知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

39 records (took 0.021 seconds)

    Apparatus of plural charged-particle beams
    31.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10115559B2

    公开(公告)日：2018-10-30

    申请号：US15403685

    申请日：2017-01-11

    Applicant: Hermes Microvision Inc.

    Inventor： Xuedong Liu ,  Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/14 ,  H01J37/147 ,  H01J37/28 ,  H01J37/04 ,  H01J37/153

    Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

    Objective lens system for fast scanning large FOV
    32.
    发明授权
    Objective lens system for fast scanning large FOV 有权

    公开(公告)号：US10008360B2

    公开(公告)日：2018-06-26

    申请号：US15007873

    申请日：2016-01-27

    Applicant: Hermes-Microvision, Inc.

    Inventor： Shuai Li ,  Zhongwei Chen

    IPC: H01J37/14 ,  H01J37/145 ,  H01J37/147 ,  H01J37/141

    CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/1477

    Abstract: The device includes a beam source for generating an electron beam, a beam guiding tube passed through an objective lens, an objective lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, a control electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen, a deflection system including a plurality of deflection units situated along the optical axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the objective lens, and a detection unit to capture secondary electron (SE) and backscattered electrons (BSE).

    Swing objective lens
    37.
    发明授权
    Swing objective lens 有权
    摆动物镜

    公开(公告)号：US09583306B2

    公开(公告)日：2017-02-28

    申请号：US14964274

    申请日：2015-12-09

    Applicant: Hermes Microvision Inc.

    Inventor： Shuai Li

    IPC: G21K5/04 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J37/145 ,  H01J37/21

    CPC classification number: H01J37/1478 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/1035 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/1508 ,  H01J2237/1534 ,  H01J2237/1536 ,  H01J2237/2801 ,  H01J2237/2811

    Abstract: A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.

    Abstract translation: 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上部内表面与SEM的外侧倾斜角度θ，其下部内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。

    Swing Objective Lens
    39.
    发明申请
    Swing Objective Lens 有权
    摆动物镜

    公开(公告)号：US20160172150A1

    公开(公告)日：2016-06-16

    申请号：US14964274

    申请日：2015-12-09

    Applicant: Hermes Microvision Inc.

    Inventor： Shuai Li

    IPC: H01J37/147 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28

    CPC classification number: H01J37/1478 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/1035 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/1508 ,  H01J2237/1534 ,  H01J2237/1536 ,  H01J2237/2801 ,  H01J2237/2811

    Abstract: A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.

    Abstract translation: 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上内表面倾斜一角度; 到SEM的外侧，并且其下内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。

Patent Agency Ranking