公开(公告)号：US08800483B2

公开(公告)日：2014-08-12

申请号：US12776132

申请日：2010-05-07

Applicant: Peter F. Vandermeulen

Inventor： Peter F. Vandermeulen

IPC: C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC classification number: H01J37/32229 ,  C23C16/511 ,  C23C16/513 ,  H01J37/05 ,  H01J37/08 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/3244 ,  H01J37/32669 ,  H01J2237/057 ,  H01J2237/0817 ,  H01J2237/3323 ,  H01P3/12 ,  H01P3/127 ,  H01Q21/0043

Abstract: A plasma deposition apparatus includes a waveguide conduit having a plurality of slots therein. The waveguide conduit is coupled to a microwave source for transmitting microwaves from the microwave source through the plurality of slots. One or more pipes have an outlet end positioned at each of the plurality of slots for transporting material from one or more material sources to the plurality of slots. The apparatus also includes a plasma chamber in communication with the waveguide tube through the plurality of slots. The plasma chamber receives through said plurality of slots microwaves from the waveguide tube and material to be melted or evaporated from the one or more pipes. The plasma chamber includes a plurality of magnets disposed in an outer wall of the plasma chamber for forming a magnetic field in the plasma chamber. The plasma chamber further includes one or more outlet openings for discharging plasma containing material to be deposited on a substrate.

Abstract translation: 等离子体沉积设备包括其中具有多个狭槽的波导管道。 波导管道耦合到微波源，用于从微波源通过多个狭槽传送微波。 一个或多个管道具有位于多个狭槽中的每一个的出口端，用于将材料从一个或多个材料源输送到多个狭槽。 该装置还包括通过多个狭槽与波导管连通的等离子体室。 等离子体腔室通过所述多个槽从波导管接收微波，并且从一个或多个管道熔化或蒸发的材料。 等离子体室包括设置在等离子体室的外壁中的多个磁体，用于在等离子体室中形成磁场。 等离子体室还包括一个或多个出口开口，用于排放待沉积在衬底上的等离子体材料。

公开(公告)号：US20140158885A1

公开(公告)日：2014-06-12

申请号：US14156140

申请日：2014-01-15

Applicant: EBARA CORPORATION

Inventor： Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

IPC: G01N23/225

CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/225 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2801 ,  H01J2237/2817 ,  H01L21/6833 ,  H01L2223/54466

Abstract: A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.

Abstract translation: 提供了一种用于进一步提高速度的系统，即提高SEM型检查装置中的生产量。 用于检查基板的表面的检查装置产生从电子束源25·1发射的电子的交叉，然后在样品W的方向上以期望的倍率形成图像以产生交叉。 当交叉通过时，作为噪声的电子从具有孔的交叉点移除，进行调整，使得交叉成为平行电子束以以期望的分段形式照射基板。 产生电子束，使照度不均匀为10％以下。 从样品W发射的电子被检测器25·11检测。

公开(公告)号：US08710452B2

公开(公告)日：2014-04-29

申请号：US13294067

申请日：2011-11-10

Applicant: Alexander Henstra

Inventor： Alexander Henstra

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/22

CPC classification number: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/31713

Abstract: A charged particle filter with an integrated energy filter, in which the charged particle emitter, the focusing electrodes, and the deflection electrodes are arranged round a straight axis. Where most energy filters used have a highly curved optical axis, and thus use parts with forms that are difficult to manufacture, the source according the invention uses electrodes surrounding a straight optical axis. A beam of charged particles can be deflected quite far from the axis showing respectable energy dispersion at an energy selecting slit without introducing coma or astigmatism that cannot be corrected, provided that some of the are formed as 120°/60°/120°/60°. Such electrodes can be attached to each other by gluing or brazing of ceramic, and then series of a highly concentric bores can be formed by, e.g., spark erosion.

