公开(公告)号：US06194729B1

公开(公告)日：2001-02-27

申请号：US09123017

申请日：1998-07-26

Applicant: Eugen Weimer

Inventor： Eugen Weimer

IPC: G01N2300

CPC classification number: H01J37/145 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/04756 ,  H01J2237/2443

Abstract: The invention relates to a particle beam apparatus, in which very low target energies of the particles focused on the object can be set, with good imaging conditions. For this purpose, the beam guiding tube (5), from the anode (4) to behind the objective (6, 7) is at a high potential, which insures that the particles within the beam guiding tube have a high kinetic energy which is independent of the target energy. A braking electrode (9) arranged after the beam guiding tube, together with the object holder (10) and the object arranged thereon, is at a specimen potential UP which deviates from the ground potential and which has the same sign as the cathode potential UK. The specimen potential UP acts as the decelerating potential, by means of which the particles are braked to energies which can be below the energy value determined by the cathode potential UK. Thus even at the lowest target energies the object does not need to be brought to a high, high-voltage potential, so that object damage and high voltage flashovers are excluded. At the same time, the kinetic energy of the electrons within the beam guiding tube is largely independent of the target energy, so that the imaging relationships within the beam guiding tube are largely independent of the target energy.

Abstract translation: 本发明涉及一种粒子束装置，其中可以设置具有良好成像条件的聚焦在物体上的粒子的非常低的目标能量。 为此，从阳极（4）到物镜（6,7）之后的光束引导管（5）处于高电位，确保光束引导管内的颗粒具有高动能 独立于目标能量。 布置在光束引导管之后的制动电极（9）与物体保持器（10）和布置在其上的物体一起处于与地电位偏离并且具有与阴极电位UK相同的标志的检测电位UP 。 样品电势UP用作减速电位，通过该电位将颗粒制动到能量低于由阴极电势UK确定的能量值的能量。 因此，即使在最低目标能量下，物体也不需要被带到高的高电压电位，所以不包括物体损坏和高压闪络。 同时，光束引导管内电子的动能很大程度上与目标能量无关，因此光束引导管内的成像关系很大程度上与目标能量无关。

公开(公告)号：US06239430B1

公开(公告)日：2001-05-29

申请号：US09177900

申请日：1998-10-23

Applicant: Eugen Weimer ,  Johannes Bihr

Inventor： Eugen Weimer ,  Johannes Bihr

IPC: G21K300

CPC classification number: H01J37/05 ,  H01J2237/057 ,  H01J2237/28

Abstract: A particle beam apparatus that can be used, in particular in an electron microscope, has a dispersively imaging energy filter in the illumination beam path. A higher energy sharpness of the particles contributing to the further particle-optic imaging, and hence a reduction of the effect of chromatic aberrations, is attained by means of the energy filter. So that voltage fluctuations of the applied high voltage also bring about no drift of the image of the beam producer in spite of the dispersion present after complete passage through the filter, the beam producer is imaged, enlarged, in a plane of the filter that is imaged achromatically by the filter into an output image plane. Because of the high dispersion of the dispersive filter as against non-dispersive filters, the particle beam apparatus can be operated at a higher particle energy within the filter, so that the influence of the Boersch effect is reduced in comparison with non-dispersive filters.

Abstract translation: 可以特别在电子显微镜中使用的粒子束装置在照明光束路径中具有分散成像能量过滤器。 通过能量过滤器可获得有助于进一步的颗粒光学成像并因此降低色差影响的颗粒的较高的能量锐度。 因此，尽管施加的高电压的电压波动也导致光束产生器的图像没有漂移，尽管在完全通过滤光器之后存在色散，但是光束产生器在滤光器的平面中被成像，放大 通过滤光器成像成输出图像平面。 由于分散过滤器与非分散过滤器的分散性高，所以粒子束装置可以在过滤器内以更高的粒子能量运行，从而与非分散过滤器相比，Boersch效应的影响降低。

