁路的另一部分电绝缘。

公开(公告)号：US20060169910A1

公开(公告)日：2006-08-03

申请号：US10539179

申请日：2003-12-12

Applicant: Jugen Frosien ,  Pavel Adamec

Inventor： Jugen Frosien ,  Pavel Adamec

IPC: H01J1/50

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177

Abstract: The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.

Abstract translation: 本发明提供了一种用于带电粒子多光束系统的光学系统。 光学系统包括静电透镜部件和磁性透镜部件。 这些部件用于将多个带电粒子束聚焦在分开的开口中，用于至少多个穿过光学系统的带电粒子束中的每一个。

公开(公告)号：US20040000640A1

公开(公告)日：2004-01-01

申请号：US10603433

申请日：2003-06-25

Applicant: JEOL Ltd.

Inventor： Hiroyoshi Kazumori

IPC: G01N023/00

CPC classification number: H01J37/28 ,  G01N23/2251 ,  H01J37/145 ,  H01J2237/024 ,  H01J2237/026 ,  H01J2237/20207 ,  H01J2237/2809

Abstract: A scanning electron microscope has an electron gun producing the electron beam, an objective lens for sharply focusing the beam onto the specimen, a tilting mechanism for tilting the specimen relative to the beam, and a power supply for applying the negative voltage to the specimen. This microscope further includes a cylindrical shield electrode mounted to surround the electron beam path between the objective lens and specimen. A front-end electrode is insulatively mounted to the front-end portion of the shield electrode that is on the specimen side. An electric potential substantially identical to the electric potential at the polepieces of the objective lens is applied to the shield electrode. An electric potential substantially identical to the potential at the specimen is applied to the front-end electrode.

Abstract translation: 扫描电子显微镜具有产生电子束的电子枪，用于将光束聚焦到样本上的物镜，用于使样本相对于光束倾斜的倾斜机构，以及向样本施加负电压的电源。 该显微镜还包括安装成围绕物镜和样品之间的电子束路径的圆柱形屏蔽电极。 前端电极被绝缘地安装在屏蔽电极的在试样侧的前端部分。 将与物镜的极点处的电位基本相同的电位施加到屏蔽电极。 将与试样电位基本相同的电位施加到前端电极。

公开(公告)号：US06194729B1

公开(公告)日：2001-02-27

申请号：US09123017

申请日：1998-07-26

Applicant: Eugen Weimer

Inventor： Eugen Weimer

IPC: G01N2300

CPC classification number: H01J37/145 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/04756 ,  H01J2237/2443

Abstract: The invention relates to a particle beam apparatus, in which very low target energies of the particles focused on the object can be set, with good imaging conditions. For this purpose, the beam guiding tube (5), from the anode (4) to behind the objective (6, 7) is at a high potential, which insures that the particles within the beam guiding tube have a high kinetic energy which is independent of the target energy. A braking electrode (9) arranged after the beam guiding tube, together with the object holder (10) and the object arranged thereon, is at a specimen potential UP which deviates from the ground potential and which has the same sign as the cathode potential UK. The specimen potential UP acts as the decelerating potential, by means of which the particles are braked to energies which can be below the energy value determined by the cathode potential UK. Thus even at the lowest target energies the object does not need to be brought to a high, high-voltage potential, so that object damage and high voltage flashovers are excluded. At the same time, the kinetic energy of the electrons within the beam guiding tube is largely independent of the target energy, so that the imaging relationships within the beam guiding tube are largely independent of the target energy.

Abstract translation: 本发明涉及一种粒子束装置，其中可以设置具有良好成像条件的聚焦在物体上的粒子的非常低的目标能量。 为此，从阳极（4）到物镜（6,7）之后的光束引导管（5）处于高电位，确保光束引导管内的颗粒具有高动能 独立于目标能量。 布置在光束引导管之后的制动电极（9）与物体保持器（10）和布置在其上的物体一起处于与地电位偏离并且具有与阴极电位UK相同的标志的检测电位UP 。 样品电势UP用作减速电位，通过该电位将颗粒制动到能量低于由阴极电势UK确定的能量值的能量。 因此，即使在最低目标能量下，物体也不需要被带到高的高电压电位，所以不包括物体损坏和高压闪络。 同时，光束引导管内电子的动能很大程度上与目标能量无关，因此光束引导管内的成像关系很大程度上与目标能量无关。

公开(公告)号：US5895917A

公开(公告)日：1999-04-20

申请号：US877601

申请日：1997-06-18

Applicant: Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker ,  Jurgen Frosien

Inventor： Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker ,  Jurgen Frosien

IPC: H01J37/141 ,  H01J37/145 ,  H01J37/12

CPC classification number: H01J37/145 ,  H01J2237/2594

Abstract: The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.

Abstract translation: 本发明涉及一种具有这种检测器物镜的检测器物镜和带电粒子束装置，该检测器物镜包含用于将带电粒子束聚焦在由磁性透镜（60）和静电透镜（61）组成的样本上的主透镜， 以及检测器（62），其沿着带电粒子束（2）的方向设置在磁性透镜（60）的前方，用于检测在样本（8）处释放的带电粒子。 提供了附加透镜来影响释放的带电粒子，其产生静电场和/或磁场，并且设置在主透镜和检测器之间，主透镜和所述附加透镜的场基本上彼此分离。

公开(公告)号：US5872358A

公开(公告)日：1999-02-16

申请号：US733857

申请日：1996-10-18

Applicant: Hideo Todokoro ,  Makoto Ezumi

Inventor： Hideo Todokoro ,  Makoto Ezumi

IPC: H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/145 ,  H01J37/268 ,  H01J37/28 ,  H01J2237/04 ,  H01J2237/04756 ,  H01J2237/2449

Abstract: A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.

公开(公告)号：US5780859A

公开(公告)日：1998-07-14

申请号：US791091

申请日：1997-01-29

Applicant: Hans-Peter Feuerbaum ,  Jurgen Frosien ,  Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker

Inventor： Hans-Peter Feuerbaum ,  Jurgen Frosien ,  Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker

IPC: H01J37/145 ,  G01Q30/20 ,  H01J49/06

CPC classification number: H01J37/145 ,  H01J49/067 ,  H01J2237/2594

Abstract: An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.

Abstract translation: 静电磁性透镜装置用于聚焦带电粒子以及具有这种透镜装置的带电粒子束装置，该透镜装置具有并入到磁性透镜中的磁性透镜和静电透镜，该磁性透镜被构造为单极透镜 。