Abstract translation: 具有集成能量滤波器的带电粒子滤波器，其中带电粒子发射器，聚焦电极和偏转电极绕直线布置。 在使用大多数能量过滤器具有高度弯曲的光轴的情况下，因此使用具有难以制造的形式的部件，根据本发明的源使用围绕直线光轴的电极。 带电粒子的束可以在能量选择狭缝处偏离显示出可观的能量分散的轴线，而不引入无法校正的彗差或像散，只要其中一些形成为120°/ 60°/ 120°/ 60° °。 这样的电极可以通过陶瓷的胶合或钎焊而彼此附接，然后可以通过例如火花腐蚀形成一系列高度同心的孔。

公开(公告)号：US08669517B2

公开(公告)日：2014-03-11

申请号：US13474186

申请日：2012-05-17

Applicant: William O. Hamby ,  Joseph Valinski

Inventor： William O. Hamby ,  Joseph Valinski

IPC: H01J37/30 ,  H01J49/00

CPC classification number: H01J37/3171 ,  H01J37/023 ,  H01J37/05 ,  H01J49/30 ,  H01J2237/0455 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/24514

Abstract: A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that selectively reduces the size of an exit aperture as seen by an ion beam. In one embodiment, the variable mass analysis exit aperture is located within a mass analyzer at a position upstream of a resolving aperture and effectively limits the size of an exit aperture so as to allow passage of desired implantation isotope(s) while blocking the passage of unwanted implantation isotopes. In one particular embodiment, the mass analysis variable exit aperture has a mechanical drive mechanism that enables a blocking structure to be moved into the path of an ion beam in a graduated fashion as guided by a control unit that operates based upon one or more characteristics of the ion beam.

Abstract translation: 提供了一种用于从离子束线减少离子注入物质的不想要的同位素的方法和装置。 本文公开的装置是质量分析可变出口孔，其选择性地减小出口孔的尺寸，如离子束所见。 在一个实施例中，可变质量分析出口孔位于质量分析器内的分辨孔径上游的位置处，并且有效地限制出口孔的尺寸，以允许期望的注入同位素通过，同时阻止 不想要的植入同位素。 在一个具体实施例中，质量分析可变出口孔具有机械驱动机构，其使阻挡结构能够以分级方式移动到离子束的路径中，该控制单元基于一个或多个 离子束。

公开(公告)号：US08592785B2

公开(公告)日：2013-11-26

申请号：US13240951

申请日：2011-09-22

Applicant: Nai-Han Cheng ,  Chin-Hsiang Lin ,  Chi-Ming Yang ,  Chun-Lin Chang ,  Chih-Hong Hwang

Inventor： Nai-Han Cheng ,  Chin-Hsiang Lin ,  Chi-Ming Yang ,  Chun-Lin Chang ,  Chih-Hong Hwang

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  G21K5/00 ,  H01J3/14 ,  H01J37/05 ,  H01J37/147

Abstract: An multi-ion beam implantation apparatus and method are disclosed. An exemplary apparatus includes an ion beam source that emits at least two ion beams; an ion beam analyzer; and a multi-ion beam angle incidence control system. The ion beam analyzer and the multi-ion beam angle incidence control system are configured to direct the emitted at least two ion beams to a wafer.

Abstract translation: 公开了一种多离子束注入装置和方法。 示例性装置包括发射至少两个离子束的离子束源; 离子束分析仪; 和多离子束角度入射控制系统。 离子束分析仪和多离子束角入射控制系统被配置为将发射的至少两个离子束引导到晶片。

公开(公告)号：US20130256552A1

公开(公告)日：2013-10-03

申请号：US13438424

申请日：2012-04-03

Applicant: Hilton Frank Glavish ,  Shojiro Dohi ,  Benjamin Thomas King

Inventor： Hilton Frank Glavish ,  Shojiro Dohi ,  Benjamin Thomas King

IPC: H01J3/26

CPC classification number: H01J37/05 ,  H01J37/1475 ,  H01J2237/055 ,  H01J2237/1523 ,  H01J2237/31701

Abstract: An ion beam bending magnet provides a curved path through the magnet for bending a ribbon-shaped ion beam having its major cross-sectional dimension normal to the bending plane of the magnet. The magnet comprises a ferromagnetic yoke surrounding the beam path and having an internal profile in cross-section formed of four angled sides. These sides are angled to the major dimension of the ribbon beam passing through the magnet, so that the internal profile of the yoke is relatively wide in the center of the ribbon beam and relatively narrow near the top and bottom edges of the ribbon beam. Electrical conductors against the internal surfaces of the yoke provide a uniform distribution of electrical current per unit length along the angled sides of the profile, providing a substantially uniform magnetic bending field within the magnet yoke.