公开(公告)号：US5519216A

公开(公告)日：1996-05-21

申请号：US296678

申请日：1994-08-26

Applicant: Gerd Benner ,  Josef Frey ,  Martin Ross-Messemer ,  Eugen Weimer

Inventor： Gerd Benner ,  Josef Frey ,  Martin Ross-Messemer ,  Eugen Weimer

IPC: H01J37/22 ,  H01J37/248 ,  H01J37/26 ,  H01J37/15

CPC classification number: H01J37/265 ,  H01J2237/30411 ,  H01J2237/30433

Abstract: The invention is directed to an electron-optical imaging system such as for an electron microscope. The imaging system has magnetic lenses, current and voltage sources corresponding thereto, a computer, a permanent memory and a touch panel. The electron microscope is manually calibrated when first taken into use by a discrete sequence of different operating conditions. Polynomes of the second degree are adapted to the experimentally calibrated parameter values for the lens currents. The computer polynome coefficients are stored in a permanent memory. Operating states are adjustable via the touch panel on the operating console of the electron microscope. These operating states lie between the calibrated operating states. The lens currents necessary for these operating states are computed in the computer based on the function coefficients stored in the memory and are subsequently emitted to the current sources by the computer. The step width in which the operating states are adjustable is preselectable via the keyboard independently of the position of the calibrated operating conditions.

Abstract translation: 本发明涉及电子显微镜等电子光学成像系统。 成像系统具有磁性透镜，对应于其的电流和电压源，计算机，永久存储器和触摸面板。 当通过不同操作条件的离散序列首次使用时，电子显微镜被手动校准。 第二度的多义性适用于透镜电流的实验校准参数值。 计算机多项式系数存储在永久存储器中。 操作状态可通过电子显微镜操作台上的触摸面板进行调节。 这些操作状态位于校准的操作状态之间。 这些操作状态所需的镜头电流在计算机中基于存储在存储器中的功能系数来计算，随后由计算机发射到当前的源。 可以通过键盘预先选择操作状态可调节的台阶宽度，而与校准的操作条件的位置无关。

公开(公告)号：US08485968B2

公开(公告)日：2013-07-16

申请号：US13368422

申请日：2012-02-08

Applicant: Eugen Weimer ,  Hubert Czujack

Inventor： Eugen Weimer ,  Hubert Czujack

IPC: A61B1/06

CPC classification number: H02K49/10 ,  A61B1/00066 ,  A61B1/00096 ,  A61B1/00158 ,  A61B1/00183 ,  G02B23/243 ,  G02B26/0816 ,  G02B26/0883

Abstract: A rigid, rod-shaped endoscope for medical applications includes a distal end having a light-permeable distal window and a light outlet disposed adjacent to the distal window, which includes a device configured to prevent the incidence of stray light onto sides of the deflection prism facing the distal window. An endoscope shank includes a plurality of telescoping hollow tubes. An inner fixed optical tube includes a moveable optical deflection prism and an optical system configured to transmit light beams. The optical deflection prism is mounted rotatably on a shaft that is disposed at a right angle to a longitudinal axis of the endoscope. At least one moveable sliding tube is configured to move relative to the inner fixed optical tube in the direction of the longitudinal axis of the endoscope using magnetic forces generated by a plurality of moveable permanent magnets.

Abstract translation: 用于医疗应用的刚性棒状内窥镜包括具有透光性远侧窗口的远端和邻近远端窗口设置的光出口，其包括被配置为防止杂散光入射到偏转棱镜的侧面上的装置 面向远端窗。 内窥镜柄包括多个伸缩中空管。 内部固定光学管包括可移动光学偏转棱镜和被配置为透射光束的光学系统。 光学偏转棱镜可旋转地安装在与内窥镜的纵向轴线成直角设置的轴上。 至少一个可移动的滑动管被构造成使用由多个可移动永磁体产生的磁力，相对于内部固定光学管在内窥镜的纵向轴线的方向上移动。

公开(公告)号：US20120136213A1

公开(公告)日：2012-05-31

申请号：US13368422

申请日：2012-02-08

Applicant: Eugen Weimer ,  Hubert Czujack

Inventor： Eugen Weimer ,  Hubert Czujack

IPC: A61B1/06

CPC classification number: H02K49/10 ,  A61B1/00066 ,  A61B1/00096 ,  A61B1/00158 ,  A61B1/00183 ,  G02B23/243 ,  G02B26/0816 ,  G02B26/0883

