公开(公告)号：US08835848B2

公开(公告)日：2014-09-16

申请号：US14180350

申请日：2014-02-13

申请人： Industry-University Cooperation Foundation Sunmoon University

发明人： Tae Sik Oh ,  Ho Seob Kim ,  Dae Wook Kim ,  Seung-Joon Ahn

IPC分类号： H01J29/46 ,  H01J3/36 ,  H01J3/14 ,  H01J3/26

CPC分类号： H01J3/26 ,  H01J3/021 ,  H01J3/12 ,  H01J3/14 ,  H01J3/18 ,  H01J3/30 ,  H01J37/04 ,  H01J2237/1205

摘要： An ultra-miniaturized electron optical microcolumn is provided. The electron optical microcolumn includes an electron-emitting source emitting electrons using a field emission principle, an extraction electrode causing the emission of electrons from the electron-emitting source, a focusing electrode to which voltage is flexibly applied in response to a working distance to a target for regulating a focusing force of electron beams emitted from the electron-emitting source, an acceleration electrode accelerating electrons emitted by the extraction electrode, a limit electrode regulating an amount and a size of electron beams using electrons accelerated by the acceleration electrode, and a deflector deflecting electron beams towards the target.

摘要翻译： 提供超小型电子光学微柱。 电子光学微柱包括使用场致发射原理发射电子的电子发射源，引起来自电子发射源的电子的引出电极，响应于工作距离而被柔性施加电压的聚焦电极 用于调节从电子发射源发射的电子束的聚焦力的目标，加速由引出电极发射的电子的加速电极，限制电极使用由加速电极加速的电子来调节电子束的量和尺寸，以及 偏转器偏转电子束朝向目标。

公开(公告)号：US20130334410A1

公开(公告)日：2013-12-19

申请号：US13847566

申请日：2013-03-20

申请人： Brookhaven Science Associates, LLC

发明人： Peter Werner Sutter ,  Eli Anguelova Sutter

IPC分类号： H05H3/00 ,  H01J3/14 ,  G02B5/10

CPC分类号： H05H3/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/188 ,  C01B2204/04 ,  G02B1/105 ,  G02B1/14 ,  G02B5/10 ,  H01J3/14 ,  H01J2201/30461

摘要： Disclosed is monolayer and/or few-layer graphene on metal or metal-coated substrates. Embodiments include graphene mirrors. In an example, a mirror includes a substrate that has a surface exhibiting a curvature operable to focus an incident beam onto a focal plane. A graphene layer conformally adheres to the substrate, and is operable to protect the substrate surface from degradation due to the incident beam and an ambient environment.

摘要翻译： 公开了在金属或金属涂覆的基底上的单层和/或几层石墨烯。 实施例包括石墨烯镜。 在一个示例中，反射镜包括具有表现出可操作以将入射光束聚焦到焦平面上的曲率的表面的基板。 石墨烯层保形地粘合到基底上，并且可操作以保护基底表面免受由于入射光束和周围环境的降解。

公开(公告)号：US08530851B2

公开(公告)日：2013-09-10

申请号：US13723269

申请日：2012-12-21

申请人： ATTI International Services Company, Inc.

发明人： Artush A. Abgaryan ,  Eli Levi ,  Thomas Leddy

IPC分类号： H01J3/14

CPC分类号： H01J3/14 ,  H01J3/26 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/24507 ,  H01J2237/24514 ,  H01J2237/24542

摘要： Electron beam profile testing and analysis method is introduced using the MOMS apparatus. The MOMS apparatus includes a Faraday Cup with a knife-wires scanning system which together perform simultaneous measurements. The scanning system has a five-dimensional processing mechanism for measuring different cross sections of an e-beam profile in a path of the e-beam. Measurements are conducted using the scanning system by virtually dividing each cross section into a plurality of subsections and measuring independent current values of at least one wire of the scanning system through which the electron beam passes from every pixel in each of the plurality of subsections. By providing relative movement between the scanning system and e-beam, the measured independent current values are analyzed to obtain the functional form of distribution of current density of the cross-section of the e-beam. The Faraday cup enables simultaneous measurement of the total value of the current.