Abstract translation: 离子束弯曲磁体提供穿过磁体的弯曲路径，用于弯曲具有垂直于磁体的弯曲平面的主横截面尺寸的带状离子束。 磁体包括铁磁磁轭，其围绕光束路径并且具有由四个成角度的侧面形成的横截面的内部轮廓。 这些侧面与通过磁体的带状束的主要尺寸成角度，使得轭的内部轮廓在带状束的中心处相对较宽，并且在带状束的顶部和底部边缘附近相对较窄。 抵靠轭的内表面的电导体沿着轮廓的成角度的侧面提供均匀分布的单位长度的电流，从而在磁轭内提供基本上均匀的磁弯曲场。

公开(公告)号：US08481931B2

公开(公告)日：2013-07-09

申请号：US12482577

申请日：2009-06-11

Applicant: Simon Page

Inventor： Simon Page

IPC: G21K5/00 ,  H01J37/26

CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子能谱装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

公开(公告)号：US20130112890A1

公开(公告)日：2013-05-09

申请号：US13601818

申请日：2012-08-31

Applicant: N. William Parker ,  Wesley Hughes

Inventor： N. William Parker ,  Wesley Hughes

IPC: H01J3/18

CPC classification number: H01J37/05 ,  H01J37/3056 ,  H01J2237/043 ,  H01J2237/057 ,  H01J2237/1534

Abstract: A multi-element electrostatic chicane energy filter, with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements. A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam.

Abstract translation: 多元素静电智能能量滤波器，向偶极子元件添加静电四极和六极激发。 根据本发明的具有能够在孔处产生线焦点的偶极子，四极和六极元件的组合的带电粒子能量过滤器减少了空间电荷效应和孔径损伤。 优选的实施方案允许过滤器充当共轭体消隐系统。 能量过滤器能够使能量扩展变窄，导致较小的光束。

公开(公告)号：US08421027B2

公开(公告)日：2013-04-16

申请号：US12523287

申请日：2008-01-14

Applicant: Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

Inventor： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

IPC: H01J3/26

CPC classification number: H01J37/05 ,  H01J37/256 ,  H01J37/28 ,  H01J49/488 ,  H01J2237/053 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/2516

Abstract: A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

Abstract translation: 带电粒子分析仪（1）包括用于接收具有发散轨迹的带电粒子并用于将所述轨迹转换成基本上平行轨迹的第一非成像静电透镜（8,9）。 提供至少一个平面过滤器（10）用于接收具有基本上平行轨迹的带电粒子并根据它们各自的能量对带电粒子进行过滤。 第二非成像静电透镜（11）接收能量过滤的带电粒子并根据其能量选择性地修改它们的轨迹。 带电粒子检测器（12）然后根据它们选择性地修改的轨迹接收带电粒子。

公开(公告)号：US08373137B2

公开(公告)日：2013-02-12

申请号：US12924320

申请日：2010-09-24

Applicant: Ondrej L. Krivanek ,  Niklas Dellby

Inventor： Ondrej L. Krivanek ,  Niklas Dellby

IPC: H01J3/26

CPC classification number: H01J37/05 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.

Abstract translation: 一种高分辨率能量选择电子束装置和方法，用于通过限制允许的电子的能量范围来改善电子 - 光学系统的能量分辨率，并且还可以通过校正彩色和几何像差来提高空间分辨率。 该装置包括根据电子能量将电子束分散到能谱中的多个磁性或静电棱镜，增加能谱的能量分散的多个放大透镜，例如电磁或静电四极，能量 选择狭缝，其选择电子的所需能量范围，以及任选地还可以校正电子 - 光学系统的彩色和几何像差的六极，八极和高阶透镜。 该装置还包括进一步的磁性或静电棱镜和电子透镜，其布置成使得从装置出射的电子束的能量色散被消除。