Abstract: A rigid, rod-shaped endoscope for medical applications includes a distal end having a light-permeable distal window and a light outlet disposed adjacent to the distal window, which includes a device configured to prevent the incidence of stray light onto sides of the deflection prism facing the distal window. An endoscope shank includes a plurality of telescoping hollow tubes. An inner fixed optical tube includes a moveable optical deflection prism and an optical system configured to transmit light beams. The optical deflection prism is mounted rotatably on a shaft that is disposed at a right angle to a longitudinal axis of the endoscope. At least one moveable sliding tube is configured to move relative to the inner fixed optical tube in the direction of the longitudinal axis of the endoscope using magnetic forces generated by a plurality of moveable permanent magnets.

Abstract translation: 用于医疗应用的刚性棒状内窥镜包括具有透光性远侧窗口的远端和邻近远端窗口设置的光出口，其包括被配置为防止杂散光入射到偏转棱镜的侧面上的装置 面向远端窗。 内窥镜柄包括多个伸缩中空管。 内部固定光学管包括可移动光学偏转棱镜和被配置为透射光束的光学系统。 光学偏转棱镜可旋转地安装在与内窥镜的纵向轴线成直角设置的轴上。 至少一个可移动的滑动管被构造成使用由多个可移动永磁体产生的磁力，相对于内部固定光学管在内窥镜的纵向轴线的方向上移动。

公开(公告)号：US5449914A

公开(公告)日：1995-09-12

申请号：US218343

申请日：1994-03-25

Applicant: Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

Inventor： Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

IPC: G01Q30/02 ,  H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J49/46 ,  H01J37/14

CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/26

Abstract: The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.

Abstract translation: 本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。 滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。 两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。 为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。 电子束通过第一均匀扇形磁体两次。 多极元件布置在三个扇形磁体之前，后面和之间。 该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。 通过多个元素校正所有二阶像差和显着的二次像差。

公开(公告)号：US4515447A

公开(公告)日：1985-05-07

申请号：US485213

申请日：1983-04-15

Applicant: Eugen Weimer ,  Gerhard Muller

Inventor： Eugen Weimer ,  Gerhard Muller

IPC: G02B21/00 ,  G02B7/00 ,  G02B21/06 ,  G02B21/16 ,  G02B26/08 ,  G02B27/62 ,  G02B27/12 ,  G02B7/18 ,  G02B27/17

CPC classification number: G02B21/06 ,  G02B26/0875 ,  G02B26/0891 ,  G02B7/004

Abstract: Two embodiments of an adjusting device for correcting misalignment in optical ray paths are disclosed. The first embodiment (FIGS. 1 and 3) has two transparent plane plates (21, 22) which are tilted relative to the optical axis and are supported with their mounts (35, 36) for rotation with constant angle of inclination around the optical axis in a tube (37) which is developed as an intermediate structure mountable in a desired location in an optical system. The second embodiment (FIGS. 2 and 5) has two wedge prisms which are displaceable with respect to each other along the optical axis and which can be turned jointly around the optical axis. Both embodiments are useful upon the coupling of a laser beam into a microscope in order to compensate for beam misalignment of the laser, the axis of which is subject to slow drift during operation.

Abstract translation: 公开了用于校正光线路径中的未对准的调节装置的两个实施例。 第一实施例（图1和图3）具有相对于光轴倾斜的两个透明平面板（21,22），并且以它们的安装座（35,36）支撑，以围绕光轴以恒定的倾斜角转动 在作为可安装在光学系统中的期望位置的中间结构的管（37）中。 第二实施例（图2和图5）具有两个楔形棱镜，它们可沿着光轴相对于彼此移位，并且可以围绕光轴共同转动。 两个实施例对于将激光束耦合到显微镜中是有用的，以便补偿激光器的光束未对准，其轴在操作期间经历缓慢的漂移。