摘要翻译： 使用MOMS仪器引入电子束剖面测试和分析方法。 MOMS装置包括具有刀线扫描系统的法拉第杯，它们一起执行同时测量。 扫描系统具有用于测量电子束的路径中的电子束轮廓的不同横截面的五维处理机构。 使用扫描系统进行测量，通过将每个横截面实际上划分成多个子部分并且测量扫描系统的至少一根导线的独立电流值，电子束通过该电子束从多个子部分中的每一个中的每个像素通过。 通过提供扫描系统和电子束之间的相对运动，分析测量的独立电流值以获得电子束横截面的电流密度分布的功能形式。 法拉第杯可以同时测量电流的总值。

公开(公告)号：US20130032701A1

公开(公告)日：2013-02-07

申请号：US13198902

申请日：2011-08-05

申请人： Chih-Cheng CHEN ,  Jin-Shan Pan

发明人： Chih-Cheng CHEN ,  Jin-Shan Pan

IPC分类号： H01J3/14 ,  H01L21/78

CPC分类号： H01J3/14 ,  H01L31/167 ,  H01L33/486 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A submount is used for disposing an illuminant element or a light-receiving element having an optical axis. The submount is disposed at a plane and has a main body. The main body includes a first surface and a second surface. The first surface is approximately parallel to the plane and far away from the plane. The second surface is approximately parallel to the plane and adjacent to the plane. A disposing part of the first surface is tilted with respect to the second surface at a predetermined angle. The illuminant element or the light-receiving element is disposed on the disposing part. The optical axis of the illuminant element or the light-receiving element is tiled with respect to a normal of the second surface at the predetermined angle.

摘要翻译： 基座用于设置具有光轴的光源元件或光接收元件。 底座设置在平面上并具有主体。 主体包括第一表面和第二表面。 第一表面大致平行于平面并远离平面。 第二表面大致平行于平面并与平面相邻。 第一表面的设置部分以预定角度相对于第二表面倾斜。 照明元件或光接收元件设置在配置部上。 光源元件或光接收元件的光轴相对于第二表面的法线以预定角度被平铺。

公开(公告)号：US20120193551A1

公开(公告)日：2012-08-02

申请号：US13019675

申请日：2011-02-02

申请人： Marc Christophersen ,  Bernard F. Phlips

发明人： Marc Christophersen ,  Bernard F. Phlips

IPC分类号： H01J3/14 ,  G01T5/00

CPC分类号： G01T1/02 ,  G02F1/167 ,  H01J3/14

摘要： Caesium-137 irradiates electronic paper. An incoming gamma-ray from the Cs-137 interacts with a particle inside a micro-container by generating a recoil electron and/or a hole. Because the recoil electron physically leaves the particle, the particle is charged depending on the dose from the radiation source. And, the charge of the particles change, which results in a movement of the particles within the micro-container. After refreshing the electronic paper, a visible difference in the gray-scale can be seen. Thus, the visible difference in the gray-scale is an effect caused by the irradiation of the electronic paper, showing sensitivity to high energy radiation--thus, non-optimized electronic paper is sensitive to high energy radiation and can be used as a radiation dosimeter. In addition, electronic paper can be used for sensing chemical and bio-chemical agents, as well as detecting high energy radiation.

摘要翻译： 铯-133辐射电子纸。 来自Cs-137的进入的γ射线通过产生反冲电子和/或孔而与微容器内的颗粒相互作用。 因为反冲电子物理地离开颗粒，所以根据辐射源的剂量对颗粒进行充电。 并且，颗粒的电荷改变，这导致微粒在微型容器内的移动。 刷新电子纸后，可以看出灰度的明显差异。 因此，灰度的可见差异是由电子纸的照射引起的影响，显示出对高能量辐射的敏感性 - 因此，未优化的电子纸对高能量辐射敏感并且可以用作辐射 剂量计 此外，电子纸可用于感测化学和生物化学试剂，以及检测高能量辐射。