公开(公告)号：US06498345B1

公开(公告)日：2002-12-24

申请号：US09339348

申请日：1999-06-23

Applicant: Eugen Weimer ,  Volker Drexel

Inventor： Eugen Weimer ,  Volker Drexel

IPC: H01J37244

CPC classification number: H01J37/244 ,  H01J2237/2448 ,  H01J2237/28

Abstract: In an electron beam device such as a raster electron microscope, two annular detectors are arranged at a distinct distance along the optical axis between a beam producer and an objective. The distance between the two detectors amounts to at least 25% of the distance between the specimen-side detector and the specimen. The source-side detector serves for detection of back-scattered or secondary electrons which are transmitted through the bore provided through the specimen-side detector for the passage of the primary particle beam. The source-side detector is a conversion diaphragm with an Everhart Thornley detector arranged laterally thereof. The conversion diaphragm produces secondary electrons on impingement of charged particles. By application of two detectors offset in the direction of the optical axis, the yield of the secondary electrons used for image production is increased. The secondary electrons are separated according to their angle of emergence from the specimen.

Abstract translation: 在诸如光栅电子显微镜的电子束装置中，在光束产生器和物镜之间的沿着光轴的两个环形探测器被布置成不同的距离。 两个检测器之间的距离相当于样品侧检测器和样品之间的距离的至少25％。 源侧检测器用于检测通过穿过样品侧检测器提供的孔的后向散射或二次电子，用于一次粒子束的通过。 源侧检测器是其横向布置的Everhart Thornley检测器的转换隔膜。 转换膜片在带电粒子碰撞时产生二次电子。 通过施加沿光轴方向偏移的两个检测器，用于图像生成的二次电子的产量增加。 二次电子根据其与样品的出射角度分离。

公开(公告)号：US4900932A

公开(公告)日：1990-02-13

申请号：US239317

申请日：1988-09-01

Applicant: Norbert Schafer ,  Eugen Weimer ,  Herbert Gross ,  Bernd Eppli ,  Eberhard Rossow

Inventor： Norbert Schafer ,  Eugen Weimer ,  Herbert Gross ,  Bernd Eppli ,  Eberhard Rossow

IPC: G01N23/225 ,  G01Q30/02 ,  G01Q90/00 ,  H01J37/244

CPC classification number: H01J37/228 ,  G01N23/2254 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.

Abstract translation: 公开了一种检测器，其包括椭圆形中空反射镜和具有反射内表面的管，用于在扫描电子显微镜中传导被研究中的试样发射的光。 真空窗口位于接收器正前方的管的外端部分。

公开(公告)号：US4644948A

公开(公告)日：1987-02-24

申请号：US612670

申请日：1984-05-22

Applicant: Walter Lang ,  Gerhard Mueller ,  Eugen Weimer

Inventor： Walter Lang ,  Gerhard Mueller ,  Eugen Weimer

IPC: A61N5/06 ,  A61B3/12 ,  A61B5/00 ,  A61B17/00 ,  A61F9/00 ,  A61F9/008 ,  A61B17/36

CPC classification number: A61F9/008 ,  A61B3/1241 ,  A61F9/00821 ,  A61B2017/00057 ,  A61B5/0059 ,  A61F2009/00863

Abstract: For determining the proper dose of therapy radiation for photocoagulation at the fundus of the eye, the fluorescent radiation excited by the therapy radiation (laser light) in the fundus of the eye is utilized. The fluorescence intensity passes through a characteristic minimum upon the termination of the coagulation process. Apparatus is disclosed for the detection by measurement of this effect. Optical beam splitters are provided to separate the fluorescent radiation from the therapy radiation. An electronically controlled shutter is provided for the passage and blocking off of the therapy radiation. The shutter is closed when the fluorescence intensity reaches a minimum after commencement of coagulation, or when the radiation reaches a predetermined amount, if this occurs before the fluorescence reaches its minimum.

Abstract translation: 为了确定在眼底的凝固治疗辐射的适当剂量，利用眼睛眼底中的治疗辐射（激光）激发的荧光辐射。 在凝结过程结束时，荧光强度通过特征最小值。 公开了用于通过测量该效果进行检测的装置。 提供光束分离器以将荧光辐射与治疗辐射分离。 提供电子控制的快门用于通过和阻止治疗辐射。 当荧光强度在凝血开始后达到最小值时，或者当荧光达到预定量时，如果在荧光达到最小值之前发生，则关闭快门。