公开(公告)号：US20110215256A1

公开(公告)日：2011-09-08

申请号：US12931987

申请日：2011-02-15

申请人： Takashi Ogawa ,  Kenichi Nishinaka ,  Yasuhiko Sugiyama

发明人： Takashi Ogawa ,  Kenichi Nishinaka ,  Yasuhiko Sugiyama

IPC分类号： H01J3/14 ,  H01J3/26

CPC分类号： H01J3/14 ,  H01J3/26

摘要： A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit including an ion source gas nozzle configured to supply gas to the tip and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample, and a gun alignment electrode positioned on the side of the sample with respect to the ion gun unit and adjusts the direction of irradiation of the ion beam ejected from the ion gun unit. A lens system includes a focusing lens electrode and an objective lens electrode to focus the ion beam onto the sample.

摘要翻译： 聚焦离子束装置包括具有发射极尖端的离子枪单元，气体供给单元，其包括被配置为向尖端供应气体的离子源气体喷嘴和离子源气体供给源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极电极将离子朝向样品加速，并且枪对准电极相对于离子枪单元位于样品侧，并调节从离子枪单元喷射的离子束的照射方向。 透镜系统包括聚焦透镜电极和用于将离子束聚焦到样品上的物镜电极。

公开(公告)号：US20090026361A1

公开(公告)日：2009-01-29

申请号：US12220321

申请日：2008-07-23

申请人： Richard Syms ,  Alan Finlay

发明人： Richard Syms ,  Alan Finlay

IPC分类号： B01D59/44

CPC分类号： H01J3/14 ,  H01J49/0018 ,  H01J49/065

摘要： Microengineered stacked ring electrode assemblies capable of acting as either RF or DC ion guides in an ion optical system, and method of fabricating same are described. The electrodes are fabricated using planar processing as sets of grooved, proud features formed in a layer of material lying on an insulating substrate. Two such structures are then stacked together to form a set of diaphragm electrodes with closed pupils. Arrangements for fabrication by patterning, etching and bonding are described, together with methods for tapering the electrode pupils or otherwise varying the ion path.

摘要翻译： 描述了能够在离子光学系统中用作RF或DC离子导向器的微工程堆叠环形电极组件及其制造方法。 这些电极使用平面加工制造成为在位于绝缘衬底上的材料层中形成的一组带槽的引人注目的特征。 然后将两个这样的结构堆叠在一起以形成具有闭合瞳孔的一组隔膜电极。 描述通过图案化，蚀刻和接合进行制造的布置以及用于使电极瞳孔逐渐变细或以其它方式改变离子路径的方法。

公开(公告)号：US07394201B2

公开(公告)日：2008-07-01

申请号：US11248661

申请日：2005-10-11

申请人： John W. Lewellen ,  John Noonan

发明人： John W. Lewellen ,  John Noonan

IPC分类号： H01J25/00

CPC分类号： H01J3/14 ,  H01J3/021 ,  H01J23/06

摘要： A novel method of gating electron emission from field-emitter cathodes for radio frequency (RF) electrode guns and a novel cathode that provides a focused electron beam without the need for magnetic fields or a curved cathode surface are provided. The phase and strength of a predefined harmonic field, such as the 3rd harmonic field, are adjusted relative to a fundamental field to cause a field emission cathode to emit electrons at predefined times for the generation of high-brightness electron beams. The emission time is gated responsive to the combined harmonic and fundamental fields and the response of the FE cathode to the combined fields. A planar focusing cathode includes a selected dielectric material, such as a ceramic material, to provide an electron beam emission surface. Metal surfaces are provided both radially around and behind the dielectric material to shape the electric fields that accelerate and guide the beam from the cathode surface.

摘要翻译： 提供了一种用于射频（RF）电极枪的场发射极阴极的电子发射的新颖方法和提供聚焦电子束而不需要磁场或弯曲阴极表面的新型阴极。 预定谐波场（例如三次谐波场）的相位和强度相对于基波场被调整，以使场致发射阴极在预定时间内发射电子以产生高亮度电子束。 发射时间响应于组合谐波和基波场以及FE阴极对组合场的响应而选通。 平面聚焦阴极包括选择的介电材料，例如陶瓷材料，以提供电子束发射表面。 在电介质材料的周围和后面设置金属表面，以形成加速和引导来自阴极表面的光束的电场。

公开(公告)号：US07268345B2

公开(公告)日：2007-09-11

申请号：US10414676

申请日：2003-04-16

申请人： Howard J. Schultz

发明人： Howard J. Schultz

IPC分类号： H01J3/14 ,  G01B11/24 ,  H04N1/04

CPC分类号： H01J3/14 ,  H04N1/00795 ,  H04N1/00827 ,  H04N13/221

摘要： An optical scanner for three-dimensional scanning comprises: a support bed; a flat, transparent plate; guide rails under the transparent plate; a carriage slidably attached to the guide rails; and one or more sensors attached to the bed/case or carriage. For three-dimensional imaging, multiple scanned images of the object are obtained, each of which is from light reflecting off the object at a different angle with respect to the path of the carriage. This is done by shining light on the object and appropriately channeling reflected light, from at least two different directions, into the sensor(s). In one embodiment, the carriage has three CCD sensors, one oriented rearwards (with respect to the path of travel of the carriage), one oriented vertically, and one oriented forwards—each effectively “sees” the object from a different orientation. The multiple scanned images can be used for stereoscopic viewing and/or three-dimensional rendering using a computer.

摘要翻译： 一种用于三维扫描的光学扫描器包括：支撑床; 平板，透明板; 透明板下的导轨; 可滑动地附接到导轨的托架; 以及一个或多个连接到床/箱或托架上的传感器。 对于三维成像，获得物体的多个扫描图像，每个扫描图像都是相对于托架路径以不同角度从物体反射的光。 这通过在对象上照射光并将反射光从至少两个不同方向适当地引导到传感器中来完成。 在一个实施例中，滑架具有三个CCD传感器，一个朝向后方（相对于滑架的行进路径），一个垂直定向，一个前进方向有效地从不同的方向“看到”物体。 多个扫描图像可以用于使用计算机的立体观看和/或三维渲染。

公开(公告)号：US20060006807A1

公开(公告)日：2006-01-12

申请号：US10887142

申请日：2004-07-08

申请人： John Lewellen ,  John Noonan

发明人： John Lewellen ,  John Noonan

IPC分类号： H01J25/00 ,  H01J25/10

CPC分类号： H01J3/14 ,  H01J3/021 ,  H01J23/06

摘要： A novel method of gating electron emission from field-emitter cathodes for radio frequency (RF) electrode guns and a novel cathode that provides a focused electron beam without the need for magnetic fields or a curved cathode surface are provided. The phase and strength of a predefined harmonic field, such as the 3rd harmonic field, are adjusted relative to a fundamental field to cause a field emission cathode to emit electrons at predefined times for the generation of high-brightness electron beams. The emission time is gated responsive to the combined harmonic and fundamental fields and the response of the FE cathode to the combined fields. A planar focusing cathode includes a selected dielectric material, such as a ceramic material, to provide an electron beam emission surface. Metal surfaces are provided both radially around and behind the dielectric material to shape the electric fields that accelerate and guide the beam from the cathode surface.

摘要翻译： 提供了一种用于射频（RF）电极枪的场发射极阴极的电子发射的新颖方法和提供聚焦电子束而不需要磁场或弯曲阴极表面的新型阴极。 预定谐波场（例如三次谐波场）的相位和强度相对于基波场被调整，以使场致发射阴极在预定时间内发射电子以产生高亮度电子束。 发射时间响应于组合谐波和基波场以及FE阴极对组合场的响应而选通。 平面聚焦阴极包括选择的介电材料，例如陶瓷材料，以提供电子束发射表面。 在电介质材料的周围和后面设置金属表面，以形成加速和引导来自阴极表面的光束的电场。